7/26/2011	10:27:10 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/26/2011	10:27:11 AM	Recipe started at 10:27 AM
7/26/2011	10:27:11 AM	Helium valve closed
7/26/2011	10:27:11 AM	H2 valve closed
7/26/2011	10:27:11 AM	BCl3 valve closed
7/26/2011	10:27:11 AM	PH3 valve closed
7/26/2011	10:27:11 AM	SiCl4 pre valve closed
7/26/2011	10:27:11 AM	SiCl4 post valve closed
7/26/2011	10:27:11 AM	Main Vac valve closed
7/26/2011	10:27:11 AM	Bypass valve closed
7/26/2011	10:27:11 AM	Bubbler valve closed
7/26/2011	10:27:11 AM	Helium MFC set to  0.000000
7/26/2011	10:27:11 AM	H2 MFC set to  0.000000
7/26/2011	10:27:11 AM	BCl3 MFC set to  0.000000
7/26/2011	10:27:11 AM	PHl3 MFC set to  0.000000
7/26/2011	10:27:11 AM	SiCl4 MFC set to  0.000000
7/26/2011	10:27:11 AM	Bypass solenoid MFC set to  0.000000
7/26/2011	10:27:11 AM	Tube furnace set to 0
7/26/2011	10:27:14 AM	H2 valve closed
7/26/2011	10:27:14 AM	BCl3 valve closed
7/26/2011	10:27:14 AM	PH3 valve closed
7/26/2011	10:27:14 AM	SiCl4 pre valve closed
7/26/2011	10:27:14 AM	SiCl4 post valve closed
7/26/2011	10:27:14 AM	Main Vac valve closed
7/26/2011	10:27:14 AM	Bypass valve closed
7/26/2011	10:27:14 AM	Bubbler valve closed
7/26/2011	10:27:14 AM	Helium valve opened
7/26/2011	10:27:14 AM	Helium MFC set to  500.000000
7/26/2011	10:27:14 AM	H2 MFC set to  0.000000
7/26/2011	10:27:14 AM	BCl3 MFC set to  0.000000
7/26/2011	10:27:14 AM	PHl3 MFC set to  0.000000
7/26/2011	10:27:14 AM	SiCl4 MFC set to  0.000000
7/26/2011	10:27:14 AM	Bypass solenoid MFC set to  0.000000
7/26/2011	10:27:14 AM	Tube furnace set to 0
7/26/2011	10:28:19 AM	Helium valve closed
7/26/2011	10:28:19 AM	H2 valve closed
7/26/2011	10:28:19 AM	BCl3 valve closed
7/26/2011	10:28:19 AM	PH3 valve closed
7/26/2011	10:28:19 AM	SiCl4 pre valve closed
7/26/2011	10:28:19 AM	SiCl4 post valve closed
7/26/2011	10:28:19 AM	Main Vac valve closed
7/26/2011	10:28:19 AM	Bypass valve closed
7/26/2011	10:28:19 AM	Bubbler valve closed
7/26/2011	10:28:19 AM	Helium MFC set to  0.000000
7/26/2011	10:28:19 AM	H2 MFC set to  0.000000
7/26/2011	10:28:19 AM	BCl3 MFC set to  0.000000
7/26/2011	10:28:19 AM	PHl3 MFC set to  0.000000
7/26/2011	10:28:19 AM	SiCl4 MFC set to  0.000000
7/26/2011	10:28:19 AM	Bypass solenoid MFC set to  0.000000
7/26/2011	10:28:20 AM	Tube furnace set to 0
7/26/2011	10:28:21 AM	Run finished at 10:28 AM
7/26/2011	10:28:21 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/26/2011	10:36:29 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/26/2011	10:36:30 AM	Recipe started at 10:36 AM
7/26/2011	10:36:30 AM	Helium valve closed
7/26/2011	10:36:30 AM	H2 valve closed
7/26/2011	10:36:30 AM	BCl3 valve closed
7/26/2011	10:36:30 AM	PH3 valve closed
7/26/2011	10:36:30 AM	SiCl4 pre valve closed
7/26/2011	10:36:30 AM	SiCl4 post valve closed
7/26/2011	10:36:30 AM	Main Vac valve closed
7/26/2011	10:36:30 AM	Bubbler valve closed
7/26/2011	10:36:30 AM	Bypass valve opened
7/26/2011	10:36:30 AM	Helium MFC set to  0.000000
7/26/2011	10:36:30 AM	H2 MFC set to  0.000000
7/26/2011	10:36:30 AM	BCl3 MFC set to  0.000000
7/26/2011	10:36:30 AM	PHl3 MFC set to  0.000000
7/26/2011	10:36:30 AM	SiCl4 MFC set to  0.000000
7/26/2011	10:36:30 AM	Bypass solenoid MFC set to  0.000000
7/26/2011	10:36:30 AM	Tube furnace set to 0
7/26/2011	10:37:39 AM	Helium valve closed
7/26/2011	10:37:39 AM	H2 valve closed
7/26/2011	10:37:39 AM	BCl3 valve closed
7/26/2011	10:37:39 AM	PH3 valve closed
7/26/2011	10:37:39 AM	SiCl4 pre valve closed
7/26/2011	10:37:39 AM	SiCl4 post valve closed
7/26/2011	10:37:39 AM	Main Vac valve closed
7/26/2011	10:37:39 AM	Bubbler valve closed
7/26/2011	10:37:39 AM	Bypass valve opened
7/26/2011	10:37:39 AM	Helium MFC set to  0.000000
7/26/2011	10:37:39 AM	H2 MFC set to  0.000000
7/26/2011	10:37:39 AM	BCl3 MFC set to  0.000000
7/26/2011	10:37:39 AM	PHl3 MFC set to  0.000000
7/26/2011	10:37:39 AM	SiCl4 MFC set to  0.000000
7/26/2011	10:37:39 AM	Bypass solenoid MFC set to  0.000000
7/26/2011	10:37:39 AM	Tube furnace set to 0
7/26/2011	10:38:39 AM	Helium valve closed
7/26/2011	10:38:39 AM	H2 valve closed
7/26/2011	10:38:39 AM	BCl3 valve closed
7/26/2011	10:38:39 AM	PH3 valve closed
7/26/2011	10:38:39 AM	SiCl4 pre valve closed
7/26/2011	10:38:39 AM	SiCl4 post valve closed
7/26/2011	10:38:39 AM	Bypass valve closed
7/26/2011	10:38:39 AM	Bubbler valve closed
7/26/2011	10:38:39 AM	Main Vac valve opened
7/26/2011	10:38:39 AM	Helium MFC set to  0.000000
7/26/2011	10:38:39 AM	H2 MFC set to  0.000000
7/26/2011	10:38:39 AM	BCl3 MFC set to  0.000000
7/26/2011	10:38:39 AM	PHl3 MFC set to  0.000000
7/26/2011	10:38:39 AM	SiCl4 MFC set to  0.000000
7/26/2011	10:38:39 AM	Bypass solenoid MFC set to  0.000000
7/26/2011	10:38:39 AM	Tube furnace set to 0
7/26/2011	10:38:40 AM	Run finished at 10:38 AM
7/26/2011	10:38:40 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/26/2011	10:43:58 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
7/26/2011	10:44:12 AM	Recipe started at 10:44 AM
7/26/2011	10:44:12 AM	Helium valve closed
7/26/2011	10:44:12 AM	H2 valve closed
7/26/2011	10:44:12 AM	BCl3 valve closed
7/26/2011	10:44:12 AM	PH3 valve closed
7/26/2011	10:44:12 AM	SiCl4 pre valve closed
7/26/2011	10:44:12 AM	SiCl4 post valve closed
7/26/2011	10:44:12 AM	Main Vac valve closed
7/26/2011	10:44:12 AM	Bubbler valve closed
7/26/2011	10:44:12 AM	Bypass valve opened
7/26/2011	10:44:12 AM	Helium MFC set to  0.000000
7/26/2011	10:44:12 AM	H2 MFC set to  0.000000
7/26/2011	10:44:12 AM	BCl3 MFC set to  0.000000
7/26/2011	10:44:12 AM	PHl3 MFC set to  0.000000
7/26/2011	10:44:12 AM	SiCl4 MFC set to  0.000000
7/26/2011	10:44:12 AM	Bypass solenoid MFC set to  0.000000
7/26/2011	10:44:12 AM	Tube furnace set to 0
7/26/2011	10:44:13 AM	Helium valve closed
7/26/2011	10:44:13 AM	H2 valve closed
7/26/2011	10:44:13 AM	BCl3 valve closed
7/26/2011	10:44:13 AM	PH3 valve closed
7/26/2011	10:44:13 AM	SiCl4 pre valve closed
7/26/2011	10:44:13 AM	SiCl4 post valve closed
7/26/2011	10:44:13 AM	Main Vac valve closed
7/26/2011	10:44:13 AM	Bubbler valve closed
7/26/2011	10:44:13 AM	Bypass valve opened
7/26/2011	10:44:13 AM	Helium MFC set to  0.000000
7/26/2011	10:44:13 AM	H2 MFC set to  0.000000
7/26/2011	10:44:13 AM	BCl3 MFC set to  0.000000
7/26/2011	10:44:13 AM	PHl3 MFC set to  0.000000
7/26/2011	10:44:13 AM	SiCl4 MFC set to  0.000000
7/26/2011	10:44:13 AM	Bypass solenoid MFC set to  0.000000
7/26/2011	10:44:13 AM	Tube furnace set to 0
7/26/2011	10:44:43 AM	Helium valve closed
7/26/2011	10:44:43 AM	H2 valve closed
7/26/2011	10:44:43 AM	BCl3 valve closed
7/26/2011	10:44:43 AM	PH3 valve closed
7/26/2011	10:44:43 AM	SiCl4 pre valve closed
7/26/2011	10:44:43 AM	SiCl4 post valve closed
7/26/2011	10:44:43 AM	Bypass valve closed
7/26/2011	10:44:43 AM	Bubbler valve closed
7/26/2011	10:44:43 AM	Main Vac valve opened
7/26/2011	10:44:43 AM	Helium MFC set to  0.000000
7/26/2011	10:44:43 AM	H2 MFC set to  0.000000
7/26/2011	10:44:43 AM	BCl3 MFC set to  0.000000
7/26/2011	10:44:43 AM	PHl3 MFC set to  0.000000
7/26/2011	10:44:43 AM	SiCl4 MFC set to  0.000000
7/26/2011	10:44:43 AM	Bypass solenoid MFC set to  0.000000
7/26/2011	10:44:43 AM	Tube furnace set to 0
7/26/2011	10:45:13 AM	H2 valve closed
7/26/2011	10:45:13 AM	BCl3 valve closed
7/26/2011	10:45:13 AM	PH3 valve closed
7/26/2011	10:45:13 AM	SiCl4 pre valve closed
7/26/2011	10:45:13 AM	SiCl4 post valve closed
7/26/2011	10:45:13 AM	Bypass valve closed
7/26/2011	10:45:13 AM	Bubbler valve closed
7/26/2011	10:45:13 AM	Helium valve opened
7/26/2011	10:45:13 AM	Main Vac valve opened
7/26/2011	10:45:13 AM	Helium MFC set to  20.000000
7/26/2011	10:45:13 AM	H2 MFC set to  0.000000
7/26/2011	10:45:13 AM	BCl3 MFC set to  0.000000
7/26/2011	10:45:13 AM	PHl3 MFC set to  0.000000
7/26/2011	10:45:13 AM	SiCl4 MFC set to  0.000000
7/26/2011	10:45:13 AM	Bypass solenoid MFC set to  0.000000
7/26/2011	10:45:13 AM	Tube furnace set to 0
7/26/2011	10:45:43 AM	Helium valve closed
7/26/2011	10:45:43 AM	H2 valve closed
7/26/2011	10:45:43 AM	BCl3 valve closed
7/26/2011	10:45:43 AM	PH3 valve closed
7/26/2011	10:45:43 AM	SiCl4 pre valve closed
7/26/2011	10:45:43 AM	SiCl4 post valve closed
7/26/2011	10:45:43 AM	Bypass valve closed
7/26/2011	10:45:43 AM	Bubbler valve closed
7/26/2011	10:45:43 AM	Main Vac valve opened
7/26/2011	10:45:43 AM	Helium MFC set to  0.000000
7/26/2011	10:45:43 AM	H2 MFC set to  0.000000
7/26/2011	10:45:43 AM	BCl3 MFC set to  0.000000
7/26/2011	10:45:43 AM	PHl3 MFC set to  0.000000
7/26/2011	10:45:43 AM	SiCl4 MFC set to  0.000000
7/26/2011	10:45:43 AM	Bypass solenoid MFC set to  0.000000
7/26/2011	10:45:43 AM	Tube furnace set to 0
7/26/2011	10:46:14 AM	H2 valve closed
7/26/2011	10:46:14 AM	BCl3 valve closed
7/26/2011	10:46:14 AM	PH3 valve closed
7/26/2011	10:46:14 AM	SiCl4 pre valve closed
7/26/2011	10:46:14 AM	SiCl4 post valve closed
7/26/2011	10:46:14 AM	Bypass valve closed
7/26/2011	10:46:14 AM	Bubbler valve closed
7/26/2011	10:46:14 AM	Helium valve opened
7/26/2011	10:46:14 AM	Main Vac valve opened
7/26/2011	10:46:14 AM	Helium MFC set to  20.000000
7/26/2011	10:46:14 AM	H2 MFC set to  0.000000
7/26/2011	10:46:14 AM	BCl3 MFC set to  0.000000
7/26/2011	10:46:14 AM	PHl3 MFC set to  0.000000
7/26/2011	10:46:14 AM	SiCl4 MFC set to  0.000000
7/26/2011	10:46:14 AM	Bypass solenoid MFC set to  0.000000
7/26/2011	10:46:14 AM	Tube furnace set to 0
7/26/2011	10:46:44 AM	Helium valve closed
7/26/2011	10:46:44 AM	H2 valve closed
7/26/2011	10:46:44 AM	BCl3 valve closed
7/26/2011	10:46:44 AM	PH3 valve closed
7/26/2011	10:46:44 AM	SiCl4 pre valve closed
7/26/2011	10:46:44 AM	SiCl4 post valve closed
7/26/2011	10:46:44 AM	Bypass valve closed
7/26/2011	10:46:44 AM	Bubbler valve closed
7/26/2011	10:46:44 AM	Main Vac valve opened
7/26/2011	10:46:44 AM	Helium MFC set to  0.000000
7/26/2011	10:46:44 AM	H2 MFC set to  0.000000
7/26/2011	10:46:44 AM	BCl3 MFC set to  0.000000
7/26/2011	10:46:44 AM	PHl3 MFC set to  0.000000
7/26/2011	10:46:44 AM	SiCl4 MFC set to  0.000000
7/26/2011	10:46:44 AM	Bypass solenoid MFC set to  0.000000
7/26/2011	10:46:44 AM	Tube furnace set to 0
7/26/2011	10:47:14 AM	H2 valve closed
7/26/2011	10:47:14 AM	BCl3 valve closed
7/26/2011	10:47:14 AM	PH3 valve closed
7/26/2011	10:47:14 AM	SiCl4 pre valve closed
7/26/2011	10:47:14 AM	SiCl4 post valve closed
7/26/2011	10:47:14 AM	Bypass valve closed
7/26/2011	10:47:14 AM	Bubbler valve closed
7/26/2011	10:47:14 AM	Helium valve opened
7/26/2011	10:47:14 AM	Main Vac valve opened
7/26/2011	10:47:14 AM	Helium MFC set to  20.000000
7/26/2011	10:47:14 AM	H2 MFC set to  0.000000
7/26/2011	10:47:14 AM	BCl3 MFC set to  0.000000
7/26/2011	10:47:14 AM	PHl3 MFC set to  0.000000
7/26/2011	10:47:14 AM	SiCl4 MFC set to  0.000000
7/26/2011	10:47:14 AM	Bypass solenoid MFC set to  0.000000
7/26/2011	10:47:14 AM	Tube furnace set to 0
7/26/2011	10:47:44 AM	Helium valve closed
7/26/2011	10:47:44 AM	H2 valve closed
7/26/2011	10:47:44 AM	BCl3 valve closed
7/26/2011	10:47:44 AM	PH3 valve closed
7/26/2011	10:47:44 AM	SiCl4 pre valve closed
7/26/2011	10:47:44 AM	SiCl4 post valve closed
7/26/2011	10:47:44 AM	Bypass valve closed
7/26/2011	10:47:44 AM	Bubbler valve closed
7/26/2011	10:47:44 AM	Main Vac valve opened
7/26/2011	10:47:44 AM	Helium MFC set to  0.000000
7/26/2011	10:47:44 AM	H2 MFC set to  0.000000
7/26/2011	10:47:44 AM	BCl3 MFC set to  0.000000
7/26/2011	10:47:44 AM	PHl3 MFC set to  0.000000
7/26/2011	10:47:44 AM	SiCl4 MFC set to  0.000000
7/26/2011	10:47:44 AM	Bypass solenoid MFC set to  0.000000
7/26/2011	10:47:44 AM	Tube furnace set to 0
7/26/2011	10:48:14 AM	H2 valve closed
7/26/2011	10:48:14 AM	BCl3 valve closed
7/26/2011	10:48:14 AM	PH3 valve closed
7/26/2011	10:48:14 AM	SiCl4 pre valve closed
7/26/2011	10:48:14 AM	SiCl4 post valve closed
7/26/2011	10:48:14 AM	Bypass valve closed
7/26/2011	10:48:14 AM	Bubbler valve closed
7/26/2011	10:48:14 AM	Helium valve opened
7/26/2011	10:48:14 AM	Main Vac valve opened
7/26/2011	10:48:14 AM	Helium MFC set to  20.000000
7/26/2011	10:48:14 AM	H2 MFC set to  0.000000
7/26/2011	10:48:14 AM	BCl3 MFC set to  0.000000
7/26/2011	10:48:14 AM	PHl3 MFC set to  0.000000
7/26/2011	10:48:14 AM	SiCl4 MFC set to  0.000000
7/26/2011	10:48:14 AM	Bypass solenoid MFC set to  0.000000
7/26/2011	10:48:15 AM	Tube furnace set to 0
7/26/2011	10:48:45 AM	Helium valve closed
7/26/2011	10:48:45 AM	H2 valve closed
7/26/2011	10:48:45 AM	BCl3 valve closed
7/26/2011	10:48:45 AM	PH3 valve closed
7/26/2011	10:48:45 AM	SiCl4 pre valve closed
7/26/2011	10:48:45 AM	SiCl4 post valve closed
7/26/2011	10:48:45 AM	Bypass valve closed
7/26/2011	10:48:45 AM	Bubbler valve closed
7/26/2011	10:48:45 AM	Main Vac valve opened
7/26/2011	10:48:45 AM	Helium MFC set to  0.000000
7/26/2011	10:48:45 AM	H2 MFC set to  0.000000
7/26/2011	10:48:45 AM	BCl3 MFC set to  0.000000
7/26/2011	10:48:45 AM	PHl3 MFC set to  0.000000
7/26/2011	10:48:45 AM	SiCl4 MFC set to  0.000000
7/26/2011	10:48:45 AM	Bypass solenoid MFC set to  0.000000
7/26/2011	10:48:45 AM	Tube furnace set to 0
7/26/2011	10:49:15 AM	H2 valve closed
7/26/2011	10:49:15 AM	BCl3 valve closed
7/26/2011	10:49:15 AM	PH3 valve closed
7/26/2011	10:49:15 AM	SiCl4 pre valve closed
7/26/2011	10:49:15 AM	SiCl4 post valve closed
7/26/2011	10:49:15 AM	Bypass valve closed
7/26/2011	10:49:15 AM	Bubbler valve closed
7/26/2011	10:49:15 AM	Helium valve opened
7/26/2011	10:49:15 AM	Main Vac valve opened
7/26/2011	10:49:15 AM	Helium MFC set to  20.000000
7/26/2011	10:49:15 AM	H2 MFC set to  0.000000
7/26/2011	10:49:15 AM	BCl3 MFC set to  0.000000
7/26/2011	10:49:15 AM	PHl3 MFC set to  0.000000
7/26/2011	10:49:15 AM	SiCl4 MFC set to  0.000000
7/26/2011	10:49:15 AM	Bypass solenoid MFC set to  0.000000
7/26/2011	10:49:15 AM	Tube furnace set to 0
7/26/2011	10:49:45 AM	Helium valve closed
7/26/2011	10:49:45 AM	H2 valve closed
7/26/2011	10:49:45 AM	BCl3 valve closed
7/26/2011	10:49:45 AM	PH3 valve closed
7/26/2011	10:49:45 AM	SiCl4 pre valve closed
7/26/2011	10:49:45 AM	SiCl4 post valve closed
7/26/2011	10:49:45 AM	Bypass valve closed
7/26/2011	10:49:45 AM	Bubbler valve closed
7/26/2011	10:49:45 AM	Main Vac valve opened
7/26/2011	10:49:45 AM	Helium MFC set to  0.000000
7/26/2011	10:49:45 AM	H2 MFC set to  0.000000
7/26/2011	10:49:45 AM	BCl3 MFC set to  0.000000
7/26/2011	10:49:45 AM	PHl3 MFC set to  0.000000
7/26/2011	10:49:45 AM	SiCl4 MFC set to  0.000000
7/26/2011	10:49:45 AM	Bypass solenoid MFC set to  0.000000
7/26/2011	10:49:45 AM	Tube furnace set to 0
7/26/2011	10:49:45 AM	Run aborted at 10:49 AM
7/26/2011	10:49:45 AM	Helium valve closed
7/26/2011	10:49:45 AM	H2 valve closed
7/26/2011	10:49:45 AM	BCl3 valve closed
7/26/2011	10:49:45 AM	PH3 valve closed
7/26/2011	10:49:45 AM	SiCl4 pre valve closed
7/26/2011	10:49:45 AM	SiCl4 post valve closed
7/26/2011	10:49:45 AM	Bypass valve closed
7/26/2011	10:49:45 AM	Main Vac valve closed
7/26/2011	10:49:45 AM	Bubbler valve closed
7/26/2011	10:49:45 AM	Helium MFC set to  0.000000
7/26/2011	10:49:45 AM	H2 MFC set to  0.000000
7/26/2011	10:49:45 AM	BCl3 MFC set to  0.000000
7/26/2011	10:49:45 AM	PHl3 MFC set to  0.000000
7/26/2011	10:49:45 AM	SiCl4 MFC set to  0.000000
7/26/2011	10:49:46 AM	Tube furnace set to 0
7/26/2011	10:49:46 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
7/26/2011	10:54:08 AM	Main Vac valve opened
7/26/2011	10:55:33 AM	Recipe started at 10:55 AM
7/26/2011	10:55:33 AM	Helium valve closed
7/26/2011	10:55:33 AM	H2 valve closed
7/26/2011	10:55:33 AM	BCl3 valve closed
7/26/2011	10:55:33 AM	PH3 valve closed
7/26/2011	10:55:33 AM	SiCl4 pre valve closed
7/26/2011	10:55:33 AM	SiCl4 post valve closed
7/26/2011	10:55:33 AM	Bypass valve closed
7/26/2011	10:55:33 AM	Bubbler valve closed
7/26/2011	10:55:33 AM	Main Vac valve opened
7/26/2011	10:55:33 AM	Helium MFC set to  0.000000
7/26/2011	10:55:33 AM	H2 MFC set to  0.000000
7/26/2011	10:55:33 AM	BCl3 MFC set to  0.000000
7/26/2011	10:55:33 AM	PHl3 MFC set to  0.000000
7/26/2011	10:55:33 AM	SiCl4 MFC set to  0.000000
7/26/2011	10:55:33 AM	Bypass solenoid MFC set to  0.000000
7/26/2011	10:55:33 AM	Tube furnace set to 0
7/26/2011	10:56:03 AM	H2 valve closed
7/26/2011	10:56:03 AM	BCl3 valve closed
7/26/2011	10:56:03 AM	PH3 valve closed
7/26/2011	10:56:03 AM	SiCl4 pre valve closed
7/26/2011	10:56:03 AM	SiCl4 post valve closed
7/26/2011	10:56:03 AM	Bypass valve closed
7/26/2011	10:56:03 AM	Bubbler valve closed
7/26/2011	10:56:03 AM	Helium valve opened
7/26/2011	10:56:03 AM	Main Vac valve opened
7/26/2011	10:56:03 AM	Helium MFC set to  20.000000
7/26/2011	10:56:03 AM	H2 MFC set to  0.000000
7/26/2011	10:56:03 AM	BCl3 MFC set to  0.000000
7/26/2011	10:56:03 AM	PHl3 MFC set to  0.000000
7/26/2011	10:56:03 AM	SiCl4 MFC set to  0.000000
7/26/2011	10:56:03 AM	Bypass solenoid MFC set to  0.000000
7/26/2011	10:56:03 AM	Tube furnace set to 0
7/26/2011	10:56:33 AM	Helium valve closed
7/26/2011	10:56:33 AM	H2 valve closed
7/26/2011	10:56:33 AM	BCl3 valve closed
7/26/2011	10:56:33 AM	PH3 valve closed
7/26/2011	10:56:33 AM	SiCl4 pre valve closed
7/26/2011	10:56:33 AM	SiCl4 post valve closed
7/26/2011	10:56:33 AM	Bypass valve closed
7/26/2011	10:56:33 AM	Bubbler valve closed
7/26/2011	10:56:33 AM	Main Vac valve opened
7/26/2011	10:56:33 AM	Helium MFC set to  0.000000
7/26/2011	10:56:33 AM	H2 MFC set to  0.000000
7/26/2011	10:56:33 AM	BCl3 MFC set to  0.000000
7/26/2011	10:56:33 AM	PHl3 MFC set to  0.000000
7/26/2011	10:56:33 AM	SiCl4 MFC set to  0.000000
7/26/2011	10:56:33 AM	Bypass solenoid MFC set to  0.000000
7/26/2011	10:56:33 AM	Tube furnace set to 0
7/26/2011	10:57:04 AM	H2 valve closed
7/26/2011	10:57:04 AM	BCl3 valve closed
7/26/2011	10:57:04 AM	PH3 valve closed
7/26/2011	10:57:04 AM	SiCl4 pre valve closed
7/26/2011	10:57:04 AM	SiCl4 post valve closed
7/26/2011	10:57:04 AM	Bypass valve closed
7/26/2011	10:57:04 AM	Bubbler valve closed
7/26/2011	10:57:04 AM	Helium valve opened
7/26/2011	10:57:04 AM	Main Vac valve opened
7/26/2011	10:57:04 AM	Helium MFC set to  20.000000
7/26/2011	10:57:04 AM	H2 MFC set to  0.000000
7/26/2011	10:57:04 AM	BCl3 MFC set to  0.000000
7/26/2011	10:57:04 AM	PHl3 MFC set to  0.000000
7/26/2011	10:57:04 AM	SiCl4 MFC set to  0.000000
7/26/2011	10:57:04 AM	Bypass solenoid MFC set to  0.000000
7/26/2011	10:57:04 AM	Tube furnace set to 0
7/26/2011	10:57:34 AM	Helium valve closed
7/26/2011	10:57:34 AM	H2 valve closed
7/26/2011	10:57:34 AM	BCl3 valve closed
7/26/2011	10:57:34 AM	PH3 valve closed
7/26/2011	10:57:34 AM	SiCl4 pre valve closed
7/26/2011	10:57:34 AM	SiCl4 post valve closed
7/26/2011	10:57:34 AM	Bypass valve closed
7/26/2011	10:57:34 AM	Bubbler valve closed
7/26/2011	10:57:34 AM	Main Vac valve opened
7/26/2011	10:57:34 AM	Helium MFC set to  0.000000
7/26/2011	10:57:34 AM	H2 MFC set to  0.000000
7/26/2011	10:57:34 AM	BCl3 MFC set to  0.000000
7/26/2011	10:57:34 AM	PHl3 MFC set to  0.000000
7/26/2011	10:57:34 AM	SiCl4 MFC set to  0.000000
7/26/2011	10:57:34 AM	Bypass solenoid MFC set to  0.000000
7/26/2011	10:57:34 AM	Tube furnace set to 0
7/26/2011	10:58:04 AM	H2 valve closed
7/26/2011	10:58:04 AM	BCl3 valve closed
7/26/2011	10:58:04 AM	PH3 valve closed
7/26/2011	10:58:04 AM	SiCl4 pre valve closed
7/26/2011	10:58:04 AM	SiCl4 post valve closed
7/26/2011	10:58:04 AM	Bypass valve closed
7/26/2011	10:58:04 AM	Bubbler valve closed
7/26/2011	10:58:04 AM	Helium valve opened
7/26/2011	10:58:04 AM	Main Vac valve opened
7/26/2011	10:58:04 AM	Helium MFC set to  20.000000
7/26/2011	10:58:04 AM	H2 MFC set to  0.000000
7/26/2011	10:58:04 AM	BCl3 MFC set to  0.000000
7/26/2011	10:58:04 AM	PHl3 MFC set to  0.000000
7/26/2011	10:58:04 AM	SiCl4 MFC set to  0.000000
7/26/2011	10:58:04 AM	Bypass solenoid MFC set to  0.000000
7/26/2011	10:58:04 AM	Tube furnace set to 0
7/26/2011	10:58:34 AM	Helium valve closed
7/26/2011	10:58:34 AM	H2 valve closed
7/26/2011	10:58:34 AM	BCl3 valve closed
7/26/2011	10:58:34 AM	PH3 valve closed
7/26/2011	10:58:34 AM	SiCl4 pre valve closed
7/26/2011	10:58:34 AM	SiCl4 post valve closed
7/26/2011	10:58:34 AM	Bypass valve closed
7/26/2011	10:58:34 AM	Bubbler valve closed
7/26/2011	10:58:34 AM	Main Vac valve opened
7/26/2011	10:58:34 AM	Helium MFC set to  0.000000
7/26/2011	10:58:34 AM	H2 MFC set to  0.000000
7/26/2011	10:58:34 AM	BCl3 MFC set to  0.000000
7/26/2011	10:58:34 AM	PHl3 MFC set to  0.000000
7/26/2011	10:58:34 AM	SiCl4 MFC set to  0.000000
7/26/2011	10:58:34 AM	Bypass solenoid MFC set to  0.000000
7/26/2011	10:58:34 AM	Tube furnace set to 0
7/26/2011	10:59:04 AM	H2 valve closed
7/26/2011	10:59:04 AM	BCl3 valve closed
7/26/2011	10:59:04 AM	PH3 valve closed
7/26/2011	10:59:04 AM	SiCl4 pre valve closed
7/26/2011	10:59:04 AM	SiCl4 post valve closed
7/26/2011	10:59:04 AM	Bypass valve closed
7/26/2011	10:59:04 AM	Bubbler valve closed
7/26/2011	10:59:04 AM	Helium valve opened
7/26/2011	10:59:04 AM	Main Vac valve opened
7/26/2011	10:59:04 AM	Helium MFC set to  20.000000
7/26/2011	10:59:04 AM	H2 MFC set to  0.000000
7/26/2011	10:59:04 AM	BCl3 MFC set to  0.000000
7/26/2011	10:59:04 AM	PHl3 MFC set to  0.000000
7/26/2011	10:59:04 AM	SiCl4 MFC set to  0.000000
7/26/2011	10:59:04 AM	Bypass solenoid MFC set to  0.000000
7/26/2011	10:59:04 AM	Tube furnace set to 0
7/26/2011	10:59:35 AM	Helium valve closed
7/26/2011	10:59:35 AM	H2 valve closed
7/26/2011	10:59:35 AM	BCl3 valve closed
7/26/2011	10:59:35 AM	PH3 valve closed
7/26/2011	10:59:35 AM	SiCl4 pre valve closed
7/26/2011	10:59:35 AM	SiCl4 post valve closed
7/26/2011	10:59:35 AM	Bypass valve closed
7/26/2011	10:59:35 AM	Bubbler valve closed
7/26/2011	10:59:35 AM	Main Vac valve opened
7/26/2011	10:59:35 AM	Helium MFC set to  0.000000
7/26/2011	10:59:35 AM	H2 MFC set to  0.000000
7/26/2011	10:59:35 AM	BCl3 MFC set to  0.000000
7/26/2011	10:59:35 AM	PHl3 MFC set to  0.000000
7/26/2011	10:59:35 AM	SiCl4 MFC set to  0.000000
7/26/2011	10:59:35 AM	Bypass solenoid MFC set to  0.000000
7/26/2011	10:59:35 AM	Tube furnace set to 0
7/26/2011	11:00:05 AM	H2 valve closed
7/26/2011	11:00:05 AM	BCl3 valve closed
7/26/2011	11:00:05 AM	PH3 valve closed
7/26/2011	11:00:05 AM	SiCl4 pre valve closed
7/26/2011	11:00:05 AM	SiCl4 post valve closed
7/26/2011	11:00:05 AM	Bypass valve closed
7/26/2011	11:00:05 AM	Bubbler valve closed
7/26/2011	11:00:05 AM	Helium valve opened
7/26/2011	11:00:05 AM	Main Vac valve opened
7/26/2011	11:00:05 AM	Helium MFC set to  20.000000
7/26/2011	11:00:05 AM	H2 MFC set to  0.000000
7/26/2011	11:00:05 AM	BCl3 MFC set to  0.000000
7/26/2011	11:00:05 AM	PHl3 MFC set to  0.000000
7/26/2011	11:00:05 AM	SiCl4 MFC set to  0.000000
7/26/2011	11:00:05 AM	Bypass solenoid MFC set to  0.000000
7/26/2011	11:00:05 AM	Tube furnace set to 0
7/26/2011	11:00:35 AM	Helium valve closed
7/26/2011	11:00:35 AM	H2 valve closed
7/26/2011	11:00:35 AM	BCl3 valve closed
7/26/2011	11:00:35 AM	PH3 valve closed
7/26/2011	11:00:35 AM	SiCl4 pre valve closed
7/26/2011	11:00:35 AM	SiCl4 post valve closed
7/26/2011	11:00:35 AM	Bypass valve closed
7/26/2011	11:00:35 AM	Bubbler valve closed
7/26/2011	11:00:35 AM	Main Vac valve opened
7/26/2011	11:00:35 AM	Helium MFC set to  0.000000
7/26/2011	11:00:35 AM	H2 MFC set to  0.000000
7/26/2011	11:00:35 AM	BCl3 MFC set to  0.000000
7/26/2011	11:00:35 AM	PHl3 MFC set to  0.000000
7/26/2011	11:00:35 AM	SiCl4 MFC set to  0.000000
7/26/2011	11:00:35 AM	Bypass solenoid MFC set to  0.000000
7/26/2011	11:00:35 AM	Tube furnace set to 0
7/26/2011	11:01:05 AM	H2 valve closed
7/26/2011	11:01:05 AM	BCl3 valve closed
7/26/2011	11:01:05 AM	PH3 valve closed
7/26/2011	11:01:05 AM	SiCl4 pre valve closed
7/26/2011	11:01:05 AM	SiCl4 post valve closed
7/26/2011	11:01:05 AM	Bypass valve closed
7/26/2011	11:01:05 AM	Bubbler valve closed
7/26/2011	11:01:05 AM	Helium valve opened
7/26/2011	11:01:05 AM	Main Vac valve opened
7/26/2011	11:01:05 AM	Helium MFC set to  20.000000
7/26/2011	11:01:05 AM	H2 MFC set to  0.000000
7/26/2011	11:01:05 AM	BCl3 MFC set to  0.000000
7/26/2011	11:01:05 AM	PHl3 MFC set to  0.000000
7/26/2011	11:01:05 AM	SiCl4 MFC set to  0.000000
7/26/2011	11:01:05 AM	Bypass solenoid MFC set to  0.000000
7/26/2011	11:01:05 AM	Tube furnace set to 0
7/26/2011	11:01:35 AM	Helium valve closed
7/26/2011	11:01:35 AM	H2 valve closed
7/26/2011	11:01:35 AM	BCl3 valve closed
7/26/2011	11:01:35 AM	PH3 valve closed
7/26/2011	11:01:35 AM	SiCl4 pre valve closed
7/26/2011	11:01:35 AM	SiCl4 post valve closed
7/26/2011	11:01:35 AM	Bypass valve closed
7/26/2011	11:01:35 AM	Bubbler valve closed
7/26/2011	11:01:35 AM	Main Vac valve opened
7/26/2011	11:01:35 AM	Helium MFC set to  0.000000
7/26/2011	11:01:35 AM	H2 MFC set to  0.000000
7/26/2011	11:01:35 AM	BCl3 MFC set to  0.000000
7/26/2011	11:01:35 AM	PHl3 MFC set to  0.000000
7/26/2011	11:01:35 AM	SiCl4 MFC set to  0.000000
7/26/2011	11:01:35 AM	Bypass solenoid MFC set to  0.000000
7/26/2011	11:01:36 AM	Tube furnace set to 0
7/26/2011	11:02:06 AM	H2 valve closed
7/26/2011	11:02:06 AM	BCl3 valve closed
7/26/2011	11:02:06 AM	PH3 valve closed
7/26/2011	11:02:06 AM	SiCl4 pre valve closed
7/26/2011	11:02:06 AM	SiCl4 post valve closed
7/26/2011	11:02:06 AM	Bypass valve closed
7/26/2011	11:02:06 AM	Bubbler valve closed
7/26/2011	11:02:06 AM	Helium valve opened
7/26/2011	11:02:06 AM	Main Vac valve opened
7/26/2011	11:02:06 AM	Helium MFC set to  20.000000
7/26/2011	11:02:06 AM	H2 MFC set to  0.000000
7/26/2011	11:02:06 AM	BCl3 MFC set to  0.000000
7/26/2011	11:02:06 AM	PHl3 MFC set to  0.000000
7/26/2011	11:02:06 AM	SiCl4 MFC set to  0.000000
7/26/2011	11:02:06 AM	Bypass solenoid MFC set to  0.000000
7/26/2011	11:02:06 AM	Tube furnace set to 0
7/26/2011	11:02:36 AM	Helium valve closed
7/26/2011	11:02:36 AM	H2 valve closed
7/26/2011	11:02:36 AM	BCl3 valve closed
7/26/2011	11:02:36 AM	PH3 valve closed
7/26/2011	11:02:36 AM	SiCl4 pre valve closed
7/26/2011	11:02:36 AM	SiCl4 post valve closed
7/26/2011	11:02:36 AM	Bypass valve closed
7/26/2011	11:02:36 AM	Bubbler valve closed
7/26/2011	11:02:36 AM	Main Vac valve opened
7/26/2011	11:02:36 AM	Helium MFC set to  0.000000
7/26/2011	11:02:36 AM	H2 MFC set to  0.000000
7/26/2011	11:02:36 AM	BCl3 MFC set to  0.000000
7/26/2011	11:02:36 AM	PHl3 MFC set to  0.000000
7/26/2011	11:02:36 AM	SiCl4 MFC set to  0.000000
7/26/2011	11:02:36 AM	Bypass solenoid MFC set to  0.000000
7/26/2011	11:02:36 AM	Tube furnace set to 0
7/26/2011	11:02:57 AM	Run aborted at 11:02 AM
7/26/2011	11:02:57 AM	Helium valve closed
7/26/2011	11:02:57 AM	H2 valve closed
7/26/2011	11:02:57 AM	BCl3 valve closed
7/26/2011	11:02:57 AM	PH3 valve closed
7/26/2011	11:02:57 AM	SiCl4 pre valve closed
7/26/2011	11:02:57 AM	SiCl4 post valve closed
7/26/2011	11:02:57 AM	Bypass valve closed
7/26/2011	11:02:57 AM	Main Vac valve closed
7/26/2011	11:02:57 AM	Bubbler valve closed
7/26/2011	11:02:57 AM	Helium MFC set to  0.000000
7/26/2011	11:02:57 AM	H2 MFC set to  0.000000
7/26/2011	11:02:57 AM	BCl3 MFC set to  0.000000
7/26/2011	11:02:57 AM	PHl3 MFC set to  0.000000
7/26/2011	11:02:57 AM	SiCl4 MFC set to  0.000000
7/26/2011	11:02:57 AM	Tube furnace set to 0
7/26/2011	11:03:01 AM	Main Vac valve opened
7/26/2011	11:05:23 AM	Recipe started at 11:05 AM
7/26/2011	11:05:23 AM	Helium valve closed
7/26/2011	11:05:23 AM	H2 valve closed
7/26/2011	11:05:23 AM	BCl3 valve closed
7/26/2011	11:05:23 AM	PH3 valve closed
7/26/2011	11:05:23 AM	SiCl4 pre valve closed
7/26/2011	11:05:23 AM	SiCl4 post valve closed
7/26/2011	11:05:23 AM	Bypass valve closed
7/26/2011	11:05:23 AM	Bubbler valve closed
7/26/2011	11:05:23 AM	Main Vac valve opened
7/26/2011	11:05:23 AM	Helium MFC set to  0.000000
7/26/2011	11:05:23 AM	H2 MFC set to  0.000000
7/26/2011	11:05:23 AM	BCl3 MFC set to  0.000000
7/26/2011	11:05:23 AM	PHl3 MFC set to  0.000000
7/26/2011	11:05:23 AM	SiCl4 MFC set to  0.000000
7/26/2011	11:05:23 AM	Bypass solenoid MFC set to  0.000000
7/26/2011	11:05:24 AM	Tube furnace set to 0
7/26/2011	11:05:54 AM	H2 valve closed
7/26/2011	11:05:54 AM	BCl3 valve closed
7/26/2011	11:05:54 AM	PH3 valve closed
7/26/2011	11:05:54 AM	SiCl4 pre valve closed
7/26/2011	11:05:54 AM	SiCl4 post valve closed
7/26/2011	11:05:54 AM	Bypass valve closed
7/26/2011	11:05:54 AM	Bubbler valve closed
7/26/2011	11:05:54 AM	Helium valve opened
7/26/2011	11:05:54 AM	Main Vac valve opened
7/26/2011	11:05:54 AM	Helium MFC set to  20.000000
7/26/2011	11:05:54 AM	H2 MFC set to  0.000000
7/26/2011	11:05:54 AM	BCl3 MFC set to  0.000000
7/26/2011	11:05:54 AM	PHl3 MFC set to  0.000000
7/26/2011	11:05:54 AM	SiCl4 MFC set to  0.000000
7/26/2011	11:05:54 AM	Bypass solenoid MFC set to  0.000000
7/26/2011	11:05:54 AM	Tube furnace set to 200
7/26/2011	11:06:24 AM	Helium valve closed
7/26/2011	11:06:24 AM	H2 valve closed
7/26/2011	11:06:24 AM	BCl3 valve closed
7/26/2011	11:06:24 AM	PH3 valve closed
7/26/2011	11:06:24 AM	SiCl4 pre valve closed
7/26/2011	11:06:24 AM	SiCl4 post valve closed
7/26/2011	11:06:24 AM	Bypass valve closed
7/26/2011	11:06:24 AM	Bubbler valve closed
7/26/2011	11:06:24 AM	Main Vac valve opened
7/26/2011	11:06:24 AM	Helium MFC set to  0.000000
7/26/2011	11:06:24 AM	H2 MFC set to  0.000000
7/26/2011	11:06:24 AM	BCl3 MFC set to  0.000000
7/26/2011	11:06:24 AM	PHl3 MFC set to  0.000000
7/26/2011	11:06:24 AM	SiCl4 MFC set to  0.000000
7/26/2011	11:06:24 AM	Bypass solenoid MFC set to  0.000000
7/26/2011	11:06:24 AM	Tube furnace set to 200
7/26/2011	11:06:54 AM	H2 valve closed
7/26/2011	11:06:54 AM	BCl3 valve closed
7/26/2011	11:06:54 AM	PH3 valve closed
7/26/2011	11:06:54 AM	SiCl4 pre valve closed
7/26/2011	11:06:54 AM	SiCl4 post valve closed
7/26/2011	11:06:54 AM	Bypass valve closed
7/26/2011	11:06:54 AM	Bubbler valve closed
7/26/2011	11:06:54 AM	Helium valve opened
7/26/2011	11:06:54 AM	Main Vac valve opened
7/26/2011	11:06:54 AM	Helium MFC set to  20.000000
7/26/2011	11:06:54 AM	H2 MFC set to  0.000000
7/26/2011	11:06:54 AM	BCl3 MFC set to  0.000000
7/26/2011	11:06:54 AM	PHl3 MFC set to  0.000000
7/26/2011	11:06:54 AM	SiCl4 MFC set to  0.000000
7/26/2011	11:06:54 AM	Bypass solenoid MFC set to  0.000000
7/26/2011	11:06:54 AM	Tube furnace set to 200
7/26/2011	11:07:24 AM	Helium valve closed
7/26/2011	11:07:24 AM	H2 valve closed
7/26/2011	11:07:24 AM	BCl3 valve closed
7/26/2011	11:07:24 AM	PH3 valve closed
7/26/2011	11:07:24 AM	SiCl4 pre valve closed
7/26/2011	11:07:24 AM	SiCl4 post valve closed
7/26/2011	11:07:24 AM	Bypass valve closed
7/26/2011	11:07:24 AM	Bubbler valve closed
7/26/2011	11:07:24 AM	Main Vac valve opened
7/26/2011	11:07:24 AM	Helium MFC set to  0.000000
7/26/2011	11:07:24 AM	H2 MFC set to  0.000000
7/26/2011	11:07:24 AM	BCl3 MFC set to  0.000000
7/26/2011	11:07:24 AM	PHl3 MFC set to  0.000000
7/26/2011	11:07:24 AM	SiCl4 MFC set to  0.000000
7/26/2011	11:07:24 AM	Bypass solenoid MFC set to  0.000000
7/26/2011	11:07:24 AM	Tube furnace set to 200
7/26/2011	11:07:54 AM	H2 valve closed
7/26/2011	11:07:54 AM	BCl3 valve closed
7/26/2011	11:07:54 AM	PH3 valve closed
7/26/2011	11:07:54 AM	SiCl4 pre valve closed
7/26/2011	11:07:54 AM	SiCl4 post valve closed
7/26/2011	11:07:54 AM	Bypass valve closed
7/26/2011	11:07:54 AM	Bubbler valve closed
7/26/2011	11:07:54 AM	Helium valve opened
7/26/2011	11:07:54 AM	Main Vac valve opened
7/26/2011	11:07:54 AM	Helium MFC set to  20.000000
7/26/2011	11:07:54 AM	H2 MFC set to  0.000000
7/26/2011	11:07:54 AM	BCl3 MFC set to  0.000000
7/26/2011	11:07:54 AM	PHl3 MFC set to  0.000000
7/26/2011	11:07:54 AM	SiCl4 MFC set to  0.000000
7/26/2011	11:07:54 AM	Bypass solenoid MFC set to  0.000000
7/26/2011	11:07:55 AM	Tube furnace set to 200
7/26/2011	11:08:25 AM	Helium valve closed
7/26/2011	11:08:25 AM	H2 valve closed
7/26/2011	11:08:25 AM	BCl3 valve closed
7/26/2011	11:08:25 AM	PH3 valve closed
7/26/2011	11:08:25 AM	SiCl4 pre valve closed
7/26/2011	11:08:25 AM	SiCl4 post valve closed
7/26/2011	11:08:25 AM	Bypass valve closed
7/26/2011	11:08:25 AM	Bubbler valve closed
7/26/2011	11:08:25 AM	Main Vac valve opened
7/26/2011	11:08:25 AM	Helium MFC set to  0.000000
7/26/2011	11:08:25 AM	H2 MFC set to  0.000000
7/26/2011	11:08:25 AM	BCl3 MFC set to  0.000000
7/26/2011	11:08:25 AM	PHl3 MFC set to  0.000000
7/26/2011	11:08:25 AM	SiCl4 MFC set to  0.000000
7/26/2011	11:08:25 AM	Bypass solenoid MFC set to  0.000000
7/26/2011	11:08:25 AM	Tube furnace set to 200
7/26/2011	11:08:55 AM	H2 valve closed
7/26/2011	11:08:55 AM	BCl3 valve closed
7/26/2011	11:08:55 AM	PH3 valve closed
7/26/2011	11:08:55 AM	SiCl4 pre valve closed
7/26/2011	11:08:55 AM	SiCl4 post valve closed
7/26/2011	11:08:55 AM	Bypass valve closed
7/26/2011	11:08:55 AM	Bubbler valve closed
7/26/2011	11:08:55 AM	Helium valve opened
7/26/2011	11:08:55 AM	Main Vac valve opened
7/26/2011	11:08:55 AM	Helium MFC set to  20.000000
7/26/2011	11:08:55 AM	H2 MFC set to  0.000000
7/26/2011	11:08:55 AM	BCl3 MFC set to  0.000000
7/26/2011	11:08:55 AM	PHl3 MFC set to  0.000000
7/26/2011	11:08:55 AM	SiCl4 MFC set to  0.000000
7/26/2011	11:08:55 AM	Bypass solenoid MFC set to  0.000000
7/26/2011	11:08:55 AM	Tube furnace set to 200
7/26/2011	11:09:25 AM	Helium valve closed
7/26/2011	11:09:25 AM	H2 valve closed
7/26/2011	11:09:25 AM	BCl3 valve closed
7/26/2011	11:09:25 AM	PH3 valve closed
7/26/2011	11:09:25 AM	SiCl4 pre valve closed
7/26/2011	11:09:25 AM	SiCl4 post valve closed
7/26/2011	11:09:25 AM	Bypass valve closed
7/26/2011	11:09:25 AM	Bubbler valve closed
7/26/2011	11:09:25 AM	Main Vac valve opened
7/26/2011	11:09:25 AM	Helium MFC set to  0.000000
7/26/2011	11:09:25 AM	H2 MFC set to  0.000000
7/26/2011	11:09:25 AM	BCl3 MFC set to  0.000000
7/26/2011	11:09:25 AM	PHl3 MFC set to  0.000000
7/26/2011	11:09:25 AM	SiCl4 MFC set to  0.000000
7/26/2011	11:09:25 AM	Bypass solenoid MFC set to  0.000000
7/26/2011	11:09:25 AM	Tube furnace set to 200
7/26/2011	11:09:55 AM	H2 valve closed
7/26/2011	11:09:55 AM	BCl3 valve closed
7/26/2011	11:09:55 AM	PH3 valve closed
7/26/2011	11:09:55 AM	SiCl4 pre valve closed
7/26/2011	11:09:55 AM	SiCl4 post valve closed
7/26/2011	11:09:55 AM	Bypass valve closed
7/26/2011	11:09:55 AM	Bubbler valve closed
7/26/2011	11:09:55 AM	Helium valve opened
7/26/2011	11:09:55 AM	Main Vac valve opened
7/26/2011	11:09:55 AM	Helium MFC set to  20.000000
7/26/2011	11:09:55 AM	H2 MFC set to  0.000000
7/26/2011	11:09:55 AM	BCl3 MFC set to  0.000000
7/26/2011	11:09:55 AM	PHl3 MFC set to  0.000000
7/26/2011	11:09:55 AM	SiCl4 MFC set to  0.000000
7/26/2011	11:09:55 AM	Bypass solenoid MFC set to  0.000000
7/26/2011	11:09:55 AM	Tube furnace set to 200
7/26/2011	11:10:25 AM	Helium valve closed
7/26/2011	11:10:25 AM	H2 valve closed
7/26/2011	11:10:25 AM	BCl3 valve closed
7/26/2011	11:10:25 AM	PH3 valve closed
7/26/2011	11:10:25 AM	SiCl4 pre valve closed
7/26/2011	11:10:25 AM	SiCl4 post valve closed
7/26/2011	11:10:25 AM	Bypass valve closed
7/26/2011	11:10:25 AM	Bubbler valve closed
7/26/2011	11:10:25 AM	Main Vac valve opened
7/26/2011	11:10:25 AM	Helium MFC set to  0.000000
7/26/2011	11:10:25 AM	H2 MFC set to  0.000000
7/26/2011	11:10:25 AM	BCl3 MFC set to  0.000000
7/26/2011	11:10:25 AM	PHl3 MFC set to  0.000000
7/26/2011	11:10:25 AM	SiCl4 MFC set to  0.000000
7/26/2011	11:10:25 AM	Bypass solenoid MFC set to  0.000000
7/26/2011	11:10:26 AM	Tube furnace set to 200
7/26/2011	11:10:33 AM	Run aborted at 11:10 AM
7/26/2011	11:10:33 AM	Helium valve closed
7/26/2011	11:10:33 AM	H2 valve closed
7/26/2011	11:10:33 AM	BCl3 valve closed
7/26/2011	11:10:33 AM	PH3 valve closed
7/26/2011	11:10:33 AM	SiCl4 pre valve closed
7/26/2011	11:10:33 AM	SiCl4 post valve closed
7/26/2011	11:10:33 AM	Bypass valve closed
7/26/2011	11:10:33 AM	Main Vac valve closed
7/26/2011	11:10:33 AM	Bubbler valve closed
7/26/2011	11:10:33 AM	Helium MFC set to  0.000000
7/26/2011	11:10:33 AM	H2 MFC set to  0.000000
7/26/2011	11:10:33 AM	BCl3 MFC set to  0.000000
7/26/2011	11:10:33 AM	PHl3 MFC set to  0.000000
7/26/2011	11:10:33 AM	SiCl4 MFC set to  0.000000
7/26/2011	11:10:34 AM	Tube furnace set to 0
7/26/2011	11:10:35 AM	Main Vac valve opened
7/26/2011	11:16:01 AM	Main Vac valve closed
7/26/2011	11:16:18 AM	Main Vac valve opened
7/26/2011	11:17:21 AM	Recipe started at 11:17 AM
7/26/2011	11:17:21 AM	Helium valve closed
7/26/2011	11:17:21 AM	H2 valve closed
7/26/2011	11:17:21 AM	BCl3 valve closed
7/26/2011	11:17:21 AM	PH3 valve closed
7/26/2011	11:17:21 AM	SiCl4 pre valve closed
7/26/2011	11:17:21 AM	SiCl4 post valve closed
7/26/2011	11:17:21 AM	Main Vac valve closed
7/26/2011	11:17:21 AM	Bypass valve closed
7/26/2011	11:17:21 AM	Bubbler valve closed
7/26/2011	11:17:21 AM	Helium MFC set to  0.000000
7/26/2011	11:17:21 AM	H2 MFC set to  0.000000
7/26/2011	11:17:21 AM	BCl3 MFC set to  0.000000
7/26/2011	11:17:21 AM	PHl3 MFC set to  0.000000
7/26/2011	11:17:21 AM	SiCl4 MFC set to  0.000000
7/26/2011	11:17:21 AM	Bypass solenoid MFC set to  0.000000
7/26/2011	11:17:21 AM	Tube furnace set to 0
7/26/2011	11:17:24 AM	Helium valve closed
7/26/2011	11:17:24 AM	BCl3 valve closed
7/26/2011	11:17:24 AM	PH3 valve closed
7/26/2011	11:17:24 AM	SiCl4 pre valve closed
7/26/2011	11:17:24 AM	SiCl4 post valve closed
7/26/2011	11:17:24 AM	Main Vac valve closed
7/26/2011	11:17:24 AM	Bypass valve closed
7/26/2011	11:17:24 AM	Bubbler valve closed
7/26/2011	11:17:24 AM	H2 valve opened
7/26/2011	11:17:24 AM	Helium MFC set to  0.000000
7/26/2011	11:17:24 AM	H2 MFC set to  500.000000
7/26/2011	11:17:24 AM	BCl3 MFC set to  0.000000
7/26/2011	11:17:24 AM	PHl3 MFC set to  0.000000
7/26/2011	11:17:24 AM	SiCl4 MFC set to  0.000000
7/26/2011	11:17:24 AM	Bypass solenoid MFC set to  0.000000
7/26/2011	11:17:24 AM	Tube furnace set to 0
7/26/2011	11:18:26 AM	Helium valve closed
7/26/2011	11:18:26 AM	BCl3 valve closed
7/26/2011	11:18:26 AM	PH3 valve closed
7/26/2011	11:18:26 AM	SiCl4 pre valve closed
7/26/2011	11:18:26 AM	SiCl4 post valve closed
7/26/2011	11:18:26 AM	Main Vac valve closed
7/26/2011	11:18:26 AM	Bypass valve closed
7/26/2011	11:18:26 AM	H2 valve opened
7/26/2011	11:18:26 AM	Bubbler valve opened
7/26/2011	11:18:26 AM	Helium MFC set to  0.000000
7/26/2011	11:18:26 AM	H2 MFC set to  500.000000
7/26/2011	11:18:26 AM	BCl3 MFC set to  0.000000
7/26/2011	11:18:26 AM	PHl3 MFC set to  0.000000
7/26/2011	11:18:26 AM	SiCl4 MFC set to  0.000000
7/26/2011	11:18:26 AM	Bypass solenoid MFC set to  0.000000
7/26/2011	11:18:27 AM	Tube furnace set to 0
7/26/2011	11:18:28 AM	Helium valve closed
7/26/2011	11:18:28 AM	BCl3 valve closed
7/26/2011	11:18:28 AM	PH3 valve closed
7/26/2011	11:18:28 AM	SiCl4 pre valve closed
7/26/2011	11:18:28 AM	SiCl4 post valve closed
7/26/2011	11:18:28 AM	Main Vac valve closed
7/26/2011	11:18:28 AM	Bypass valve closed
7/26/2011	11:18:28 AM	H2 valve opened
7/26/2011	11:18:28 AM	Bubbler valve opened
7/26/2011	11:18:28 AM	Helium MFC set to  0.000000
7/26/2011	11:18:28 AM	H2 MFC set to  500.000000
7/26/2011	11:18:28 AM	BCl3 MFC set to  0.000000
7/26/2011	11:18:28 AM	PHl3 MFC set to  0.000000
7/26/2011	11:18:28 AM	SiCl4 MFC set to  0.000000
7/26/2011	11:18:28 AM	Bypass solenoid MFC set to  0.000000
7/26/2011	11:18:28 AM	Tube furnace set to 1000
7/26/2011	11:38:28 AM	Helium valve closed
7/26/2011	11:38:28 AM	BCl3 valve closed
7/26/2011	11:38:28 AM	Main Vac valve closed
7/26/2011	11:38:28 AM	Bypass valve closed
7/26/2011	11:38:28 AM	H2 valve opened
7/26/2011	11:38:28 AM	PH3 valve opened
7/26/2011	11:38:28 AM	SiCl4 pre valve opened
7/26/2011	11:38:28 AM	SiCl4 post valve opened
7/26/2011	11:38:28 AM	Bubbler valve opened
7/26/2011	11:38:28 AM	Helium MFC set to  0.000000
7/26/2011	11:38:28 AM	H2 MFC set to  500.000000
7/26/2011	11:38:28 AM	BCl3 MFC set to  0.000000
7/26/2011	11:38:28 AM	PHl3 MFC set to  0.300000
7/26/2011	11:38:28 AM	SiCl4 MFC set to  50.000000
7/26/2011	11:38:28 AM	Bypass solenoid MFC set to  0.000000
7/26/2011	11:38:28 AM	Tube furnace set to 1000
7/26/2011	11:54:28 AM	Helium valve closed
7/26/2011	11:54:28 AM	BCl3 valve closed
7/26/2011	11:54:28 AM	PH3 valve closed
7/26/2011	11:54:28 AM	SiCl4 pre valve closed
7/26/2011	11:54:28 AM	SiCl4 post valve closed
7/26/2011	11:54:28 AM	Main Vac valve closed
7/26/2011	11:54:28 AM	Bypass valve closed
7/26/2011	11:54:28 AM	H2 valve opened
7/26/2011	11:54:28 AM	Bubbler valve opened
7/26/2011	11:54:28 AM	Helium MFC set to  0.000000
7/26/2011	11:54:28 AM	H2 MFC set to  500.000000
7/26/2011	11:54:28 AM	BCl3 MFC set to  0.000000
7/26/2011	11:54:28 AM	PHl3 MFC set to  0.000000
7/26/2011	11:54:28 AM	SiCl4 MFC set to  0.000000
7/26/2011	11:54:28 AM	Bypass solenoid MFC set to  0.000000
7/26/2011	11:54:28 AM	Tube furnace set to 950
7/26/2011	11:56:28 AM	Helium valve closed
7/26/2011	11:56:28 AM	BCl3 valve closed
7/26/2011	11:56:28 AM	PH3 valve closed
7/26/2011	11:56:28 AM	SiCl4 pre valve closed
7/26/2011	11:56:28 AM	SiCl4 post valve closed
7/26/2011	11:56:28 AM	Main Vac valve closed
7/26/2011	11:56:28 AM	Bypass valve closed
7/26/2011	11:56:28 AM	H2 valve opened
7/26/2011	11:56:28 AM	Bubbler valve opened
7/26/2011	11:56:28 AM	Helium MFC set to  0.000000
7/26/2011	11:56:28 AM	H2 MFC set to  500.000000
7/26/2011	11:56:28 AM	BCl3 MFC set to  0.000000
7/26/2011	11:56:28 AM	PHl3 MFC set to  0.000000
7/26/2011	11:56:28 AM	SiCl4 MFC set to  0.000000
7/26/2011	11:56:28 AM	Bypass solenoid MFC set to  0.000000
7/26/2011	11:56:28 AM	Tube furnace set to 900
7/26/2011	11:58:28 AM	Helium valve closed
7/26/2011	11:58:28 AM	BCl3 valve closed
7/26/2011	11:58:28 AM	PH3 valve closed
7/26/2011	11:58:28 AM	SiCl4 pre valve closed
7/26/2011	11:58:28 AM	SiCl4 post valve closed
7/26/2011	11:58:28 AM	Main Vac valve closed
7/26/2011	11:58:28 AM	Bypass valve closed
7/26/2011	11:58:28 AM	H2 valve opened
7/26/2011	11:58:28 AM	Bubbler valve opened
7/26/2011	11:58:28 AM	Helium MFC set to  0.000000
7/26/2011	11:58:28 AM	H2 MFC set to  500.000000
7/26/2011	11:58:28 AM	BCl3 MFC set to  0.000000
7/26/2011	11:58:28 AM	PHl3 MFC set to  0.000000
7/26/2011	11:58:28 AM	SiCl4 MFC set to  0.000000
7/26/2011	11:58:28 AM	Bypass solenoid MFC set to  0.000000
7/26/2011	11:58:29 AM	Tube furnace set to 850
7/26/2011	12:00:29 PM	H2 valve closed
7/26/2011	12:00:29 PM	BCl3 valve closed
7/26/2011	12:00:29 PM	PH3 valve closed
7/26/2011	12:00:29 PM	SiCl4 pre valve closed
7/26/2011	12:00:29 PM	SiCl4 post valve closed
7/26/2011	12:00:29 PM	Main Vac valve closed
7/26/2011	12:00:29 PM	Bypass valve closed
7/26/2011	12:00:29 PM	Helium valve opened
7/26/2011	12:00:29 PM	Bubbler valve opened
7/26/2011	12:00:29 PM	Helium MFC set to  500.000000
7/26/2011	12:00:29 PM	H2 MFC set to  0.000000
7/26/2011	12:00:29 PM	BCl3 MFC set to  0.000000
7/26/2011	12:00:29 PM	PHl3 MFC set to  0.000000
7/26/2011	12:00:29 PM	SiCl4 MFC set to  0.000000
7/26/2011	12:00:29 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	12:00:29 PM	Tube furnace set to 800
7/26/2011	12:02:29 PM	H2 valve closed
7/26/2011	12:02:29 PM	BCl3 valve closed
7/26/2011	12:02:29 PM	PH3 valve closed
7/26/2011	12:02:29 PM	SiCl4 pre valve closed
7/26/2011	12:02:29 PM	SiCl4 post valve closed
7/26/2011	12:02:29 PM	Main Vac valve closed
7/26/2011	12:02:29 PM	Bypass valve closed
7/26/2011	12:02:29 PM	Helium valve opened
7/26/2011	12:02:29 PM	Bubbler valve opened
7/26/2011	12:02:29 PM	Helium MFC set to  500.000000
7/26/2011	12:02:29 PM	H2 MFC set to  0.000000
7/26/2011	12:02:29 PM	BCl3 MFC set to  0.000000
7/26/2011	12:02:29 PM	PHl3 MFC set to  0.000000
7/26/2011	12:02:29 PM	SiCl4 MFC set to  0.000000
7/26/2011	12:02:29 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	12:02:29 PM	Tube furnace set to 750
7/26/2011	12:04:29 PM	H2 valve closed
7/26/2011	12:04:29 PM	BCl3 valve closed
7/26/2011	12:04:29 PM	PH3 valve closed
7/26/2011	12:04:29 PM	SiCl4 pre valve closed
7/26/2011	12:04:29 PM	SiCl4 post valve closed
7/26/2011	12:04:29 PM	Main Vac valve closed
7/26/2011	12:04:29 PM	Bypass valve closed
7/26/2011	12:04:29 PM	Helium valve opened
7/26/2011	12:04:29 PM	Bubbler valve opened
7/26/2011	12:04:29 PM	Helium MFC set to  500.000000
7/26/2011	12:04:29 PM	H2 MFC set to  0.000000
7/26/2011	12:04:29 PM	BCl3 MFC set to  0.000000
7/26/2011	12:04:29 PM	PHl3 MFC set to  0.000000
7/26/2011	12:04:29 PM	SiCl4 MFC set to  0.000000
7/26/2011	12:04:29 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	12:04:29 PM	Tube furnace set to 0
7/26/2011	12:24:29 PM	Helium valve closed
7/26/2011	12:24:29 PM	H2 valve closed
7/26/2011	12:24:29 PM	BCl3 valve closed
7/26/2011	12:24:29 PM	PH3 valve closed
7/26/2011	12:24:29 PM	SiCl4 pre valve closed
7/26/2011	12:24:29 PM	SiCl4 post valve closed
7/26/2011	12:24:29 PM	Main Vac valve closed
7/26/2011	12:24:29 PM	Bypass valve closed
7/26/2011	12:24:29 PM	Bubbler valve closed
7/26/2011	12:24:29 PM	Helium MFC set to  0.000000
7/26/2011	12:24:29 PM	H2 MFC set to  0.000000
7/26/2011	12:24:29 PM	BCl3 MFC set to  0.000000
7/26/2011	12:24:29 PM	PHl3 MFC set to  0.000000
7/26/2011	12:24:29 PM	SiCl4 MFC set to  0.000000
7/26/2011	12:24:29 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	12:24:29 PM	Tube furnace set to 0
7/26/2011	12:24:30 PM	Run finished at 12:24 PM
7/26/2011	12:29:08 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/26/2011	12:29:09 PM	Recipe started at 12:29 PM
7/26/2011	12:29:09 PM	Helium valve closed
7/26/2011	12:29:09 PM	H2 valve closed
7/26/2011	12:29:09 PM	BCl3 valve closed
7/26/2011	12:29:09 PM	PH3 valve closed
7/26/2011	12:29:09 PM	SiCl4 pre valve closed
7/26/2011	12:29:09 PM	SiCl4 post valve closed
7/26/2011	12:29:09 PM	Main Vac valve closed
7/26/2011	12:29:09 PM	Bypass valve closed
7/26/2011	12:29:09 PM	Bubbler valve closed
7/26/2011	12:29:09 PM	Helium MFC set to  0.000000
7/26/2011	12:29:09 PM	H2 MFC set to  0.000000
7/26/2011	12:29:09 PM	BCl3 MFC set to  0.000000
7/26/2011	12:29:09 PM	PHl3 MFC set to  0.000000
7/26/2011	12:29:09 PM	SiCl4 MFC set to  0.000000
7/26/2011	12:29:09 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	12:29:09 PM	Tube furnace set to 0
7/26/2011	12:29:12 PM	H2 valve closed
7/26/2011	12:29:12 PM	BCl3 valve closed
7/26/2011	12:29:12 PM	PH3 valve closed
7/26/2011	12:29:12 PM	SiCl4 pre valve closed
7/26/2011	12:29:12 PM	SiCl4 post valve closed
7/26/2011	12:29:12 PM	Main Vac valve closed
7/26/2011	12:29:12 PM	Bypass valve closed
7/26/2011	12:29:12 PM	Bubbler valve closed
7/26/2011	12:29:12 PM	Helium valve opened
7/26/2011	12:29:12 PM	Helium MFC set to  500.000000
7/26/2011	12:29:12 PM	H2 MFC set to  0.000000
7/26/2011	12:29:12 PM	BCl3 MFC set to  0.000000
7/26/2011	12:29:12 PM	PHl3 MFC set to  0.000000
7/26/2011	12:29:12 PM	SiCl4 MFC set to  0.000000
7/26/2011	12:29:12 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	12:29:13 PM	Tube furnace set to 0
7/26/2011	12:29:13 PM	Helium valve closed
7/26/2011	12:29:13 PM	H2 valve closed
7/26/2011	12:29:13 PM	BCl3 valve closed
7/26/2011	12:29:13 PM	PH3 valve closed
7/26/2011	12:29:13 PM	SiCl4 pre valve closed
7/26/2011	12:29:13 PM	SiCl4 post valve closed
7/26/2011	12:29:13 PM	Main Vac valve closed
7/26/2011	12:29:13 PM	Bypass valve closed
7/26/2011	12:29:13 PM	Bubbler valve closed
7/26/2011	12:29:13 PM	Helium MFC set to  0.000000
7/26/2011	12:29:13 PM	H2 MFC set to  0.000000
7/26/2011	12:29:13 PM	BCl3 MFC set to  0.000000
7/26/2011	12:29:13 PM	PHl3 MFC set to  0.000000
7/26/2011	12:29:13 PM	SiCl4 MFC set to  0.000000
7/26/2011	12:29:13 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	12:29:13 PM	Tube furnace set to 0
7/26/2011	12:29:14 PM	Run finished at 12:29 PM
7/26/2011	12:29:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/26/2011	12:32:45 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/26/2011	12:32:46 PM	Recipe started at 12:32 PM
7/26/2011	12:32:46 PM	Helium valve closed
7/26/2011	12:32:46 PM	H2 valve closed
7/26/2011	12:32:46 PM	BCl3 valve closed
7/26/2011	12:32:46 PM	PH3 valve closed
7/26/2011	12:32:46 PM	SiCl4 pre valve closed
7/26/2011	12:32:46 PM	SiCl4 post valve closed
7/26/2011	12:32:46 PM	Main Vac valve closed
7/26/2011	12:32:46 PM	Bubbler valve closed
7/26/2011	12:32:46 PM	Bypass valve opened
7/26/2011	12:32:46 PM	Helium MFC set to  0.000000
7/26/2011	12:32:46 PM	H2 MFC set to  0.000000
7/26/2011	12:32:46 PM	BCl3 MFC set to  0.000000
7/26/2011	12:32:46 PM	PHl3 MFC set to  0.000000
7/26/2011	12:32:46 PM	SiCl4 MFC set to  0.000000
7/26/2011	12:32:46 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	12:32:46 PM	Tube furnace set to 0
7/26/2011	12:33:48 PM	Helium valve closed
7/26/2011	12:33:49 PM	H2 valve closed
7/26/2011	12:33:49 PM	BCl3 valve closed
7/26/2011	12:33:49 PM	PH3 valve closed
7/26/2011	12:33:49 PM	SiCl4 pre valve closed
7/26/2011	12:33:49 PM	SiCl4 post valve closed
7/26/2011	12:33:49 PM	Main Vac valve closed
7/26/2011	12:33:49 PM	Bubbler valve closed
7/26/2011	12:33:49 PM	Bypass valve opened
7/26/2011	12:33:49 PM	Helium MFC set to  0.000000
7/26/2011	12:33:49 PM	H2 MFC set to  0.000000
7/26/2011	12:33:49 PM	BCl3 MFC set to  0.000000
7/26/2011	12:33:49 PM	PHl3 MFC set to  0.000000
7/26/2011	12:33:49 PM	SiCl4 MFC set to  0.000000
7/26/2011	12:33:49 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	12:33:49 PM	Tube furnace set to 0
7/26/2011	12:34:49 PM	Helium valve closed
7/26/2011	12:34:49 PM	H2 valve closed
7/26/2011	12:34:49 PM	BCl3 valve closed
7/26/2011	12:34:49 PM	PH3 valve closed
7/26/2011	12:34:49 PM	SiCl4 pre valve closed
7/26/2011	12:34:49 PM	SiCl4 post valve closed
7/26/2011	12:34:49 PM	Bypass valve closed
7/26/2011	12:34:49 PM	Bubbler valve closed
7/26/2011	12:34:49 PM	Main Vac valve opened
7/26/2011	12:34:49 PM	Helium MFC set to  0.000000
7/26/2011	12:34:49 PM	H2 MFC set to  0.000000
7/26/2011	12:34:49 PM	BCl3 MFC set to  0.000000
7/26/2011	12:34:49 PM	PHl3 MFC set to  0.000000
7/26/2011	12:34:49 PM	SiCl4 MFC set to  0.000000
7/26/2011	12:34:49 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	12:34:49 PM	Tube furnace set to 0
7/26/2011	12:34:50 PM	Run finished at 12:34 PM
7/26/2011	12:34:50 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/26/2011	12:35:52 PM	Main Vac valve closed
7/26/2011	12:35:57 PM	Main Vac valve opened
7/26/2011	12:37:14 PM	Recipe started at 12:37 PM
7/26/2011	12:37:14 PM	Helium valve closed
7/26/2011	12:37:14 PM	H2 valve closed
7/26/2011	12:37:14 PM	BCl3 valve closed
7/26/2011	12:37:14 PM	PH3 valve closed
7/26/2011	12:37:14 PM	SiCl4 pre valve closed
7/26/2011	12:37:14 PM	SiCl4 post valve closed
7/26/2011	12:37:14 PM	Bypass valve closed
7/26/2011	12:37:14 PM	Bubbler valve closed
7/26/2011	12:37:14 PM	Main Vac valve opened
7/26/2011	12:37:14 PM	Helium MFC set to  0.000000
7/26/2011	12:37:14 PM	H2 MFC set to  0.000000
7/26/2011	12:37:14 PM	BCl3 MFC set to  0.000000
7/26/2011	12:37:14 PM	PHl3 MFC set to  0.000000
7/26/2011	12:37:14 PM	SiCl4 MFC set to  0.000000
7/26/2011	12:37:14 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	12:37:14 PM	Tube furnace set to 0
7/26/2011	12:37:44 PM	H2 valve closed
7/26/2011	12:37:44 PM	BCl3 valve closed
7/26/2011	12:37:44 PM	PH3 valve closed
7/26/2011	12:37:44 PM	SiCl4 pre valve closed
7/26/2011	12:37:44 PM	SiCl4 post valve closed
7/26/2011	12:37:44 PM	Bypass valve closed
7/26/2011	12:37:44 PM	Bubbler valve closed
7/26/2011	12:37:44 PM	Helium valve opened
7/26/2011	12:37:44 PM	Main Vac valve opened
7/26/2011	12:37:44 PM	Helium MFC set to  20.000000
7/26/2011	12:37:44 PM	H2 MFC set to  0.000000
7/26/2011	12:37:44 PM	BCl3 MFC set to  0.000000
7/26/2011	12:37:44 PM	PHl3 MFC set to  0.000000
7/26/2011	12:37:44 PM	SiCl4 MFC set to  0.000000
7/26/2011	12:37:44 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	12:37:45 PM	Tube furnace set to 0
7/26/2011	12:38:15 PM	Helium valve closed
7/26/2011	12:38:15 PM	H2 valve closed
7/26/2011	12:38:15 PM	BCl3 valve closed
7/26/2011	12:38:15 PM	PH3 valve closed
7/26/2011	12:38:15 PM	SiCl4 pre valve closed
7/26/2011	12:38:15 PM	SiCl4 post valve closed
7/26/2011	12:38:15 PM	Bypass valve closed
7/26/2011	12:38:15 PM	Bubbler valve closed
7/26/2011	12:38:15 PM	Main Vac valve opened
7/26/2011	12:38:15 PM	Helium MFC set to  0.000000
7/26/2011	12:38:15 PM	H2 MFC set to  0.000000
7/26/2011	12:38:15 PM	BCl3 MFC set to  0.000000
7/26/2011	12:38:15 PM	PHl3 MFC set to  0.000000
7/26/2011	12:38:15 PM	SiCl4 MFC set to  0.000000
7/26/2011	12:38:15 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	12:38:15 PM	Tube furnace set to 0
7/26/2011	12:38:45 PM	H2 valve closed
7/26/2011	12:38:45 PM	BCl3 valve closed
7/26/2011	12:38:45 PM	PH3 valve closed
7/26/2011	12:38:45 PM	SiCl4 pre valve closed
7/26/2011	12:38:45 PM	SiCl4 post valve closed
7/26/2011	12:38:45 PM	Bypass valve closed
7/26/2011	12:38:45 PM	Bubbler valve closed
7/26/2011	12:38:45 PM	Helium valve opened
7/26/2011	12:38:45 PM	Main Vac valve opened
7/26/2011	12:38:45 PM	Helium MFC set to  20.000000
7/26/2011	12:38:45 PM	H2 MFC set to  0.000000
7/26/2011	12:38:45 PM	BCl3 MFC set to  0.000000
7/26/2011	12:38:45 PM	PHl3 MFC set to  0.000000
7/26/2011	12:38:45 PM	SiCl4 MFC set to  0.000000
7/26/2011	12:38:45 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	12:38:45 PM	Tube furnace set to 0
7/26/2011	12:39:15 PM	Helium valve closed
7/26/2011	12:39:15 PM	H2 valve closed
7/26/2011	12:39:15 PM	BCl3 valve closed
7/26/2011	12:39:15 PM	PH3 valve closed
7/26/2011	12:39:15 PM	SiCl4 pre valve closed
7/26/2011	12:39:15 PM	SiCl4 post valve closed
7/26/2011	12:39:15 PM	Bypass valve closed
7/26/2011	12:39:15 PM	Bubbler valve closed
7/26/2011	12:39:15 PM	Main Vac valve opened
7/26/2011	12:39:15 PM	Helium MFC set to  0.000000
7/26/2011	12:39:15 PM	H2 MFC set to  0.000000
7/26/2011	12:39:15 PM	BCl3 MFC set to  0.000000
7/26/2011	12:39:15 PM	PHl3 MFC set to  0.000000
7/26/2011	12:39:15 PM	SiCl4 MFC set to  0.000000
7/26/2011	12:39:15 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	12:39:15 PM	Tube furnace set to 0
7/26/2011	12:39:45 PM	H2 valve closed
7/26/2011	12:39:45 PM	BCl3 valve closed
7/26/2011	12:39:45 PM	PH3 valve closed
7/26/2011	12:39:45 PM	SiCl4 pre valve closed
7/26/2011	12:39:45 PM	SiCl4 post valve closed
7/26/2011	12:39:45 PM	Bypass valve closed
7/26/2011	12:39:45 PM	Bubbler valve closed
7/26/2011	12:39:45 PM	Helium valve opened
7/26/2011	12:39:45 PM	Main Vac valve opened
7/26/2011	12:39:45 PM	Helium MFC set to  20.000000
7/26/2011	12:39:45 PM	H2 MFC set to  0.000000
7/26/2011	12:39:45 PM	BCl3 MFC set to  0.000000
7/26/2011	12:39:45 PM	PHl3 MFC set to  0.000000
7/26/2011	12:39:45 PM	SiCl4 MFC set to  0.000000
7/26/2011	12:39:45 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	12:39:45 PM	Tube furnace set to 0
7/26/2011	12:40:15 PM	Helium valve closed
7/26/2011	12:40:15 PM	H2 valve closed
7/26/2011	12:40:15 PM	BCl3 valve closed
7/26/2011	12:40:15 PM	PH3 valve closed
7/26/2011	12:40:15 PM	SiCl4 pre valve closed
7/26/2011	12:40:15 PM	SiCl4 post valve closed
7/26/2011	12:40:15 PM	Bypass valve closed
7/26/2011	12:40:15 PM	Bubbler valve closed
7/26/2011	12:40:15 PM	Main Vac valve opened
7/26/2011	12:40:15 PM	Helium MFC set to  0.000000
7/26/2011	12:40:15 PM	H2 MFC set to  0.000000
7/26/2011	12:40:15 PM	BCl3 MFC set to  0.000000
7/26/2011	12:40:15 PM	PHl3 MFC set to  0.000000
7/26/2011	12:40:15 PM	SiCl4 MFC set to  0.000000
7/26/2011	12:40:15 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	12:40:16 PM	Tube furnace set to 0
7/26/2011	12:40:46 PM	H2 valve closed
7/26/2011	12:40:46 PM	BCl3 valve closed
7/26/2011	12:40:46 PM	PH3 valve closed
7/26/2011	12:40:46 PM	SiCl4 pre valve closed
7/26/2011	12:40:46 PM	SiCl4 post valve closed
7/26/2011	12:40:46 PM	Bypass valve closed
7/26/2011	12:40:46 PM	Bubbler valve closed
7/26/2011	12:40:46 PM	Helium valve opened
7/26/2011	12:40:46 PM	Main Vac valve opened
7/26/2011	12:40:46 PM	Helium MFC set to  20.000000
7/26/2011	12:40:46 PM	H2 MFC set to  0.000000
7/26/2011	12:40:46 PM	BCl3 MFC set to  0.000000
7/26/2011	12:40:46 PM	PHl3 MFC set to  0.000000
7/26/2011	12:40:46 PM	SiCl4 MFC set to  0.000000
7/26/2011	12:40:46 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	12:40:46 PM	Tube furnace set to 0
7/26/2011	12:41:16 PM	Helium valve closed
7/26/2011	12:41:16 PM	H2 valve closed
7/26/2011	12:41:16 PM	BCl3 valve closed
7/26/2011	12:41:16 PM	PH3 valve closed
7/26/2011	12:41:16 PM	SiCl4 pre valve closed
7/26/2011	12:41:16 PM	SiCl4 post valve closed
7/26/2011	12:41:16 PM	Bypass valve closed
7/26/2011	12:41:16 PM	Bubbler valve closed
7/26/2011	12:41:16 PM	Main Vac valve opened
7/26/2011	12:41:16 PM	Helium MFC set to  0.000000
7/26/2011	12:41:16 PM	H2 MFC set to  0.000000
7/26/2011	12:41:16 PM	BCl3 MFC set to  0.000000
7/26/2011	12:41:16 PM	PHl3 MFC set to  0.000000
7/26/2011	12:41:16 PM	SiCl4 MFC set to  0.000000
7/26/2011	12:41:16 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	12:41:16 PM	Tube furnace set to 200
7/26/2011	12:41:46 PM	H2 valve closed
7/26/2011	12:41:46 PM	BCl3 valve closed
7/26/2011	12:41:46 PM	PH3 valve closed
7/26/2011	12:41:46 PM	SiCl4 pre valve closed
7/26/2011	12:41:46 PM	SiCl4 post valve closed
7/26/2011	12:41:46 PM	Bypass valve closed
7/26/2011	12:41:46 PM	Bubbler valve closed
7/26/2011	12:41:46 PM	Helium valve opened
7/26/2011	12:41:46 PM	Main Vac valve opened
7/26/2011	12:41:46 PM	Helium MFC set to  20.000000
7/26/2011	12:41:46 PM	H2 MFC set to  0.000000
7/26/2011	12:41:46 PM	BCl3 MFC set to  0.000000
7/26/2011	12:41:46 PM	PHl3 MFC set to  0.000000
7/26/2011	12:41:46 PM	SiCl4 MFC set to  0.000000
7/26/2011	12:41:46 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	12:41:46 PM	Tube furnace set to 200
7/26/2011	12:42:16 PM	Helium valve closed
7/26/2011	12:42:16 PM	H2 valve closed
7/26/2011	12:42:16 PM	BCl3 valve closed
7/26/2011	12:42:16 PM	PH3 valve closed
7/26/2011	12:42:16 PM	SiCl4 pre valve closed
7/26/2011	12:42:16 PM	SiCl4 post valve closed
7/26/2011	12:42:16 PM	Bypass valve closed
7/26/2011	12:42:16 PM	Bubbler valve closed
7/26/2011	12:42:16 PM	Main Vac valve opened
7/26/2011	12:42:16 PM	Helium MFC set to  0.000000
7/26/2011	12:42:16 PM	H2 MFC set to  0.000000
7/26/2011	12:42:16 PM	BCl3 MFC set to  0.000000
7/26/2011	12:42:16 PM	PHl3 MFC set to  0.000000
7/26/2011	12:42:16 PM	SiCl4 MFC set to  0.000000
7/26/2011	12:42:16 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	12:42:16 PM	Tube furnace set to 200
7/26/2011	12:42:46 PM	H2 valve closed
7/26/2011	12:42:46 PM	BCl3 valve closed
7/26/2011	12:42:46 PM	PH3 valve closed
7/26/2011	12:42:46 PM	SiCl4 pre valve closed
7/26/2011	12:42:46 PM	SiCl4 post valve closed
7/26/2011	12:42:46 PM	Bypass valve closed
7/26/2011	12:42:46 PM	Bubbler valve closed
7/26/2011	12:42:46 PM	Helium valve opened
7/26/2011	12:42:46 PM	Main Vac valve opened
7/26/2011	12:42:46 PM	Helium MFC set to  20.000000
7/26/2011	12:42:46 PM	H2 MFC set to  0.000000
7/26/2011	12:42:46 PM	BCl3 MFC set to  0.000000
7/26/2011	12:42:46 PM	PHl3 MFC set to  0.000000
7/26/2011	12:42:46 PM	SiCl4 MFC set to  0.000000
7/26/2011	12:42:46 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	12:42:47 PM	Tube furnace set to 200
7/26/2011	12:43:17 PM	Helium valve closed
7/26/2011	12:43:17 PM	H2 valve closed
7/26/2011	12:43:17 PM	BCl3 valve closed
7/26/2011	12:43:17 PM	PH3 valve closed
7/26/2011	12:43:17 PM	SiCl4 pre valve closed
7/26/2011	12:43:17 PM	SiCl4 post valve closed
7/26/2011	12:43:17 PM	Bypass valve closed
7/26/2011	12:43:17 PM	Bubbler valve closed
7/26/2011	12:43:17 PM	Main Vac valve opened
7/26/2011	12:43:17 PM	Helium MFC set to  0.000000
7/26/2011	12:43:17 PM	H2 MFC set to  0.000000
7/26/2011	12:43:17 PM	BCl3 MFC set to  0.000000
7/26/2011	12:43:17 PM	PHl3 MFC set to  0.000000
7/26/2011	12:43:17 PM	SiCl4 MFC set to  0.000000
7/26/2011	12:43:17 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	12:43:17 PM	Tube furnace set to 200
7/26/2011	12:43:47 PM	H2 valve closed
7/26/2011	12:43:47 PM	BCl3 valve closed
7/26/2011	12:43:47 PM	PH3 valve closed
7/26/2011	12:43:47 PM	SiCl4 pre valve closed
7/26/2011	12:43:47 PM	SiCl4 post valve closed
7/26/2011	12:43:47 PM	Bypass valve closed
7/26/2011	12:43:47 PM	Bubbler valve closed
7/26/2011	12:43:47 PM	Helium valve opened
7/26/2011	12:43:47 PM	Main Vac valve opened
7/26/2011	12:43:47 PM	Helium MFC set to  20.000000
7/26/2011	12:43:47 PM	H2 MFC set to  0.000000
7/26/2011	12:43:47 PM	BCl3 MFC set to  0.000000
7/26/2011	12:43:47 PM	PHl3 MFC set to  0.000000
7/26/2011	12:43:47 PM	SiCl4 MFC set to  0.000000
7/26/2011	12:43:47 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	12:43:47 PM	Tube furnace set to 200
7/26/2011	12:44:17 PM	Helium valve closed
7/26/2011	12:44:17 PM	H2 valve closed
7/26/2011	12:44:17 PM	BCl3 valve closed
7/26/2011	12:44:17 PM	PH3 valve closed
7/26/2011	12:44:17 PM	SiCl4 pre valve closed
7/26/2011	12:44:17 PM	SiCl4 post valve closed
7/26/2011	12:44:17 PM	Bypass valve closed
7/26/2011	12:44:17 PM	Bubbler valve closed
7/26/2011	12:44:17 PM	Main Vac valve opened
7/26/2011	12:44:17 PM	Helium MFC set to  0.000000
7/26/2011	12:44:17 PM	H2 MFC set to  0.000000
7/26/2011	12:44:17 PM	BCl3 MFC set to  0.000000
7/26/2011	12:44:17 PM	PHl3 MFC set to  0.000000
7/26/2011	12:44:17 PM	SiCl4 MFC set to  0.000000
7/26/2011	12:44:17 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	12:44:17 PM	Tube furnace set to 200
7/26/2011	12:44:47 PM	H2 valve closed
7/26/2011	12:44:47 PM	BCl3 valve closed
7/26/2011	12:44:47 PM	PH3 valve closed
7/26/2011	12:44:47 PM	SiCl4 pre valve closed
7/26/2011	12:44:47 PM	SiCl4 post valve closed
7/26/2011	12:44:47 PM	Bypass valve closed
7/26/2011	12:44:47 PM	Bubbler valve closed
7/26/2011	12:44:47 PM	Helium valve opened
7/26/2011	12:44:47 PM	Main Vac valve opened
7/26/2011	12:44:47 PM	Helium MFC set to  20.000000
7/26/2011	12:44:47 PM	H2 MFC set to  0.000000
7/26/2011	12:44:47 PM	BCl3 MFC set to  0.000000
7/26/2011	12:44:47 PM	PHl3 MFC set to  0.000000
7/26/2011	12:44:47 PM	SiCl4 MFC set to  0.000000
7/26/2011	12:44:47 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	12:44:47 PM	Tube furnace set to 200
7/26/2011	12:45:17 PM	Helium valve closed
7/26/2011	12:45:17 PM	H2 valve closed
7/26/2011	12:45:17 PM	BCl3 valve closed
7/26/2011	12:45:17 PM	PH3 valve closed
7/26/2011	12:45:17 PM	SiCl4 pre valve closed
7/26/2011	12:45:17 PM	SiCl4 post valve closed
7/26/2011	12:45:17 PM	Bypass valve closed
7/26/2011	12:45:17 PM	Bubbler valve closed
7/26/2011	12:45:17 PM	Main Vac valve opened
7/26/2011	12:45:17 PM	Helium MFC set to  0.000000
7/26/2011	12:45:17 PM	H2 MFC set to  0.000000
7/26/2011	12:45:17 PM	BCl3 MFC set to  0.000000
7/26/2011	12:45:17 PM	PHl3 MFC set to  0.000000
7/26/2011	12:45:17 PM	SiCl4 MFC set to  0.000000
7/26/2011	12:45:17 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	12:45:18 PM	Tube furnace set to 200
7/26/2011	12:45:48 PM	H2 valve closed
7/26/2011	12:45:48 PM	BCl3 valve closed
7/26/2011	12:45:48 PM	PH3 valve closed
7/26/2011	12:45:48 PM	SiCl4 pre valve closed
7/26/2011	12:45:48 PM	SiCl4 post valve closed
7/26/2011	12:45:48 PM	Bypass valve closed
7/26/2011	12:45:48 PM	Bubbler valve closed
7/26/2011	12:45:48 PM	Helium valve opened
7/26/2011	12:45:48 PM	Main Vac valve opened
7/26/2011	12:45:48 PM	Helium MFC set to  20.000000
7/26/2011	12:45:48 PM	H2 MFC set to  0.000000
7/26/2011	12:45:48 PM	BCl3 MFC set to  0.000000
7/26/2011	12:45:48 PM	PHl3 MFC set to  0.000000
7/26/2011	12:45:48 PM	SiCl4 MFC set to  0.000000
7/26/2011	12:45:48 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	12:45:48 PM	Tube furnace set to 200
7/26/2011	12:46:18 PM	Helium valve closed
7/26/2011	12:46:18 PM	H2 valve closed
7/26/2011	12:46:18 PM	BCl3 valve closed
7/26/2011	12:46:18 PM	PH3 valve closed
7/26/2011	12:46:18 PM	SiCl4 pre valve closed
7/26/2011	12:46:18 PM	SiCl4 post valve closed
7/26/2011	12:46:18 PM	Bypass valve closed
7/26/2011	12:46:18 PM	Bubbler valve closed
7/26/2011	12:46:18 PM	Main Vac valve opened
7/26/2011	12:46:18 PM	Helium MFC set to  0.000000
7/26/2011	12:46:18 PM	H2 MFC set to  0.000000
7/26/2011	12:46:18 PM	BCl3 MFC set to  0.000000
7/26/2011	12:46:18 PM	PHl3 MFC set to  0.000000
7/26/2011	12:46:18 PM	SiCl4 MFC set to  0.000000
7/26/2011	12:46:18 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	12:46:18 PM	Tube furnace set to 200
7/26/2011	12:46:48 PM	H2 valve closed
7/26/2011	12:46:48 PM	BCl3 valve closed
7/26/2011	12:46:48 PM	PH3 valve closed
7/26/2011	12:46:48 PM	SiCl4 pre valve closed
7/26/2011	12:46:48 PM	SiCl4 post valve closed
7/26/2011	12:46:48 PM	Bypass valve closed
7/26/2011	12:46:48 PM	Bubbler valve closed
7/26/2011	12:46:48 PM	Helium valve opened
7/26/2011	12:46:48 PM	Main Vac valve opened
7/26/2011	12:46:48 PM	Helium MFC set to  20.000000
7/26/2011	12:46:48 PM	H2 MFC set to  0.000000
7/26/2011	12:46:48 PM	BCl3 MFC set to  0.000000
7/26/2011	12:46:48 PM	PHl3 MFC set to  0.000000
7/26/2011	12:46:48 PM	SiCl4 MFC set to  0.000000
7/26/2011	12:46:48 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	12:46:48 PM	Tube furnace set to 200
7/26/2011	12:47:18 PM	Helium valve closed
7/26/2011	12:47:18 PM	H2 valve closed
7/26/2011	12:47:18 PM	BCl3 valve closed
7/26/2011	12:47:18 PM	PH3 valve closed
7/26/2011	12:47:18 PM	SiCl4 pre valve closed
7/26/2011	12:47:18 PM	SiCl4 post valve closed
7/26/2011	12:47:18 PM	Bypass valve closed
7/26/2011	12:47:18 PM	Bubbler valve closed
7/26/2011	12:47:18 PM	Main Vac valve opened
7/26/2011	12:47:18 PM	Helium MFC set to  0.000000
7/26/2011	12:47:18 PM	H2 MFC set to  0.000000
7/26/2011	12:47:18 PM	BCl3 MFC set to  0.000000
7/26/2011	12:47:18 PM	PHl3 MFC set to  0.000000
7/26/2011	12:47:18 PM	SiCl4 MFC set to  0.000000
7/26/2011	12:47:18 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	12:47:18 PM	Tube furnace set to 0
7/26/2011	12:47:19 PM	Run finished at 12:47 PM
7/26/2011	12:50:34 PM	Main Vac valve closed
7/26/2011	12:50:45 PM	Main Vac valve opened
7/26/2011	12:51:49 PM	Main Vac valve closed
7/26/2011	12:51:58 PM	Main Vac valve opened
7/26/2011	12:52:24 PM	Recipe started at 12:52 PM
7/26/2011	12:52:24 PM	Helium valve closed
7/26/2011	12:52:24 PM	H2 valve closed
7/26/2011	12:52:24 PM	BCl3 valve closed
7/26/2011	12:52:24 PM	PH3 valve closed
7/26/2011	12:52:24 PM	SiCl4 pre valve closed
7/26/2011	12:52:24 PM	SiCl4 post valve closed
7/26/2011	12:52:24 PM	Bypass valve closed
7/26/2011	12:52:24 PM	Bubbler valve closed
7/26/2011	12:52:24 PM	Main Vac valve opened
7/26/2011	12:52:24 PM	Helium MFC set to  0.000000
7/26/2011	12:52:24 PM	H2 MFC set to  0.000000
7/26/2011	12:52:24 PM	BCl3 MFC set to  0.000000
7/26/2011	12:52:24 PM	PHl3 MFC set to  0.000000
7/26/2011	12:52:24 PM	SiCl4 MFC set to  0.000000
7/26/2011	12:52:24 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	12:52:24 PM	Tube furnace set to 0
7/26/2011	12:52:54 PM	H2 valve closed
7/26/2011	12:52:54 PM	BCl3 valve closed
7/26/2011	12:52:54 PM	PH3 valve closed
7/26/2011	12:52:54 PM	SiCl4 pre valve closed
7/26/2011	12:52:54 PM	SiCl4 post valve closed
7/26/2011	12:52:54 PM	Bypass valve closed
7/26/2011	12:52:54 PM	Bubbler valve closed
7/26/2011	12:52:54 PM	Helium valve opened
7/26/2011	12:52:54 PM	Main Vac valve opened
7/26/2011	12:52:54 PM	Helium MFC set to  20.000000
7/26/2011	12:52:54 PM	H2 MFC set to  0.000000
7/26/2011	12:52:54 PM	BCl3 MFC set to  0.000000
7/26/2011	12:52:54 PM	PHl3 MFC set to  0.000000
7/26/2011	12:52:54 PM	SiCl4 MFC set to  0.000000
7/26/2011	12:52:54 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	12:52:54 PM	Tube furnace set to 0
7/26/2011	12:53:24 PM	Helium valve closed
7/26/2011	12:53:24 PM	H2 valve closed
7/26/2011	12:53:24 PM	BCl3 valve closed
7/26/2011	12:53:24 PM	PH3 valve closed
7/26/2011	12:53:24 PM	SiCl4 pre valve closed
7/26/2011	12:53:24 PM	SiCl4 post valve closed
7/26/2011	12:53:24 PM	Bypass valve closed
7/26/2011	12:53:24 PM	Bubbler valve closed
7/26/2011	12:53:24 PM	Main Vac valve opened
7/26/2011	12:53:24 PM	Helium MFC set to  0.000000
7/26/2011	12:53:24 PM	H2 MFC set to  0.000000
7/26/2011	12:53:24 PM	BCl3 MFC set to  0.000000
7/26/2011	12:53:24 PM	PHl3 MFC set to  0.000000
7/26/2011	12:53:24 PM	SiCl4 MFC set to  0.000000
7/26/2011	12:53:24 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	12:53:24 PM	Tube furnace set to 0
7/26/2011	12:53:54 PM	H2 valve closed
7/26/2011	12:53:54 PM	BCl3 valve closed
7/26/2011	12:53:54 PM	PH3 valve closed
7/26/2011	12:53:54 PM	SiCl4 pre valve closed
7/26/2011	12:53:54 PM	SiCl4 post valve closed
7/26/2011	12:53:54 PM	Bypass valve closed
7/26/2011	12:53:54 PM	Bubbler valve closed
7/26/2011	12:53:54 PM	Helium valve opened
7/26/2011	12:53:54 PM	Main Vac valve opened
7/26/2011	12:53:54 PM	Helium MFC set to  20.000000
7/26/2011	12:53:54 PM	H2 MFC set to  0.000000
7/26/2011	12:53:54 PM	BCl3 MFC set to  0.000000
7/26/2011	12:53:54 PM	PHl3 MFC set to  0.000000
7/26/2011	12:53:54 PM	SiCl4 MFC set to  0.000000
7/26/2011	12:53:54 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	12:53:54 PM	Tube furnace set to 0
7/26/2011	12:54:24 PM	Helium valve closed
7/26/2011	12:54:24 PM	H2 valve closed
7/26/2011	12:54:24 PM	BCl3 valve closed
7/26/2011	12:54:24 PM	PH3 valve closed
7/26/2011	12:54:24 PM	SiCl4 pre valve closed
7/26/2011	12:54:24 PM	SiCl4 post valve closed
7/26/2011	12:54:24 PM	Bypass valve closed
7/26/2011	12:54:24 PM	Bubbler valve closed
7/26/2011	12:54:24 PM	Main Vac valve opened
7/26/2011	12:54:24 PM	Helium MFC set to  0.000000
7/26/2011	12:54:24 PM	H2 MFC set to  0.000000
7/26/2011	12:54:24 PM	BCl3 MFC set to  0.000000
7/26/2011	12:54:24 PM	PHl3 MFC set to  0.000000
7/26/2011	12:54:24 PM	SiCl4 MFC set to  0.000000
7/26/2011	12:54:24 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	12:54:25 PM	Tube furnace set to 0
7/26/2011	12:54:55 PM	H2 valve closed
7/26/2011	12:54:55 PM	BCl3 valve closed
7/26/2011	12:54:55 PM	PH3 valve closed
7/26/2011	12:54:55 PM	SiCl4 pre valve closed
7/26/2011	12:54:55 PM	SiCl4 post valve closed
7/26/2011	12:54:55 PM	Bypass valve closed
7/26/2011	12:54:55 PM	Bubbler valve closed
7/26/2011	12:54:55 PM	Helium valve opened
7/26/2011	12:54:55 PM	Main Vac valve opened
7/26/2011	12:54:55 PM	Helium MFC set to  20.000000
7/26/2011	12:54:55 PM	H2 MFC set to  0.000000
7/26/2011	12:54:55 PM	BCl3 MFC set to  0.000000
7/26/2011	12:54:55 PM	PHl3 MFC set to  0.000000
7/26/2011	12:54:55 PM	SiCl4 MFC set to  0.000000
7/26/2011	12:54:55 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	12:54:55 PM	Tube furnace set to 0
7/26/2011	12:55:25 PM	Helium valve closed
7/26/2011	12:55:25 PM	H2 valve closed
7/26/2011	12:55:25 PM	BCl3 valve closed
7/26/2011	12:55:25 PM	PH3 valve closed
7/26/2011	12:55:25 PM	SiCl4 pre valve closed
7/26/2011	12:55:25 PM	SiCl4 post valve closed
7/26/2011	12:55:25 PM	Bypass valve closed
7/26/2011	12:55:25 PM	Bubbler valve closed
7/26/2011	12:55:25 PM	Main Vac valve opened
7/26/2011	12:55:25 PM	Helium MFC set to  0.000000
7/26/2011	12:55:25 PM	H2 MFC set to  0.000000
7/26/2011	12:55:25 PM	BCl3 MFC set to  0.000000
7/26/2011	12:55:25 PM	PHl3 MFC set to  0.000000
7/26/2011	12:55:25 PM	SiCl4 MFC set to  0.000000
7/26/2011	12:55:25 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	12:55:25 PM	Tube furnace set to 0
7/26/2011	12:55:55 PM	H2 valve closed
7/26/2011	12:55:55 PM	BCl3 valve closed
7/26/2011	12:55:55 PM	PH3 valve closed
7/26/2011	12:55:55 PM	SiCl4 pre valve closed
7/26/2011	12:55:55 PM	SiCl4 post valve closed
7/26/2011	12:55:55 PM	Bypass valve closed
7/26/2011	12:55:55 PM	Bubbler valve closed
7/26/2011	12:55:55 PM	Helium valve opened
7/26/2011	12:55:55 PM	Main Vac valve opened
7/26/2011	12:55:55 PM	Helium MFC set to  20.000000
7/26/2011	12:55:55 PM	H2 MFC set to  0.000000
7/26/2011	12:55:55 PM	BCl3 MFC set to  0.000000
7/26/2011	12:55:55 PM	PHl3 MFC set to  0.000000
7/26/2011	12:55:55 PM	SiCl4 MFC set to  0.000000
7/26/2011	12:55:55 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	12:55:55 PM	Tube furnace set to 0
7/26/2011	12:56:25 PM	Helium valve closed
7/26/2011	12:56:25 PM	H2 valve closed
7/26/2011	12:56:25 PM	BCl3 valve closed
7/26/2011	12:56:25 PM	PH3 valve closed
7/26/2011	12:56:25 PM	SiCl4 pre valve closed
7/26/2011	12:56:25 PM	SiCl4 post valve closed
7/26/2011	12:56:25 PM	Bypass valve closed
7/26/2011	12:56:25 PM	Bubbler valve closed
7/26/2011	12:56:25 PM	Main Vac valve opened
7/26/2011	12:56:25 PM	Helium MFC set to  0.000000
7/26/2011	12:56:25 PM	H2 MFC set to  0.000000
7/26/2011	12:56:25 PM	BCl3 MFC set to  0.000000
7/26/2011	12:56:25 PM	PHl3 MFC set to  0.000000
7/26/2011	12:56:25 PM	SiCl4 MFC set to  0.000000
7/26/2011	12:56:25 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	12:56:25 PM	Tube furnace set to 200
7/26/2011	12:56:55 PM	H2 valve closed
7/26/2011	12:56:55 PM	BCl3 valve closed
7/26/2011	12:56:55 PM	PH3 valve closed
7/26/2011	12:56:55 PM	SiCl4 pre valve closed
7/26/2011	12:56:55 PM	SiCl4 post valve closed
7/26/2011	12:56:55 PM	Bypass valve closed
7/26/2011	12:56:55 PM	Bubbler valve closed
7/26/2011	12:56:55 PM	Helium valve opened
7/26/2011	12:56:55 PM	Main Vac valve opened
7/26/2011	12:56:55 PM	Helium MFC set to  20.000000
7/26/2011	12:56:55 PM	H2 MFC set to  0.000000
7/26/2011	12:56:55 PM	BCl3 MFC set to  0.000000
7/26/2011	12:56:55 PM	PHl3 MFC set to  0.000000
7/26/2011	12:56:55 PM	SiCl4 MFC set to  0.000000
7/26/2011	12:56:55 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	12:56:56 PM	Tube furnace set to 200
7/26/2011	12:57:26 PM	Helium valve closed
7/26/2011	12:57:26 PM	H2 valve closed
7/26/2011	12:57:26 PM	BCl3 valve closed
7/26/2011	12:57:26 PM	PH3 valve closed
7/26/2011	12:57:26 PM	SiCl4 pre valve closed
7/26/2011	12:57:26 PM	SiCl4 post valve closed
7/26/2011	12:57:26 PM	Bypass valve closed
7/26/2011	12:57:26 PM	Bubbler valve closed
7/26/2011	12:57:26 PM	Main Vac valve opened
7/26/2011	12:57:26 PM	Helium MFC set to  0.000000
7/26/2011	12:57:26 PM	H2 MFC set to  0.000000
7/26/2011	12:57:26 PM	BCl3 MFC set to  0.000000
7/26/2011	12:57:26 PM	PHl3 MFC set to  0.000000
7/26/2011	12:57:26 PM	SiCl4 MFC set to  0.000000
7/26/2011	12:57:26 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	12:57:26 PM	Tube furnace set to 200
7/26/2011	12:57:51 PM	Run aborted at 12:57 PM
7/26/2011	12:57:51 PM	Helium valve closed
7/26/2011	12:57:51 PM	H2 valve closed
7/26/2011	12:57:51 PM	BCl3 valve closed
7/26/2011	12:57:51 PM	PH3 valve closed
7/26/2011	12:57:51 PM	SiCl4 pre valve closed
7/26/2011	12:57:51 PM	SiCl4 post valve closed
7/26/2011	12:57:51 PM	Bypass valve closed
7/26/2011	12:57:51 PM	Main Vac valve closed
7/26/2011	12:57:51 PM	Bubbler valve closed
7/26/2011	12:57:51 PM	Helium MFC set to  0.000000
7/26/2011	12:57:51 PM	H2 MFC set to  0.000000
7/26/2011	12:57:51 PM	BCl3 MFC set to  0.000000
7/26/2011	12:57:51 PM	PHl3 MFC set to  0.000000
7/26/2011	12:57:51 PM	SiCl4 MFC set to  0.000000
7/26/2011	12:57:51 PM	Tube furnace set to 0
7/26/2011	12:57:54 PM	Main Vac valve opened
7/26/2011	1:07:36 PM	Main Vac valve closed
7/26/2011	1:07:48 PM	Main Vac valve opened
7/26/2011	1:08:53 PM	Recipe started at 1:08 PM
7/26/2011	1:08:53 PM	Helium valve closed
7/26/2011	1:08:53 PM	H2 valve closed
7/26/2011	1:08:53 PM	BCl3 valve closed
7/26/2011	1:08:53 PM	PH3 valve closed
7/26/2011	1:08:53 PM	SiCl4 pre valve closed
7/26/2011	1:08:53 PM	SiCl4 post valve closed
7/26/2011	1:08:53 PM	Main Vac valve closed
7/26/2011	1:08:53 PM	Bypass valve closed
7/26/2011	1:08:53 PM	Bubbler valve closed
7/26/2011	1:08:53 PM	Helium MFC set to  0.000000
7/26/2011	1:08:53 PM	H2 MFC set to  0.000000
7/26/2011	1:08:53 PM	BCl3 MFC set to  0.000000
7/26/2011	1:08:53 PM	PHl3 MFC set to  0.000000
7/26/2011	1:08:53 PM	SiCl4 MFC set to  0.000000
7/26/2011	1:08:53 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	1:08:53 PM	Tube furnace set to 0
7/26/2011	1:08:56 PM	Helium valve closed
7/26/2011	1:08:56 PM	BCl3 valve closed
7/26/2011	1:08:56 PM	PH3 valve closed
7/26/2011	1:08:56 PM	SiCl4 pre valve closed
7/26/2011	1:08:56 PM	SiCl4 post valve closed
7/26/2011	1:08:56 PM	Main Vac valve closed
7/26/2011	1:08:56 PM	Bypass valve closed
7/26/2011	1:08:56 PM	Bubbler valve closed
7/26/2011	1:08:56 PM	H2 valve opened
7/26/2011	1:08:56 PM	Helium MFC set to  0.000000
7/26/2011	1:08:56 PM	H2 MFC set to  500.000000
7/26/2011	1:08:56 PM	BCl3 MFC set to  0.000000
7/26/2011	1:08:56 PM	PHl3 MFC set to  0.000000
7/26/2011	1:08:56 PM	SiCl4 MFC set to  0.000000
7/26/2011	1:08:56 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	1:08:57 PM	Tube furnace set to 0
7/26/2011	1:10:00 PM	Helium valve closed
7/26/2011	1:10:00 PM	BCl3 valve closed
7/26/2011	1:10:00 PM	PH3 valve closed
7/26/2011	1:10:00 PM	SiCl4 pre valve closed
7/26/2011	1:10:00 PM	SiCl4 post valve closed
7/26/2011	1:10:00 PM	Main Vac valve closed
7/26/2011	1:10:00 PM	Bypass valve closed
7/26/2011	1:10:00 PM	H2 valve opened
7/26/2011	1:10:00 PM	Bubbler valve opened
7/26/2011	1:10:00 PM	Helium MFC set to  0.000000
7/26/2011	1:10:00 PM	H2 MFC set to  500.000000
7/26/2011	1:10:00 PM	BCl3 MFC set to  0.000000
7/26/2011	1:10:00 PM	PHl3 MFC set to  0.000000
7/26/2011	1:10:00 PM	SiCl4 MFC set to  0.000000
7/26/2011	1:10:00 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	1:10:00 PM	Tube furnace set to 0
7/26/2011	1:10:01 PM	Helium valve closed
7/26/2011	1:10:01 PM	BCl3 valve closed
7/26/2011	1:10:01 PM	PH3 valve closed
7/26/2011	1:10:01 PM	SiCl4 pre valve closed
7/26/2011	1:10:01 PM	SiCl4 post valve closed
7/26/2011	1:10:01 PM	Main Vac valve closed
7/26/2011	1:10:01 PM	Bypass valve closed
7/26/2011	1:10:01 PM	H2 valve opened
7/26/2011	1:10:01 PM	Bubbler valve opened
7/26/2011	1:10:01 PM	Helium MFC set to  0.000000
7/26/2011	1:10:01 PM	H2 MFC set to  500.000000
7/26/2011	1:10:01 PM	BCl3 MFC set to  0.000000
7/26/2011	1:10:01 PM	PHl3 MFC set to  0.000000
7/26/2011	1:10:01 PM	SiCl4 MFC set to  0.000000
7/26/2011	1:10:01 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	1:10:01 PM	Tube furnace set to 1000
7/26/2011	1:30:01 PM	Helium valve closed
7/26/2011	1:30:01 PM	BCl3 valve closed
7/26/2011	1:30:01 PM	Main Vac valve closed
7/26/2011	1:30:01 PM	Bypass valve closed
7/26/2011	1:30:01 PM	H2 valve opened
7/26/2011	1:30:01 PM	PH3 valve opened
7/26/2011	1:30:01 PM	SiCl4 pre valve opened
7/26/2011	1:30:01 PM	SiCl4 post valve opened
7/26/2011	1:30:01 PM	Bubbler valve opened
7/26/2011	1:30:01 PM	Helium MFC set to  0.000000
7/26/2011	1:30:01 PM	H2 MFC set to  500.000000
7/26/2011	1:30:01 PM	BCl3 MFC set to  0.000000
7/26/2011	1:30:01 PM	PHl3 MFC set to  0.800000
7/26/2011	1:30:01 PM	SiCl4 MFC set to  50.000000
7/26/2011	1:30:01 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	1:30:01 PM	Tube furnace set to 1000
7/26/2011	1:46:01 PM	Helium valve closed
7/26/2011	1:46:01 PM	BCl3 valve closed
7/26/2011	1:46:02 PM	PH3 valve closed
7/26/2011	1:46:02 PM	SiCl4 pre valve closed
7/26/2011	1:46:02 PM	SiCl4 post valve closed
7/26/2011	1:46:02 PM	Main Vac valve closed
7/26/2011	1:46:02 PM	Bypass valve closed
7/26/2011	1:46:02 PM	H2 valve opened
7/26/2011	1:46:02 PM	Bubbler valve opened
7/26/2011	1:46:02 PM	Helium MFC set to  0.000000
7/26/2011	1:46:02 PM	H2 MFC set to  500.000000
7/26/2011	1:46:02 PM	BCl3 MFC set to  0.000000
7/26/2011	1:46:02 PM	PHl3 MFC set to  0.000000
7/26/2011	1:46:02 PM	SiCl4 MFC set to  0.000000
7/26/2011	1:46:02 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	1:46:02 PM	Tube furnace set to 950
7/26/2011	1:48:02 PM	Helium valve closed
7/26/2011	1:48:02 PM	BCl3 valve closed
7/26/2011	1:48:02 PM	PH3 valve closed
7/26/2011	1:48:02 PM	SiCl4 pre valve closed
7/26/2011	1:48:02 PM	SiCl4 post valve closed
7/26/2011	1:48:02 PM	Main Vac valve closed
7/26/2011	1:48:02 PM	Bypass valve closed
7/26/2011	1:48:02 PM	H2 valve opened
7/26/2011	1:48:02 PM	Bubbler valve opened
7/26/2011	1:48:02 PM	Helium MFC set to  0.000000
7/26/2011	1:48:02 PM	H2 MFC set to  500.000000
7/26/2011	1:48:02 PM	BCl3 MFC set to  0.000000
7/26/2011	1:48:02 PM	PHl3 MFC set to  0.000000
7/26/2011	1:48:02 PM	SiCl4 MFC set to  0.000000
7/26/2011	1:48:02 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	1:48:02 PM	Tube furnace set to 900
7/26/2011	1:50:02 PM	Helium valve closed
7/26/2011	1:50:02 PM	BCl3 valve closed
7/26/2011	1:50:02 PM	PH3 valve closed
7/26/2011	1:50:02 PM	SiCl4 pre valve closed
7/26/2011	1:50:02 PM	SiCl4 post valve closed
7/26/2011	1:50:02 PM	Main Vac valve closed
7/26/2011	1:50:02 PM	Bypass valve closed
7/26/2011	1:50:02 PM	H2 valve opened
7/26/2011	1:50:02 PM	Bubbler valve opened
7/26/2011	1:50:02 PM	Helium MFC set to  0.000000
7/26/2011	1:50:02 PM	H2 MFC set to  500.000000
7/26/2011	1:50:02 PM	BCl3 MFC set to  0.000000
7/26/2011	1:50:02 PM	PHl3 MFC set to  0.000000
7/26/2011	1:50:02 PM	SiCl4 MFC set to  0.000000
7/26/2011	1:50:02 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	1:50:02 PM	Tube furnace set to 850
7/26/2011	1:52:02 PM	H2 valve closed
7/26/2011	1:52:02 PM	BCl3 valve closed
7/26/2011	1:52:02 PM	PH3 valve closed
7/26/2011	1:52:02 PM	SiCl4 pre valve closed
7/26/2011	1:52:02 PM	SiCl4 post valve closed
7/26/2011	1:52:02 PM	Main Vac valve closed
7/26/2011	1:52:02 PM	Bypass valve closed
7/26/2011	1:52:02 PM	Helium valve opened
7/26/2011	1:52:02 PM	Bubbler valve opened
7/26/2011	1:52:02 PM	Helium MFC set to  500.000000
7/26/2011	1:52:02 PM	H2 MFC set to  0.000000
7/26/2011	1:52:02 PM	BCl3 MFC set to  0.000000
7/26/2011	1:52:02 PM	PHl3 MFC set to  0.000000
7/26/2011	1:52:02 PM	SiCl4 MFC set to  0.000000
7/26/2011	1:52:02 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	1:52:02 PM	Tube furnace set to 800
7/26/2011	1:54:02 PM	H2 valve closed
7/26/2011	1:54:02 PM	BCl3 valve closed
7/26/2011	1:54:02 PM	PH3 valve closed
7/26/2011	1:54:02 PM	SiCl4 pre valve closed
7/26/2011	1:54:02 PM	SiCl4 post valve closed
7/26/2011	1:54:02 PM	Main Vac valve closed
7/26/2011	1:54:02 PM	Bypass valve closed
7/26/2011	1:54:02 PM	Helium valve opened
7/26/2011	1:54:02 PM	Bubbler valve opened
7/26/2011	1:54:02 PM	Helium MFC set to  500.000000
7/26/2011	1:54:02 PM	H2 MFC set to  0.000000
7/26/2011	1:54:02 PM	BCl3 MFC set to  0.000000
7/26/2011	1:54:02 PM	PHl3 MFC set to  0.000000
7/26/2011	1:54:02 PM	SiCl4 MFC set to  0.000000
7/26/2011	1:54:02 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	1:54:02 PM	Tube furnace set to 750
7/26/2011	1:56:03 PM	H2 valve closed
7/26/2011	1:56:03 PM	BCl3 valve closed
7/26/2011	1:56:03 PM	PH3 valve closed
7/26/2011	1:56:03 PM	SiCl4 pre valve closed
7/26/2011	1:56:03 PM	SiCl4 post valve closed
7/26/2011	1:56:03 PM	Main Vac valve closed
7/26/2011	1:56:03 PM	Bypass valve closed
7/26/2011	1:56:03 PM	Helium valve opened
7/26/2011	1:56:03 PM	Bubbler valve opened
7/26/2011	1:56:03 PM	Helium MFC set to  500.000000
7/26/2011	1:56:03 PM	H2 MFC set to  0.000000
7/26/2011	1:56:03 PM	BCl3 MFC set to  0.000000
7/26/2011	1:56:03 PM	PHl3 MFC set to  0.000000
7/26/2011	1:56:03 PM	SiCl4 MFC set to  0.000000
7/26/2011	1:56:03 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	1:56:03 PM	Tube furnace set to 0
7/26/2011	2:16:03 PM	Helium valve closed
7/26/2011	2:16:03 PM	H2 valve closed
7/26/2011	2:16:03 PM	BCl3 valve closed
7/26/2011	2:16:03 PM	PH3 valve closed
7/26/2011	2:16:03 PM	SiCl4 pre valve closed
7/26/2011	2:16:03 PM	SiCl4 post valve closed
7/26/2011	2:16:03 PM	Main Vac valve closed
7/26/2011	2:16:03 PM	Bypass valve closed
7/26/2011	2:16:03 PM	Bubbler valve closed
7/26/2011	2:16:03 PM	Helium MFC set to  0.000000
7/26/2011	2:16:03 PM	H2 MFC set to  0.000000
7/26/2011	2:16:03 PM	BCl3 MFC set to  0.000000
7/26/2011	2:16:03 PM	PHl3 MFC set to  0.000000
7/26/2011	2:16:03 PM	SiCl4 MFC set to  0.000000
7/26/2011	2:16:03 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	2:16:03 PM	Tube furnace set to 0
7/26/2011	2:16:04 PM	Run finished at 2:16 PM
7/26/2011	2:30:20 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/26/2011	2:30:21 PM	Recipe started at 2:30 PM
7/26/2011	2:30:21 PM	Helium valve closed
7/26/2011	2:30:21 PM	H2 valve closed
7/26/2011	2:30:21 PM	BCl3 valve closed
7/26/2011	2:30:21 PM	PH3 valve closed
7/26/2011	2:30:21 PM	SiCl4 pre valve closed
7/26/2011	2:30:21 PM	SiCl4 post valve closed
7/26/2011	2:30:21 PM	Main Vac valve closed
7/26/2011	2:30:21 PM	Bypass valve closed
7/26/2011	2:30:21 PM	Bubbler valve closed
7/26/2011	2:30:21 PM	Helium MFC set to  0.000000
7/26/2011	2:30:21 PM	H2 MFC set to  0.000000
7/26/2011	2:30:21 PM	BCl3 MFC set to  0.000000
7/26/2011	2:30:21 PM	PHl3 MFC set to  0.000000
7/26/2011	2:30:21 PM	SiCl4 MFC set to  0.000000
7/26/2011	2:30:21 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	2:30:21 PM	Tube furnace set to 0
7/26/2011	2:30:24 PM	H2 valve closed
7/26/2011	2:30:24 PM	BCl3 valve closed
7/26/2011	2:30:24 PM	PH3 valve closed
7/26/2011	2:30:24 PM	SiCl4 pre valve closed
7/26/2011	2:30:24 PM	SiCl4 post valve closed
7/26/2011	2:30:24 PM	Main Vac valve closed
7/26/2011	2:30:24 PM	Bypass valve closed
7/26/2011	2:30:24 PM	Bubbler valve closed
7/26/2011	2:30:24 PM	Helium valve opened
7/26/2011	2:30:24 PM	Helium MFC set to  500.000000
7/26/2011	2:30:24 PM	H2 MFC set to  0.000000
7/26/2011	2:30:24 PM	BCl3 MFC set to  0.000000
7/26/2011	2:30:24 PM	PHl3 MFC set to  0.000000
7/26/2011	2:30:24 PM	SiCl4 MFC set to  0.000000
7/26/2011	2:30:24 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	2:30:25 PM	Tube furnace set to 0
7/26/2011	2:30:26 PM	Helium valve closed
7/26/2011	2:30:26 PM	H2 valve closed
7/26/2011	2:30:26 PM	BCl3 valve closed
7/26/2011	2:30:26 PM	PH3 valve closed
7/26/2011	2:30:26 PM	SiCl4 pre valve closed
7/26/2011	2:30:26 PM	SiCl4 post valve closed
7/26/2011	2:30:26 PM	Main Vac valve closed
7/26/2011	2:30:26 PM	Bypass valve closed
7/26/2011	2:30:26 PM	Bubbler valve closed
7/26/2011	2:30:26 PM	Helium MFC set to  0.000000
7/26/2011	2:30:26 PM	H2 MFC set to  0.000000
7/26/2011	2:30:26 PM	BCl3 MFC set to  0.000000
7/26/2011	2:30:26 PM	PHl3 MFC set to  0.000000
7/26/2011	2:30:26 PM	SiCl4 MFC set to  0.000000
7/26/2011	2:30:26 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	2:30:27 PM	Tube furnace set to 0
7/26/2011	2:30:28 PM	Run finished at 2:30 PM
7/26/2011	2:30:28 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/26/2011	2:35:43 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/26/2011	2:35:44 PM	Recipe started at 2:35 PM
7/26/2011	2:35:44 PM	Helium valve closed
7/26/2011	2:35:44 PM	H2 valve closed
7/26/2011	2:35:44 PM	BCl3 valve closed
7/26/2011	2:35:44 PM	PH3 valve closed
7/26/2011	2:35:44 PM	SiCl4 pre valve closed
7/26/2011	2:35:44 PM	SiCl4 post valve closed
7/26/2011	2:35:44 PM	Main Vac valve closed
7/26/2011	2:35:44 PM	Bubbler valve closed
7/26/2011	2:35:44 PM	Bypass valve opened
7/26/2011	2:35:44 PM	Helium MFC set to  0.000000
7/26/2011	2:35:44 PM	H2 MFC set to  0.000000
7/26/2011	2:35:44 PM	BCl3 MFC set to  0.000000
7/26/2011	2:35:44 PM	PHl3 MFC set to  0.000000
7/26/2011	2:35:44 PM	SiCl4 MFC set to  0.000000
7/26/2011	2:35:44 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	2:35:44 PM	Tube furnace set to 0
7/26/2011	2:36:47 PM	Helium valve closed
7/26/2011	2:36:47 PM	H2 valve closed
7/26/2011	2:36:47 PM	BCl3 valve closed
7/26/2011	2:36:47 PM	PH3 valve closed
7/26/2011	2:36:47 PM	SiCl4 pre valve closed
7/26/2011	2:36:47 PM	SiCl4 post valve closed
7/26/2011	2:36:47 PM	Main Vac valve closed
7/26/2011	2:36:47 PM	Bubbler valve closed
7/26/2011	2:36:47 PM	Bypass valve opened
7/26/2011	2:36:47 PM	Helium MFC set to  0.000000
7/26/2011	2:36:47 PM	H2 MFC set to  0.000000
7/26/2011	2:36:47 PM	BCl3 MFC set to  0.000000
7/26/2011	2:36:47 PM	PHl3 MFC set to  0.000000
7/26/2011	2:36:47 PM	SiCl4 MFC set to  0.000000
7/26/2011	2:36:47 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	2:36:47 PM	Tube furnace set to 0
7/26/2011	2:37:47 PM	Helium valve closed
7/26/2011	2:37:47 PM	H2 valve closed
7/26/2011	2:37:47 PM	BCl3 valve closed
7/26/2011	2:37:47 PM	PH3 valve closed
7/26/2011	2:37:47 PM	SiCl4 pre valve closed
7/26/2011	2:37:47 PM	SiCl4 post valve closed
7/26/2011	2:37:47 PM	Bypass valve closed
7/26/2011	2:37:47 PM	Bubbler valve closed
7/26/2011	2:37:47 PM	Main Vac valve opened
7/26/2011	2:37:47 PM	Helium MFC set to  0.000000
7/26/2011	2:37:47 PM	H2 MFC set to  0.000000
7/26/2011	2:37:47 PM	BCl3 MFC set to  0.000000
7/26/2011	2:37:47 PM	PHl3 MFC set to  0.000000
7/26/2011	2:37:47 PM	SiCl4 MFC set to  0.000000
7/26/2011	2:37:47 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	2:37:47 PM	Tube furnace set to 0
7/26/2011	2:37:48 PM	Run finished at 2:37 PM
7/26/2011	2:37:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/26/2011	2:48:43 PM	Recipe started at 2:48 PM
7/26/2011	2:48:43 PM	Helium valve closed
7/26/2011	2:48:43 PM	H2 valve closed
7/26/2011	2:48:43 PM	BCl3 valve closed
7/26/2011	2:48:43 PM	PH3 valve closed
7/26/2011	2:48:43 PM	SiCl4 pre valve closed
7/26/2011	2:48:43 PM	SiCl4 post valve closed
7/26/2011	2:48:43 PM	Bypass valve closed
7/26/2011	2:48:43 PM	Bubbler valve closed
7/26/2011	2:48:43 PM	Main Vac valve opened
7/26/2011	2:48:43 PM	Helium MFC set to  0.000000
7/26/2011	2:48:43 PM	H2 MFC set to  0.000000
7/26/2011	2:48:43 PM	BCl3 MFC set to  0.000000
7/26/2011	2:48:43 PM	PHl3 MFC set to  0.000000
7/26/2011	2:48:43 PM	SiCl4 MFC set to  0.000000
7/26/2011	2:48:43 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	2:48:43 PM	Tube furnace set to 0
7/26/2011	2:49:13 PM	H2 valve closed
7/26/2011	2:49:13 PM	BCl3 valve closed
7/26/2011	2:49:13 PM	PH3 valve closed
7/26/2011	2:49:13 PM	SiCl4 pre valve closed
7/26/2011	2:49:13 PM	SiCl4 post valve closed
7/26/2011	2:49:13 PM	Bypass valve closed
7/26/2011	2:49:13 PM	Bubbler valve closed
7/26/2011	2:49:13 PM	Helium valve opened
7/26/2011	2:49:13 PM	Main Vac valve opened
7/26/2011	2:49:13 PM	Helium MFC set to  20.000000
7/26/2011	2:49:13 PM	H2 MFC set to  0.000000
7/26/2011	2:49:13 PM	BCl3 MFC set to  0.000000
7/26/2011	2:49:13 PM	PHl3 MFC set to  0.000000
7/26/2011	2:49:13 PM	SiCl4 MFC set to  0.000000
7/26/2011	2:49:13 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	2:49:13 PM	Tube furnace set to 0
7/26/2011	2:49:43 PM	Helium valve closed
7/26/2011	2:49:43 PM	H2 valve closed
7/26/2011	2:49:43 PM	BCl3 valve closed
7/26/2011	2:49:43 PM	PH3 valve closed
7/26/2011	2:49:43 PM	SiCl4 pre valve closed
7/26/2011	2:49:43 PM	SiCl4 post valve closed
7/26/2011	2:49:43 PM	Bypass valve closed
7/26/2011	2:49:43 PM	Bubbler valve closed
7/26/2011	2:49:43 PM	Main Vac valve opened
7/26/2011	2:49:43 PM	Helium MFC set to  0.000000
7/26/2011	2:49:43 PM	H2 MFC set to  0.000000
7/26/2011	2:49:43 PM	BCl3 MFC set to  0.000000
7/26/2011	2:49:43 PM	PHl3 MFC set to  0.000000
7/26/2011	2:49:43 PM	SiCl4 MFC set to  0.000000
7/26/2011	2:49:43 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	2:49:44 PM	Tube furnace set to 0
7/26/2011	2:50:14 PM	H2 valve closed
7/26/2011	2:50:14 PM	BCl3 valve closed
7/26/2011	2:50:14 PM	PH3 valve closed
7/26/2011	2:50:14 PM	SiCl4 pre valve closed
7/26/2011	2:50:14 PM	SiCl4 post valve closed
7/26/2011	2:50:14 PM	Bypass valve closed
7/26/2011	2:50:14 PM	Bubbler valve closed
7/26/2011	2:50:14 PM	Helium valve opened
7/26/2011	2:50:14 PM	Main Vac valve opened
7/26/2011	2:50:14 PM	Helium MFC set to  20.000000
7/26/2011	2:50:14 PM	H2 MFC set to  0.000000
7/26/2011	2:50:14 PM	BCl3 MFC set to  0.000000
7/26/2011	2:50:14 PM	PHl3 MFC set to  0.000000
7/26/2011	2:50:14 PM	SiCl4 MFC set to  0.000000
7/26/2011	2:50:14 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	2:50:14 PM	Tube furnace set to 0
7/26/2011	2:50:44 PM	Helium valve closed
7/26/2011	2:50:44 PM	H2 valve closed
7/26/2011	2:50:44 PM	BCl3 valve closed
7/26/2011	2:50:44 PM	PH3 valve closed
7/26/2011	2:50:44 PM	SiCl4 pre valve closed
7/26/2011	2:50:44 PM	SiCl4 post valve closed
7/26/2011	2:50:44 PM	Bypass valve closed
7/26/2011	2:50:44 PM	Bubbler valve closed
7/26/2011	2:50:44 PM	Main Vac valve opened
7/26/2011	2:50:44 PM	Helium MFC set to  0.000000
7/26/2011	2:50:44 PM	H2 MFC set to  0.000000
7/26/2011	2:50:44 PM	BCl3 MFC set to  0.000000
7/26/2011	2:50:44 PM	PHl3 MFC set to  0.000000
7/26/2011	2:50:44 PM	SiCl4 MFC set to  0.000000
7/26/2011	2:50:44 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	2:50:44 PM	Tube furnace set to 0
7/26/2011	2:51:14 PM	H2 valve closed
7/26/2011	2:51:14 PM	BCl3 valve closed
7/26/2011	2:51:14 PM	PH3 valve closed
7/26/2011	2:51:14 PM	SiCl4 pre valve closed
7/26/2011	2:51:14 PM	SiCl4 post valve closed
7/26/2011	2:51:14 PM	Bypass valve closed
7/26/2011	2:51:14 PM	Bubbler valve closed
7/26/2011	2:51:14 PM	Helium valve opened
7/26/2011	2:51:14 PM	Main Vac valve opened
7/26/2011	2:51:14 PM	Helium MFC set to  20.000000
7/26/2011	2:51:14 PM	H2 MFC set to  0.000000
7/26/2011	2:51:14 PM	BCl3 MFC set to  0.000000
7/26/2011	2:51:14 PM	PHl3 MFC set to  0.000000
7/26/2011	2:51:14 PM	SiCl4 MFC set to  0.000000
7/26/2011	2:51:14 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	2:51:14 PM	Tube furnace set to 0
7/26/2011	2:51:44 PM	Helium valve closed
7/26/2011	2:51:44 PM	H2 valve closed
7/26/2011	2:51:44 PM	BCl3 valve closed
7/26/2011	2:51:44 PM	PH3 valve closed
7/26/2011	2:51:44 PM	SiCl4 pre valve closed
7/26/2011	2:51:44 PM	SiCl4 post valve closed
7/26/2011	2:51:44 PM	Bypass valve closed
7/26/2011	2:51:44 PM	Bubbler valve closed
7/26/2011	2:51:44 PM	Main Vac valve opened
7/26/2011	2:51:44 PM	Helium MFC set to  0.000000
7/26/2011	2:51:44 PM	H2 MFC set to  0.000000
7/26/2011	2:51:44 PM	BCl3 MFC set to  0.000000
7/26/2011	2:51:44 PM	PHl3 MFC set to  0.000000
7/26/2011	2:51:44 PM	SiCl4 MFC set to  0.000000
7/26/2011	2:51:44 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	2:51:44 PM	Tube furnace set to 0
7/26/2011	2:52:14 PM	H2 valve closed
7/26/2011	2:52:14 PM	BCl3 valve closed
7/26/2011	2:52:14 PM	PH3 valve closed
7/26/2011	2:52:14 PM	SiCl4 pre valve closed
7/26/2011	2:52:14 PM	SiCl4 post valve closed
7/26/2011	2:52:14 PM	Bypass valve closed
7/26/2011	2:52:14 PM	Bubbler valve closed
7/26/2011	2:52:14 PM	Helium valve opened
7/26/2011	2:52:14 PM	Main Vac valve opened
7/26/2011	2:52:14 PM	Helium MFC set to  20.000000
7/26/2011	2:52:15 PM	H2 MFC set to  0.000000
7/26/2011	2:52:15 PM	BCl3 MFC set to  0.000000
7/26/2011	2:52:15 PM	PHl3 MFC set to  0.000000
7/26/2011	2:52:15 PM	SiCl4 MFC set to  0.000000
7/26/2011	2:52:15 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	2:52:15 PM	Tube furnace set to 0
7/26/2011	2:52:45 PM	Helium valve closed
7/26/2011	2:52:45 PM	H2 valve closed
7/26/2011	2:52:45 PM	BCl3 valve closed
7/26/2011	2:52:45 PM	PH3 valve closed
7/26/2011	2:52:45 PM	SiCl4 pre valve closed
7/26/2011	2:52:45 PM	SiCl4 post valve closed
7/26/2011	2:52:45 PM	Bypass valve closed
7/26/2011	2:52:45 PM	Bubbler valve closed
7/26/2011	2:52:45 PM	Main Vac valve opened
7/26/2011	2:52:45 PM	Helium MFC set to  0.000000
7/26/2011	2:52:45 PM	H2 MFC set to  0.000000
7/26/2011	2:52:45 PM	BCl3 MFC set to  0.000000
7/26/2011	2:52:45 PM	PHl3 MFC set to  0.000000
7/26/2011	2:52:45 PM	SiCl4 MFC set to  0.000000
7/26/2011	2:52:45 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	2:52:45 PM	Tube furnace set to 0
7/26/2011	2:53:15 PM	H2 valve closed
7/26/2011	2:53:15 PM	BCl3 valve closed
7/26/2011	2:53:15 PM	PH3 valve closed
7/26/2011	2:53:15 PM	SiCl4 pre valve closed
7/26/2011	2:53:15 PM	SiCl4 post valve closed
7/26/2011	2:53:15 PM	Bypass valve closed
7/26/2011	2:53:15 PM	Bubbler valve closed
7/26/2011	2:53:15 PM	Helium valve opened
7/26/2011	2:53:15 PM	Main Vac valve opened
7/26/2011	2:53:15 PM	Helium MFC set to  20.000000
7/26/2011	2:53:15 PM	H2 MFC set to  0.000000
7/26/2011	2:53:15 PM	BCl3 MFC set to  0.000000
7/26/2011	2:53:15 PM	PHl3 MFC set to  0.000000
7/26/2011	2:53:15 PM	SiCl4 MFC set to  0.000000
7/26/2011	2:53:15 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	2:53:15 PM	Tube furnace set to 0
7/26/2011	2:53:45 PM	Helium valve closed
7/26/2011	2:53:45 PM	H2 valve closed
7/26/2011	2:53:45 PM	BCl3 valve closed
7/26/2011	2:53:45 PM	PH3 valve closed
7/26/2011	2:53:45 PM	SiCl4 pre valve closed
7/26/2011	2:53:45 PM	SiCl4 post valve closed
7/26/2011	2:53:45 PM	Bypass valve closed
7/26/2011	2:53:45 PM	Bubbler valve closed
7/26/2011	2:53:45 PM	Main Vac valve opened
7/26/2011	2:53:45 PM	Helium MFC set to  0.000000
7/26/2011	2:53:45 PM	H2 MFC set to  0.000000
7/26/2011	2:53:45 PM	BCl3 MFC set to  0.000000
7/26/2011	2:53:45 PM	PHl3 MFC set to  0.000000
7/26/2011	2:53:45 PM	SiCl4 MFC set to  0.000000
7/26/2011	2:53:45 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	2:53:45 PM	Tube furnace set to 0
7/26/2011	2:54:15 PM	H2 valve closed
7/26/2011	2:54:15 PM	BCl3 valve closed
7/26/2011	2:54:15 PM	PH3 valve closed
7/26/2011	2:54:15 PM	SiCl4 pre valve closed
7/26/2011	2:54:15 PM	SiCl4 post valve closed
7/26/2011	2:54:15 PM	Bypass valve closed
7/26/2011	2:54:15 PM	Bubbler valve closed
7/26/2011	2:54:15 PM	Helium valve opened
7/26/2011	2:54:15 PM	Main Vac valve opened
7/26/2011	2:54:15 PM	Helium MFC set to  20.000000
7/26/2011	2:54:15 PM	H2 MFC set to  0.000000
7/26/2011	2:54:15 PM	BCl3 MFC set to  0.000000
7/26/2011	2:54:15 PM	PHl3 MFC set to  0.000000
7/26/2011	2:54:15 PM	SiCl4 MFC set to  0.000000
7/26/2011	2:54:15 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	2:54:15 PM	Tube furnace set to 0
7/26/2011	2:54:45 PM	Helium valve closed
7/26/2011	2:54:45 PM	H2 valve closed
7/26/2011	2:54:45 PM	BCl3 valve closed
7/26/2011	2:54:45 PM	PH3 valve closed
7/26/2011	2:54:45 PM	SiCl4 pre valve closed
7/26/2011	2:54:45 PM	SiCl4 post valve closed
7/26/2011	2:54:45 PM	Bypass valve closed
7/26/2011	2:54:45 PM	Bubbler valve closed
7/26/2011	2:54:45 PM	Main Vac valve opened
7/26/2011	2:54:45 PM	Helium MFC set to  0.000000
7/26/2011	2:54:46 PM	H2 MFC set to  0.000000
7/26/2011	2:54:46 PM	BCl3 MFC set to  0.000000
7/26/2011	2:54:46 PM	PHl3 MFC set to  0.000000
7/26/2011	2:54:46 PM	SiCl4 MFC set to  0.000000
7/26/2011	2:54:46 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	2:54:46 PM	Tube furnace set to 0
7/26/2011	2:55:16 PM	H2 valve closed
7/26/2011	2:55:16 PM	BCl3 valve closed
7/26/2011	2:55:16 PM	PH3 valve closed
7/26/2011	2:55:16 PM	SiCl4 pre valve closed
7/26/2011	2:55:16 PM	SiCl4 post valve closed
7/26/2011	2:55:16 PM	Bypass valve closed
7/26/2011	2:55:16 PM	Bubbler valve closed
7/26/2011	2:55:16 PM	Helium valve opened
7/26/2011	2:55:16 PM	Main Vac valve opened
7/26/2011	2:55:16 PM	Helium MFC set to  20.000000
7/26/2011	2:55:16 PM	H2 MFC set to  0.000000
7/26/2011	2:55:16 PM	BCl3 MFC set to  0.000000
7/26/2011	2:55:16 PM	PHl3 MFC set to  0.000000
7/26/2011	2:55:16 PM	SiCl4 MFC set to  0.000000
7/26/2011	2:55:16 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	2:55:16 PM	Tube furnace set to 0
7/26/2011	2:55:46 PM	Helium valve closed
7/26/2011	2:55:46 PM	H2 valve closed
7/26/2011	2:55:46 PM	BCl3 valve closed
7/26/2011	2:55:46 PM	PH3 valve closed
7/26/2011	2:55:46 PM	SiCl4 pre valve closed
7/26/2011	2:55:46 PM	SiCl4 post valve closed
7/26/2011	2:55:46 PM	Bypass valve closed
7/26/2011	2:55:46 PM	Bubbler valve closed
7/26/2011	2:55:46 PM	Main Vac valve opened
7/26/2011	2:55:46 PM	Helium MFC set to  0.000000
7/26/2011	2:55:46 PM	H2 MFC set to  0.000000
7/26/2011	2:55:46 PM	BCl3 MFC set to  0.000000
7/26/2011	2:55:46 PM	PHl3 MFC set to  0.000000
7/26/2011	2:55:46 PM	SiCl4 MFC set to  0.000000
7/26/2011	2:55:46 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	2:55:46 PM	Tube furnace set to 0
7/26/2011	2:56:16 PM	H2 valve closed
7/26/2011	2:56:16 PM	BCl3 valve closed
7/26/2011	2:56:16 PM	PH3 valve closed
7/26/2011	2:56:16 PM	SiCl4 pre valve closed
7/26/2011	2:56:16 PM	SiCl4 post valve closed
7/26/2011	2:56:16 PM	Bypass valve closed
7/26/2011	2:56:16 PM	Bubbler valve closed
7/26/2011	2:56:16 PM	Helium valve opened
7/26/2011	2:56:16 PM	Main Vac valve opened
7/26/2011	2:56:16 PM	Helium MFC set to  20.000000
7/26/2011	2:56:16 PM	H2 MFC set to  0.000000
7/26/2011	2:56:16 PM	BCl3 MFC set to  0.000000
7/26/2011	2:56:16 PM	PHl3 MFC set to  0.000000
7/26/2011	2:56:16 PM	SiCl4 MFC set to  0.000000
7/26/2011	2:56:16 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	2:56:16 PM	Tube furnace set to 0
7/26/2011	2:56:46 PM	Helium valve closed
7/26/2011	2:56:46 PM	H2 valve closed
7/26/2011	2:56:46 PM	BCl3 valve closed
7/26/2011	2:56:46 PM	PH3 valve closed
7/26/2011	2:56:46 PM	SiCl4 pre valve closed
7/26/2011	2:56:46 PM	SiCl4 post valve closed
7/26/2011	2:56:46 PM	Bypass valve closed
7/26/2011	2:56:46 PM	Bubbler valve closed
7/26/2011	2:56:46 PM	Main Vac valve opened
7/26/2011	2:56:46 PM	Helium MFC set to  0.000000
7/26/2011	2:56:46 PM	H2 MFC set to  0.000000
7/26/2011	2:56:46 PM	BCl3 MFC set to  0.000000
7/26/2011	2:56:46 PM	PHl3 MFC set to  0.000000
7/26/2011	2:56:46 PM	SiCl4 MFC set to  0.000000
7/26/2011	2:56:46 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	2:56:46 PM	Tube furnace set to 0
7/26/2011	2:57:16 PM	H2 valve closed
7/26/2011	2:57:16 PM	BCl3 valve closed
7/26/2011	2:57:16 PM	PH3 valve closed
7/26/2011	2:57:16 PM	SiCl4 pre valve closed
7/26/2011	2:57:16 PM	SiCl4 post valve closed
7/26/2011	2:57:16 PM	Bypass valve closed
7/26/2011	2:57:16 PM	Bubbler valve closed
7/26/2011	2:57:16 PM	Helium valve opened
7/26/2011	2:57:16 PM	Main Vac valve opened
7/26/2011	2:57:16 PM	Helium MFC set to  20.000000
7/26/2011	2:57:16 PM	H2 MFC set to  0.000000
7/26/2011	2:57:16 PM	BCl3 MFC set to  0.000000
7/26/2011	2:57:16 PM	PHl3 MFC set to  0.000000
7/26/2011	2:57:16 PM	SiCl4 MFC set to  0.000000
7/26/2011	2:57:17 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	2:57:17 PM	Tube furnace set to 0
7/26/2011	2:57:47 PM	Helium valve closed
7/26/2011	2:57:47 PM	H2 valve closed
7/26/2011	2:57:47 PM	BCl3 valve closed
7/26/2011	2:57:47 PM	PH3 valve closed
7/26/2011	2:57:47 PM	SiCl4 pre valve closed
7/26/2011	2:57:47 PM	SiCl4 post valve closed
7/26/2011	2:57:47 PM	Bypass valve closed
7/26/2011	2:57:47 PM	Bubbler valve closed
7/26/2011	2:57:47 PM	Main Vac valve opened
7/26/2011	2:57:47 PM	Helium MFC set to  0.000000
7/26/2011	2:57:47 PM	H2 MFC set to  0.000000
7/26/2011	2:57:47 PM	BCl3 MFC set to  0.000000
7/26/2011	2:57:47 PM	PHl3 MFC set to  0.000000
7/26/2011	2:57:47 PM	SiCl4 MFC set to  0.000000
7/26/2011	2:57:47 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	2:57:47 PM	Tube furnace set to 200
7/26/2011	2:58:17 PM	H2 valve closed
7/26/2011	2:58:17 PM	BCl3 valve closed
7/26/2011	2:58:17 PM	PH3 valve closed
7/26/2011	2:58:17 PM	SiCl4 pre valve closed
7/26/2011	2:58:17 PM	SiCl4 post valve closed
7/26/2011	2:58:17 PM	Bypass valve closed
7/26/2011	2:58:17 PM	Bubbler valve closed
7/26/2011	2:58:17 PM	Helium valve opened
7/26/2011	2:58:17 PM	Main Vac valve opened
7/26/2011	2:58:17 PM	Helium MFC set to  20.000000
7/26/2011	2:58:17 PM	H2 MFC set to  0.000000
7/26/2011	2:58:17 PM	BCl3 MFC set to  0.000000
7/26/2011	2:58:17 PM	PHl3 MFC set to  0.000000
7/26/2011	2:58:17 PM	SiCl4 MFC set to  0.000000
7/26/2011	2:58:17 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	2:58:17 PM	Tube furnace set to 200
7/26/2011	2:58:47 PM	Helium valve closed
7/26/2011	2:58:47 PM	H2 valve closed
7/26/2011	2:58:47 PM	BCl3 valve closed
7/26/2011	2:58:47 PM	PH3 valve closed
7/26/2011	2:58:47 PM	SiCl4 pre valve closed
7/26/2011	2:58:47 PM	SiCl4 post valve closed
7/26/2011	2:58:47 PM	Bypass valve closed
7/26/2011	2:58:47 PM	Bubbler valve closed
7/26/2011	2:58:47 PM	Main Vac valve opened
7/26/2011	2:58:47 PM	Helium MFC set to  0.000000
7/26/2011	2:58:47 PM	H2 MFC set to  0.000000
7/26/2011	2:58:47 PM	BCl3 MFC set to  0.000000
7/26/2011	2:58:47 PM	PHl3 MFC set to  0.000000
7/26/2011	2:58:47 PM	SiCl4 MFC set to  0.000000
7/26/2011	2:58:47 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	2:58:47 PM	Tube furnace set to 200
7/26/2011	2:59:17 PM	H2 valve closed
7/26/2011	2:59:17 PM	BCl3 valve closed
7/26/2011	2:59:17 PM	PH3 valve closed
7/26/2011	2:59:17 PM	SiCl4 pre valve closed
7/26/2011	2:59:17 PM	SiCl4 post valve closed
7/26/2011	2:59:17 PM	Bypass valve closed
7/26/2011	2:59:17 PM	Bubbler valve closed
7/26/2011	2:59:17 PM	Helium valve opened
7/26/2011	2:59:17 PM	Main Vac valve opened
7/26/2011	2:59:17 PM	Helium MFC set to  20.000000
7/26/2011	2:59:17 PM	H2 MFC set to  0.000000
7/26/2011	2:59:17 PM	BCl3 MFC set to  0.000000
7/26/2011	2:59:17 PM	PHl3 MFC set to  0.000000
7/26/2011	2:59:17 PM	SiCl4 MFC set to  0.000000
7/26/2011	2:59:17 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	2:59:18 PM	Tube furnace set to 200
7/26/2011	2:59:48 PM	Helium valve closed
7/26/2011	2:59:48 PM	H2 valve closed
7/26/2011	2:59:48 PM	BCl3 valve closed
7/26/2011	2:59:48 PM	PH3 valve closed
7/26/2011	2:59:48 PM	SiCl4 pre valve closed
7/26/2011	2:59:48 PM	SiCl4 post valve closed
7/26/2011	2:59:48 PM	Bypass valve closed
7/26/2011	2:59:48 PM	Bubbler valve closed
7/26/2011	2:59:48 PM	Main Vac valve opened
7/26/2011	2:59:48 PM	Helium MFC set to  0.000000
7/26/2011	2:59:48 PM	H2 MFC set to  0.000000
7/26/2011	2:59:48 PM	BCl3 MFC set to  0.000000
7/26/2011	2:59:48 PM	PHl3 MFC set to  0.000000
7/26/2011	2:59:48 PM	SiCl4 MFC set to  0.000000
7/26/2011	2:59:48 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	2:59:48 PM	Tube furnace set to 200
7/26/2011	3:00:18 PM	H2 valve closed
7/26/2011	3:00:18 PM	BCl3 valve closed
7/26/2011	3:00:18 PM	PH3 valve closed
7/26/2011	3:00:18 PM	SiCl4 pre valve closed
7/26/2011	3:00:18 PM	SiCl4 post valve closed
7/26/2011	3:00:18 PM	Bypass valve closed
7/26/2011	3:00:18 PM	Bubbler valve closed
7/26/2011	3:00:18 PM	Helium valve opened
7/26/2011	3:00:18 PM	Main Vac valve opened
7/26/2011	3:00:18 PM	Helium MFC set to  20.000000
7/26/2011	3:00:18 PM	H2 MFC set to  0.000000
7/26/2011	3:00:18 PM	BCl3 MFC set to  0.000000
7/26/2011	3:00:18 PM	PHl3 MFC set to  0.000000
7/26/2011	3:00:18 PM	SiCl4 MFC set to  0.000000
7/26/2011	3:00:18 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	3:00:18 PM	Tube furnace set to 200
7/26/2011	3:00:48 PM	Helium valve closed
7/26/2011	3:00:48 PM	H2 valve closed
7/26/2011	3:00:48 PM	BCl3 valve closed
7/26/2011	3:00:48 PM	PH3 valve closed
7/26/2011	3:00:48 PM	SiCl4 pre valve closed
7/26/2011	3:00:48 PM	SiCl4 post valve closed
7/26/2011	3:00:48 PM	Bypass valve closed
7/26/2011	3:00:48 PM	Bubbler valve closed
7/26/2011	3:00:48 PM	Main Vac valve opened
7/26/2011	3:00:48 PM	Helium MFC set to  0.000000
7/26/2011	3:00:48 PM	H2 MFC set to  0.000000
7/26/2011	3:00:48 PM	BCl3 MFC set to  0.000000
7/26/2011	3:00:48 PM	PHl3 MFC set to  0.000000
7/26/2011	3:00:48 PM	SiCl4 MFC set to  0.000000
7/26/2011	3:00:48 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	3:00:48 PM	Tube furnace set to 200
7/26/2011	3:01:18 PM	H2 valve closed
7/26/2011	3:01:18 PM	BCl3 valve closed
7/26/2011	3:01:18 PM	PH3 valve closed
7/26/2011	3:01:18 PM	SiCl4 pre valve closed
7/26/2011	3:01:18 PM	SiCl4 post valve closed
7/26/2011	3:01:18 PM	Bypass valve closed
7/26/2011	3:01:18 PM	Bubbler valve closed
7/26/2011	3:01:18 PM	Helium valve opened
7/26/2011	3:01:18 PM	Main Vac valve opened
7/26/2011	3:01:18 PM	Helium MFC set to  20.000000
7/26/2011	3:01:18 PM	H2 MFC set to  0.000000
7/26/2011	3:01:18 PM	BCl3 MFC set to  0.000000
7/26/2011	3:01:18 PM	PHl3 MFC set to  0.000000
7/26/2011	3:01:18 PM	SiCl4 MFC set to  0.000000
7/26/2011	3:01:18 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	3:01:18 PM	Tube furnace set to 200
7/26/2011	3:01:48 PM	Helium valve closed
7/26/2011	3:01:48 PM	H2 valve closed
7/26/2011	3:01:48 PM	BCl3 valve closed
7/26/2011	3:01:48 PM	PH3 valve closed
7/26/2011	3:01:48 PM	SiCl4 pre valve closed
7/26/2011	3:01:48 PM	SiCl4 post valve closed
7/26/2011	3:01:48 PM	Bypass valve closed
7/26/2011	3:01:48 PM	Bubbler valve closed
7/26/2011	3:01:48 PM	Main Vac valve opened
7/26/2011	3:01:48 PM	Helium MFC set to  0.000000
7/26/2011	3:01:48 PM	H2 MFC set to  0.000000
7/26/2011	3:01:48 PM	BCl3 MFC set to  0.000000
7/26/2011	3:01:48 PM	PHl3 MFC set to  0.000000
7/26/2011	3:01:48 PM	SiCl4 MFC set to  0.000000
7/26/2011	3:01:48 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	3:01:49 PM	Tube furnace set to 200
7/26/2011	3:02:19 PM	H2 valve closed
7/26/2011	3:02:19 PM	BCl3 valve closed
7/26/2011	3:02:19 PM	PH3 valve closed
7/26/2011	3:02:19 PM	SiCl4 pre valve closed
7/26/2011	3:02:19 PM	SiCl4 post valve closed
7/26/2011	3:02:19 PM	Bypass valve closed
7/26/2011	3:02:19 PM	Bubbler valve closed
7/26/2011	3:02:19 PM	Helium valve opened
7/26/2011	3:02:19 PM	Main Vac valve opened
7/26/2011	3:02:19 PM	Helium MFC set to  20.000000
7/26/2011	3:02:19 PM	H2 MFC set to  0.000000
7/26/2011	3:02:19 PM	BCl3 MFC set to  0.000000
7/26/2011	3:02:19 PM	PHl3 MFC set to  0.000000
7/26/2011	3:02:19 PM	SiCl4 MFC set to  0.000000
7/26/2011	3:02:19 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	3:02:19 PM	Tube furnace set to 200
7/26/2011	3:02:49 PM	Helium valve closed
7/26/2011	3:02:49 PM	H2 valve closed
7/26/2011	3:02:49 PM	BCl3 valve closed
7/26/2011	3:02:49 PM	PH3 valve closed
7/26/2011	3:02:49 PM	SiCl4 pre valve closed
7/26/2011	3:02:49 PM	SiCl4 post valve closed
7/26/2011	3:02:49 PM	Bypass valve closed
7/26/2011	3:02:49 PM	Bubbler valve closed
7/26/2011	3:02:49 PM	Main Vac valve opened
7/26/2011	3:02:49 PM	Helium MFC set to  0.000000
7/26/2011	3:02:49 PM	H2 MFC set to  0.000000
7/26/2011	3:02:49 PM	BCl3 MFC set to  0.000000
7/26/2011	3:02:49 PM	PHl3 MFC set to  0.000000
7/26/2011	3:02:49 PM	SiCl4 MFC set to  0.000000
7/26/2011	3:02:49 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	3:02:49 PM	Tube furnace set to 200
7/26/2011	3:03:19 PM	H2 valve closed
7/26/2011	3:03:19 PM	BCl3 valve closed
7/26/2011	3:03:19 PM	PH3 valve closed
7/26/2011	3:03:19 PM	SiCl4 pre valve closed
7/26/2011	3:03:19 PM	SiCl4 post valve closed
7/26/2011	3:03:19 PM	Bypass valve closed
7/26/2011	3:03:19 PM	Bubbler valve closed
7/26/2011	3:03:19 PM	Helium valve opened
7/26/2011	3:03:19 PM	Main Vac valve opened
7/26/2011	3:03:19 PM	Helium MFC set to  20.000000
7/26/2011	3:03:19 PM	H2 MFC set to  0.000000
7/26/2011	3:03:19 PM	BCl3 MFC set to  0.000000
7/26/2011	3:03:19 PM	PHl3 MFC set to  0.000000
7/26/2011	3:03:19 PM	SiCl4 MFC set to  0.000000
7/26/2011	3:03:19 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	3:03:19 PM	Tube furnace set to 200
7/26/2011	3:03:49 PM	Helium valve closed
7/26/2011	3:03:49 PM	H2 valve closed
7/26/2011	3:03:49 PM	BCl3 valve closed
7/26/2011	3:03:49 PM	PH3 valve closed
7/26/2011	3:03:49 PM	SiCl4 pre valve closed
7/26/2011	3:03:49 PM	SiCl4 post valve closed
7/26/2011	3:03:49 PM	Bypass valve closed
7/26/2011	3:03:49 PM	Bubbler valve closed
7/26/2011	3:03:49 PM	Main Vac valve opened
7/26/2011	3:03:49 PM	Helium MFC set to  0.000000
7/26/2011	3:03:49 PM	H2 MFC set to  0.000000
7/26/2011	3:03:49 PM	BCl3 MFC set to  0.000000
7/26/2011	3:03:49 PM	PHl3 MFC set to  0.000000
7/26/2011	3:03:49 PM	SiCl4 MFC set to  0.000000
7/26/2011	3:03:49 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	3:03:49 PM	Tube furnace set to 0
7/26/2011	3:03:50 PM	Run finished at 3:03 PM
7/26/2011	3:07:39 PM	Main Vac valve closed
7/26/2011	3:07:52 PM	Main Vac valve opened
7/26/2011	3:08:42 PM	Recipe started at 3:08 PM
7/26/2011	3:08:42 PM	Helium valve closed
7/26/2011	3:08:42 PM	H2 valve closed
7/26/2011	3:08:42 PM	BCl3 valve closed
7/26/2011	3:08:42 PM	PH3 valve closed
7/26/2011	3:08:42 PM	SiCl4 pre valve closed
7/26/2011	3:08:42 PM	SiCl4 post valve closed
7/26/2011	3:08:42 PM	Main Vac valve closed
7/26/2011	3:08:42 PM	Bypass valve closed
7/26/2011	3:08:42 PM	Bubbler valve closed
7/26/2011	3:08:42 PM	Helium MFC set to  0.000000
7/26/2011	3:08:42 PM	H2 MFC set to  0.000000
7/26/2011	3:08:42 PM	BCl3 MFC set to  0.000000
7/26/2011	3:08:42 PM	PHl3 MFC set to  0.000000
7/26/2011	3:08:42 PM	SiCl4 MFC set to  0.000000
7/26/2011	3:08:42 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	3:08:42 PM	Tube furnace set to 0
7/26/2011	3:08:45 PM	Helium valve closed
7/26/2011	3:08:45 PM	BCl3 valve closed
7/26/2011	3:08:45 PM	PH3 valve closed
7/26/2011	3:08:45 PM	SiCl4 pre valve closed
7/26/2011	3:08:45 PM	SiCl4 post valve closed
7/26/2011	3:08:45 PM	Main Vac valve closed
7/26/2011	3:08:45 PM	Bypass valve closed
7/26/2011	3:08:45 PM	Bubbler valve closed
7/26/2011	3:08:45 PM	H2 valve opened
7/26/2011	3:08:45 PM	Helium MFC set to  0.000000
7/26/2011	3:08:45 PM	H2 MFC set to  500.000000
7/26/2011	3:08:45 PM	BCl3 MFC set to  0.000000
7/26/2011	3:08:45 PM	PHl3 MFC set to  0.000000
7/26/2011	3:08:45 PM	SiCl4 MFC set to  0.000000
7/26/2011	3:08:45 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	3:08:46 PM	Tube furnace set to 0
7/26/2011	3:09:49 PM	Helium valve closed
7/26/2011	3:09:49 PM	BCl3 valve closed
7/26/2011	3:09:49 PM	PH3 valve closed
7/26/2011	3:09:49 PM	SiCl4 pre valve closed
7/26/2011	3:09:49 PM	SiCl4 post valve closed
7/26/2011	3:09:49 PM	Main Vac valve closed
7/26/2011	3:09:49 PM	Bypass valve closed
7/26/2011	3:09:49 PM	H2 valve opened
7/26/2011	3:09:49 PM	Bubbler valve opened
7/26/2011	3:09:49 PM	Helium MFC set to  0.000000
7/26/2011	3:09:49 PM	H2 MFC set to  500.000000
7/26/2011	3:09:49 PM	BCl3 MFC set to  0.000000
7/26/2011	3:09:49 PM	PHl3 MFC set to  0.000000
7/26/2011	3:09:49 PM	SiCl4 MFC set to  0.000000
7/26/2011	3:09:49 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	3:09:49 PM	Tube furnace set to 0
7/26/2011	3:09:50 PM	Helium valve closed
7/26/2011	3:09:50 PM	BCl3 valve closed
7/26/2011	3:09:50 PM	PH3 valve closed
7/26/2011	3:09:50 PM	SiCl4 pre valve closed
7/26/2011	3:09:50 PM	SiCl4 post valve closed
7/26/2011	3:09:50 PM	Main Vac valve closed
7/26/2011	3:09:50 PM	Bypass valve closed
7/26/2011	3:09:50 PM	H2 valve opened
7/26/2011	3:09:50 PM	Bubbler valve opened
7/26/2011	3:09:50 PM	Helium MFC set to  0.000000
7/26/2011	3:09:50 PM	H2 MFC set to  500.000000
7/26/2011	3:09:50 PM	BCl3 MFC set to  0.000000
7/26/2011	3:09:50 PM	PHl3 MFC set to  0.000000
7/26/2011	3:09:50 PM	SiCl4 MFC set to  0.000000
7/26/2011	3:09:50 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	3:09:50 PM	Tube furnace set to 1000
7/26/2011	3:29:50 PM	Helium valve closed
7/26/2011	3:29:50 PM	BCl3 valve closed
7/26/2011	3:29:50 PM	Main Vac valve closed
7/26/2011	3:29:50 PM	Bypass valve closed
7/26/2011	3:29:50 PM	H2 valve opened
7/26/2011	3:29:50 PM	PH3 valve opened
7/26/2011	3:29:50 PM	SiCl4 pre valve opened
7/26/2011	3:29:50 PM	SiCl4 post valve opened
7/26/2011	3:29:50 PM	Bubbler valve opened
7/26/2011	3:29:50 PM	Helium MFC set to  0.000000
7/26/2011	3:29:50 PM	H2 MFC set to  500.000000
7/26/2011	3:29:50 PM	BCl3 MFC set to  0.000000
7/26/2011	3:29:50 PM	PHl3 MFC set to  1.200000
7/26/2011	3:29:50 PM	SiCl4 MFC set to  50.000000
7/26/2011	3:29:50 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	3:29:50 PM	Tube furnace set to 1000
7/26/2011	3:45:50 PM	Helium valve closed
7/26/2011	3:45:50 PM	BCl3 valve closed
7/26/2011	3:45:50 PM	PH3 valve closed
7/26/2011	3:45:50 PM	SiCl4 pre valve closed
7/26/2011	3:45:50 PM	SiCl4 post valve closed
7/26/2011	3:45:50 PM	Main Vac valve closed
7/26/2011	3:45:50 PM	Bypass valve closed
7/26/2011	3:45:50 PM	H2 valve opened
7/26/2011	3:45:50 PM	Bubbler valve opened
7/26/2011	3:45:50 PM	Helium MFC set to  0.000000
7/26/2011	3:45:50 PM	H2 MFC set to  500.000000
7/26/2011	3:45:50 PM	BCl3 MFC set to  0.000000
7/26/2011	3:45:50 PM	PHl3 MFC set to  0.000000
7/26/2011	3:45:50 PM	SiCl4 MFC set to  0.000000
7/26/2011	3:45:50 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	3:45:50 PM	Tube furnace set to 950
7/26/2011	3:47:50 PM	Helium valve closed
7/26/2011	3:47:50 PM	BCl3 valve closed
7/26/2011	3:47:50 PM	PH3 valve closed
7/26/2011	3:47:50 PM	SiCl4 pre valve closed
7/26/2011	3:47:50 PM	SiCl4 post valve closed
7/26/2011	3:47:50 PM	Main Vac valve closed
7/26/2011	3:47:50 PM	Bypass valve closed
7/26/2011	3:47:50 PM	H2 valve opened
7/26/2011	3:47:50 PM	Bubbler valve opened
7/26/2011	3:47:50 PM	Helium MFC set to  0.000000
7/26/2011	3:47:50 PM	H2 MFC set to  500.000000
7/26/2011	3:47:50 PM	BCl3 MFC set to  0.000000
7/26/2011	3:47:50 PM	PHl3 MFC set to  0.000000
7/26/2011	3:47:50 PM	SiCl4 MFC set to  0.000000
7/26/2011	3:47:50 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	3:47:51 PM	Tube furnace set to 900
7/26/2011	3:49:51 PM	Helium valve closed
7/26/2011	3:49:51 PM	BCl3 valve closed
7/26/2011	3:49:51 PM	PH3 valve closed
7/26/2011	3:49:51 PM	SiCl4 pre valve closed
7/26/2011	3:49:51 PM	SiCl4 post valve closed
7/26/2011	3:49:51 PM	Main Vac valve closed
7/26/2011	3:49:51 PM	Bypass valve closed
7/26/2011	3:49:51 PM	H2 valve opened
7/26/2011	3:49:51 PM	Bubbler valve opened
7/26/2011	3:49:51 PM	Helium MFC set to  0.000000
7/26/2011	3:49:51 PM	H2 MFC set to  500.000000
7/26/2011	3:49:51 PM	BCl3 MFC set to  0.000000
7/26/2011	3:49:51 PM	PHl3 MFC set to  0.000000
7/26/2011	3:49:51 PM	SiCl4 MFC set to  0.000000
7/26/2011	3:49:51 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	3:49:51 PM	Tube furnace set to 850
7/26/2011	3:51:51 PM	H2 valve closed
7/26/2011	3:51:51 PM	BCl3 valve closed
7/26/2011	3:51:51 PM	PH3 valve closed
7/26/2011	3:51:51 PM	SiCl4 pre valve closed
7/26/2011	3:51:51 PM	SiCl4 post valve closed
7/26/2011	3:51:51 PM	Main Vac valve closed
7/26/2011	3:51:51 PM	Bypass valve closed
7/26/2011	3:51:51 PM	Helium valve opened
7/26/2011	3:51:51 PM	Bubbler valve opened
7/26/2011	3:51:51 PM	Helium MFC set to  500.000000
7/26/2011	3:51:51 PM	H2 MFC set to  0.000000
7/26/2011	3:51:51 PM	BCl3 MFC set to  0.000000
7/26/2011	3:51:51 PM	PHl3 MFC set to  0.000000
7/26/2011	3:51:51 PM	SiCl4 MFC set to  0.000000
7/26/2011	3:51:51 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	3:51:51 PM	Tube furnace set to 800
7/26/2011	3:53:51 PM	H2 valve closed
7/26/2011	3:53:51 PM	BCl3 valve closed
7/26/2011	3:53:51 PM	PH3 valve closed
7/26/2011	3:53:51 PM	SiCl4 pre valve closed
7/26/2011	3:53:51 PM	SiCl4 post valve closed
7/26/2011	3:53:51 PM	Main Vac valve closed
7/26/2011	3:53:51 PM	Bypass valve closed
7/26/2011	3:53:51 PM	Helium valve opened
7/26/2011	3:53:51 PM	Bubbler valve opened
7/26/2011	3:53:51 PM	Helium MFC set to  500.000000
7/26/2011	3:53:51 PM	H2 MFC set to  0.000000
7/26/2011	3:53:51 PM	BCl3 MFC set to  0.000000
7/26/2011	3:53:51 PM	PHl3 MFC set to  0.000000
7/26/2011	3:53:51 PM	SiCl4 MFC set to  0.000000
7/26/2011	3:53:51 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	3:53:51 PM	Tube furnace set to 750
7/26/2011	3:55:51 PM	H2 valve closed
7/26/2011	3:55:51 PM	BCl3 valve closed
7/26/2011	3:55:51 PM	PH3 valve closed
7/26/2011	3:55:51 PM	SiCl4 pre valve closed
7/26/2011	3:55:51 PM	SiCl4 post valve closed
7/26/2011	3:55:51 PM	Main Vac valve closed
7/26/2011	3:55:51 PM	Bypass valve closed
7/26/2011	3:55:51 PM	Helium valve opened
7/26/2011	3:55:51 PM	Bubbler valve opened
7/26/2011	3:55:51 PM	Helium MFC set to  500.000000
7/26/2011	3:55:51 PM	H2 MFC set to  0.000000
7/26/2011	3:55:51 PM	BCl3 MFC set to  0.000000
7/26/2011	3:55:51 PM	PHl3 MFC set to  0.000000
7/26/2011	3:55:51 PM	SiCl4 MFC set to  0.000000
7/26/2011	3:55:51 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	3:55:51 PM	Tube furnace set to 0
7/26/2011	4:15:51 PM	Helium valve closed
7/26/2011	4:15:51 PM	H2 valve closed
7/26/2011	4:15:51 PM	BCl3 valve closed
7/26/2011	4:15:51 PM	PH3 valve closed
7/26/2011	4:15:51 PM	SiCl4 pre valve closed
7/26/2011	4:15:51 PM	SiCl4 post valve closed
7/26/2011	4:15:51 PM	Main Vac valve closed
7/26/2011	4:15:51 PM	Bypass valve closed
7/26/2011	4:15:51 PM	Bubbler valve closed
7/26/2011	4:15:51 PM	Helium MFC set to  0.000000
7/26/2011	4:15:51 PM	H2 MFC set to  0.000000
7/26/2011	4:15:51 PM	BCl3 MFC set to  0.000000
7/26/2011	4:15:51 PM	PHl3 MFC set to  0.000000
7/26/2011	4:15:51 PM	SiCl4 MFC set to  0.000000
7/26/2011	4:15:51 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	4:15:52 PM	Tube furnace set to 0
7/26/2011	4:15:53 PM	Run finished at 4:15 PM
7/26/2011	4:30:18 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/26/2011	4:30:19 PM	Recipe started at 4:30 PM
7/26/2011	4:30:19 PM	Helium valve closed
7/26/2011	4:30:19 PM	H2 valve closed
7/26/2011	4:30:19 PM	BCl3 valve closed
7/26/2011	4:30:19 PM	PH3 valve closed
7/26/2011	4:30:19 PM	SiCl4 pre valve closed
7/26/2011	4:30:19 PM	SiCl4 post valve closed
7/26/2011	4:30:19 PM	Main Vac valve closed
7/26/2011	4:30:19 PM	Bypass valve closed
7/26/2011	4:30:19 PM	Bubbler valve closed
7/26/2011	4:30:19 PM	Helium MFC set to  0.000000
7/26/2011	4:30:19 PM	H2 MFC set to  0.000000
7/26/2011	4:30:19 PM	BCl3 MFC set to  0.000000
7/26/2011	4:30:19 PM	PHl3 MFC set to  0.000000
7/26/2011	4:30:19 PM	SiCl4 MFC set to  0.000000
7/26/2011	4:30:19 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	4:30:20 PM	Tube furnace set to 0
7/26/2011	4:30:23 PM	H2 valve closed
7/26/2011	4:30:23 PM	BCl3 valve closed
7/26/2011	4:30:23 PM	PH3 valve closed
7/26/2011	4:30:23 PM	SiCl4 pre valve closed
7/26/2011	4:30:23 PM	SiCl4 post valve closed
7/26/2011	4:30:23 PM	Main Vac valve closed
7/26/2011	4:30:23 PM	Bypass valve closed
7/26/2011	4:30:23 PM	Bubbler valve closed
7/26/2011	4:30:23 PM	Helium valve opened
7/26/2011	4:30:23 PM	Helium MFC set to  500.000000
7/26/2011	4:30:23 PM	H2 MFC set to  0.000000
7/26/2011	4:30:23 PM	BCl3 MFC set to  0.000000
7/26/2011	4:30:23 PM	PHl3 MFC set to  0.000000
7/26/2011	4:30:23 PM	SiCl4 MFC set to  0.000000
7/26/2011	4:30:23 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	4:30:23 PM	Tube furnace set to 0
7/26/2011	4:30:25 PM	Helium valve closed
7/26/2011	4:30:25 PM	H2 valve closed
7/26/2011	4:30:25 PM	BCl3 valve closed
7/26/2011	4:30:25 PM	PH3 valve closed
7/26/2011	4:30:25 PM	SiCl4 pre valve closed
7/26/2011	4:30:25 PM	SiCl4 post valve closed
7/26/2011	4:30:25 PM	Main Vac valve closed
7/26/2011	4:30:25 PM	Bypass valve closed
7/26/2011	4:30:25 PM	Bubbler valve closed
7/26/2011	4:30:25 PM	Helium MFC set to  0.000000
7/26/2011	4:30:25 PM	H2 MFC set to  0.000000
7/26/2011	4:30:25 PM	BCl3 MFC set to  0.000000
7/26/2011	4:30:25 PM	PHl3 MFC set to  0.000000
7/26/2011	4:30:25 PM	SiCl4 MFC set to  0.000000
7/26/2011	4:30:25 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	4:30:25 PM	Tube furnace set to 0
7/26/2011	4:30:26 PM	Run finished at 4:30 PM
7/26/2011	4:30:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/26/2011	4:34:10 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/26/2011	4:34:11 PM	Recipe started at 4:34 PM
7/26/2011	4:34:11 PM	Helium valve closed
7/26/2011	4:34:11 PM	H2 valve closed
7/26/2011	4:34:11 PM	BCl3 valve closed
7/26/2011	4:34:11 PM	PH3 valve closed
7/26/2011	4:34:11 PM	SiCl4 pre valve closed
7/26/2011	4:34:11 PM	SiCl4 post valve closed
7/26/2011	4:34:11 PM	Main Vac valve closed
7/26/2011	4:34:11 PM	Bubbler valve closed
7/26/2011	4:34:11 PM	Bypass valve opened
7/26/2011	4:34:11 PM	Helium MFC set to  0.000000
7/26/2011	4:34:11 PM	H2 MFC set to  0.000000
7/26/2011	4:34:11 PM	BCl3 MFC set to  0.000000
7/26/2011	4:34:11 PM	PHl3 MFC set to  0.000000
7/26/2011	4:34:11 PM	SiCl4 MFC set to  0.000000
7/26/2011	4:34:11 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	4:34:11 PM	Tube furnace set to 0
7/26/2011	4:35:14 PM	Helium valve closed
7/26/2011	4:35:14 PM	H2 valve closed
7/26/2011	4:35:14 PM	BCl3 valve closed
7/26/2011	4:35:14 PM	PH3 valve closed
7/26/2011	4:35:14 PM	SiCl4 pre valve closed
7/26/2011	4:35:14 PM	SiCl4 post valve closed
7/26/2011	4:35:14 PM	Main Vac valve closed
7/26/2011	4:35:14 PM	Bubbler valve closed
7/26/2011	4:35:14 PM	Bypass valve opened
7/26/2011	4:35:14 PM	Helium MFC set to  0.000000
7/26/2011	4:35:14 PM	H2 MFC set to  0.000000
7/26/2011	4:35:14 PM	BCl3 MFC set to  0.000000
7/26/2011	4:35:14 PM	PHl3 MFC set to  0.000000
7/26/2011	4:35:14 PM	SiCl4 MFC set to  0.000000
7/26/2011	4:35:14 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	4:35:14 PM	Tube furnace set to 0
7/26/2011	4:36:14 PM	Helium valve closed
7/26/2011	4:36:14 PM	H2 valve closed
7/26/2011	4:36:14 PM	BCl3 valve closed
7/26/2011	4:36:14 PM	PH3 valve closed
7/26/2011	4:36:14 PM	SiCl4 pre valve closed
7/26/2011	4:36:14 PM	SiCl4 post valve closed
7/26/2011	4:36:14 PM	Bypass valve closed
7/26/2011	4:36:14 PM	Bubbler valve closed
7/26/2011	4:36:14 PM	Main Vac valve opened
7/26/2011	4:36:14 PM	Helium MFC set to  0.000000
7/26/2011	4:36:14 PM	H2 MFC set to  0.000000
7/26/2011	4:36:14 PM	BCl3 MFC set to  0.000000
7/26/2011	4:36:14 PM	PHl3 MFC set to  0.000000
7/26/2011	4:36:14 PM	SiCl4 MFC set to  0.000000
7/26/2011	4:36:14 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	4:36:15 PM	Tube furnace set to 0
7/26/2011	4:36:16 PM	Run finished at 4:36 PM
7/26/2011	4:36:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/26/2011	4:49:40 PM	Recipe started at 4:49 PM
7/26/2011	4:49:40 PM	Helium valve closed
7/26/2011	4:49:40 PM	H2 valve closed
7/26/2011	4:49:40 PM	BCl3 valve closed
7/26/2011	4:49:40 PM	PH3 valve closed
7/26/2011	4:49:40 PM	SiCl4 pre valve closed
7/26/2011	4:49:40 PM	SiCl4 post valve closed
7/26/2011	4:49:40 PM	Bypass valve closed
7/26/2011	4:49:40 PM	Bubbler valve closed
7/26/2011	4:49:40 PM	Main Vac valve opened
7/26/2011	4:49:40 PM	Helium MFC set to  0.000000
7/26/2011	4:49:40 PM	H2 MFC set to  0.000000
7/26/2011	4:49:40 PM	BCl3 MFC set to  0.000000
7/26/2011	4:49:40 PM	PHl3 MFC set to  0.000000
7/26/2011	4:49:40 PM	SiCl4 MFC set to  0.000000
7/26/2011	4:49:40 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	4:49:40 PM	Tube furnace set to 0
7/26/2011	4:50:10 PM	H2 valve closed
7/26/2011	4:50:10 PM	BCl3 valve closed
7/26/2011	4:50:10 PM	PH3 valve closed
7/26/2011	4:50:10 PM	SiCl4 pre valve closed
7/26/2011	4:50:10 PM	SiCl4 post valve closed
7/26/2011	4:50:10 PM	Bypass valve closed
7/26/2011	4:50:10 PM	Bubbler valve closed
7/26/2011	4:50:10 PM	Helium valve opened
7/26/2011	4:50:10 PM	Main Vac valve opened
7/26/2011	4:50:10 PM	Helium MFC set to  20.000000
7/26/2011	4:50:10 PM	H2 MFC set to  0.000000
7/26/2011	4:50:10 PM	BCl3 MFC set to  0.000000
7/26/2011	4:50:10 PM	PHl3 MFC set to  0.000000
7/26/2011	4:50:10 PM	SiCl4 MFC set to  0.000000
7/26/2011	4:50:10 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	4:50:10 PM	Tube furnace set to 0
7/26/2011	4:50:40 PM	Helium valve closed
7/26/2011	4:50:40 PM	H2 valve closed
7/26/2011	4:50:40 PM	BCl3 valve closed
7/26/2011	4:50:40 PM	PH3 valve closed
7/26/2011	4:50:40 PM	SiCl4 pre valve closed
7/26/2011	4:50:40 PM	SiCl4 post valve closed
7/26/2011	4:50:40 PM	Bypass valve closed
7/26/2011	4:50:40 PM	Bubbler valve closed
7/26/2011	4:50:40 PM	Main Vac valve opened
7/26/2011	4:50:40 PM	Helium MFC set to  0.000000
7/26/2011	4:50:40 PM	H2 MFC set to  0.000000
7/26/2011	4:50:40 PM	BCl3 MFC set to  0.000000
7/26/2011	4:50:40 PM	PHl3 MFC set to  0.000000
7/26/2011	4:50:40 PM	SiCl4 MFC set to  0.000000
7/26/2011	4:50:40 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	4:50:41 PM	Tube furnace set to 0
7/26/2011	4:51:11 PM	H2 valve closed
7/26/2011	4:51:11 PM	BCl3 valve closed
7/26/2011	4:51:11 PM	PH3 valve closed
7/26/2011	4:51:11 PM	SiCl4 pre valve closed
7/26/2011	4:51:11 PM	SiCl4 post valve closed
7/26/2011	4:51:11 PM	Bypass valve closed
7/26/2011	4:51:11 PM	Bubbler valve closed
7/26/2011	4:51:11 PM	Helium valve opened
7/26/2011	4:51:11 PM	Main Vac valve opened
7/26/2011	4:51:11 PM	Helium MFC set to  20.000000
7/26/2011	4:51:11 PM	H2 MFC set to  0.000000
7/26/2011	4:51:11 PM	BCl3 MFC set to  0.000000
7/26/2011	4:51:11 PM	PHl3 MFC set to  0.000000
7/26/2011	4:51:11 PM	SiCl4 MFC set to  0.000000
7/26/2011	4:51:11 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	4:51:11 PM	Tube furnace set to 0
7/26/2011	4:51:41 PM	Helium valve closed
7/26/2011	4:51:41 PM	H2 valve closed
7/26/2011	4:51:41 PM	BCl3 valve closed
7/26/2011	4:51:41 PM	PH3 valve closed
7/26/2011	4:51:41 PM	SiCl4 pre valve closed
7/26/2011	4:51:41 PM	SiCl4 post valve closed
7/26/2011	4:51:41 PM	Bypass valve closed
7/26/2011	4:51:41 PM	Bubbler valve closed
7/26/2011	4:51:41 PM	Main Vac valve opened
7/26/2011	4:51:41 PM	Helium MFC set to  0.000000
7/26/2011	4:51:41 PM	H2 MFC set to  0.000000
7/26/2011	4:51:41 PM	BCl3 MFC set to  0.000000
7/26/2011	4:51:41 PM	PHl3 MFC set to  0.000000
7/26/2011	4:51:41 PM	SiCl4 MFC set to  0.000000
7/26/2011	4:51:41 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	4:51:41 PM	Tube furnace set to 0
7/26/2011	4:52:11 PM	H2 valve closed
7/26/2011	4:52:11 PM	BCl3 valve closed
7/26/2011	4:52:11 PM	PH3 valve closed
7/26/2011	4:52:11 PM	SiCl4 pre valve closed
7/26/2011	4:52:11 PM	SiCl4 post valve closed
7/26/2011	4:52:11 PM	Bypass valve closed
7/26/2011	4:52:11 PM	Bubbler valve closed
7/26/2011	4:52:11 PM	Helium valve opened
7/26/2011	4:52:11 PM	Main Vac valve opened
7/26/2011	4:52:11 PM	Helium MFC set to  20.000000
7/26/2011	4:52:11 PM	H2 MFC set to  0.000000
7/26/2011	4:52:11 PM	BCl3 MFC set to  0.000000
7/26/2011	4:52:11 PM	PHl3 MFC set to  0.000000
7/26/2011	4:52:11 PM	SiCl4 MFC set to  0.000000
7/26/2011	4:52:11 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	4:52:11 PM	Tube furnace set to 0
7/26/2011	4:52:41 PM	Helium valve closed
7/26/2011	4:52:41 PM	H2 valve closed
7/26/2011	4:52:41 PM	BCl3 valve closed
7/26/2011	4:52:41 PM	PH3 valve closed
7/26/2011	4:52:41 PM	SiCl4 pre valve closed
7/26/2011	4:52:41 PM	SiCl4 post valve closed
7/26/2011	4:52:41 PM	Bypass valve closed
7/26/2011	4:52:41 PM	Bubbler valve closed
7/26/2011	4:52:41 PM	Main Vac valve opened
7/26/2011	4:52:41 PM	Helium MFC set to  0.000000
7/26/2011	4:52:41 PM	H2 MFC set to  0.000000
7/26/2011	4:52:41 PM	BCl3 MFC set to  0.000000
7/26/2011	4:52:41 PM	PHl3 MFC set to  0.000000
7/26/2011	4:52:41 PM	SiCl4 MFC set to  0.000000
7/26/2011	4:52:41 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	4:52:41 PM	Tube furnace set to 0
7/26/2011	4:53:11 PM	H2 valve closed
7/26/2011	4:53:11 PM	BCl3 valve closed
7/26/2011	4:53:11 PM	PH3 valve closed
7/26/2011	4:53:11 PM	SiCl4 pre valve closed
7/26/2011	4:53:11 PM	SiCl4 post valve closed
7/26/2011	4:53:11 PM	Bypass valve closed
7/26/2011	4:53:11 PM	Bubbler valve closed
7/26/2011	4:53:11 PM	Helium valve opened
7/26/2011	4:53:11 PM	Main Vac valve opened
7/26/2011	4:53:11 PM	Helium MFC set to  20.000000
7/26/2011	4:53:11 PM	H2 MFC set to  0.000000
7/26/2011	4:53:11 PM	BCl3 MFC set to  0.000000
7/26/2011	4:53:11 PM	PHl3 MFC set to  0.000000
7/26/2011	4:53:11 PM	SiCl4 MFC set to  0.000000
7/26/2011	4:53:11 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	4:53:12 PM	Tube furnace set to 0
7/26/2011	4:53:42 PM	Helium valve closed
7/26/2011	4:53:42 PM	H2 valve closed
7/26/2011	4:53:42 PM	BCl3 valve closed
7/26/2011	4:53:42 PM	PH3 valve closed
7/26/2011	4:53:42 PM	SiCl4 pre valve closed
7/26/2011	4:53:42 PM	SiCl4 post valve closed
7/26/2011	4:53:42 PM	Bypass valve closed
7/26/2011	4:53:42 PM	Bubbler valve closed
7/26/2011	4:53:42 PM	Main Vac valve opened
7/26/2011	4:53:42 PM	Helium MFC set to  0.000000
7/26/2011	4:53:42 PM	H2 MFC set to  0.000000
7/26/2011	4:53:42 PM	BCl3 MFC set to  0.000000
7/26/2011	4:53:42 PM	PHl3 MFC set to  0.000000
7/26/2011	4:53:42 PM	SiCl4 MFC set to  0.000000
7/26/2011	4:53:42 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	4:53:42 PM	Tube furnace set to 0
7/26/2011	4:54:12 PM	H2 valve closed
7/26/2011	4:54:12 PM	BCl3 valve closed
7/26/2011	4:54:12 PM	PH3 valve closed
7/26/2011	4:54:12 PM	SiCl4 pre valve closed
7/26/2011	4:54:12 PM	SiCl4 post valve closed
7/26/2011	4:54:12 PM	Bypass valve closed
7/26/2011	4:54:12 PM	Bubbler valve closed
7/26/2011	4:54:12 PM	Helium valve opened
7/26/2011	4:54:12 PM	Main Vac valve opened
7/26/2011	4:54:12 PM	Helium MFC set to  20.000000
7/26/2011	4:54:12 PM	H2 MFC set to  0.000000
7/26/2011	4:54:12 PM	BCl3 MFC set to  0.000000
7/26/2011	4:54:12 PM	PHl3 MFC set to  0.000000
7/26/2011	4:54:12 PM	SiCl4 MFC set to  0.000000
7/26/2011	4:54:12 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	4:54:12 PM	Tube furnace set to 0
7/26/2011	4:54:42 PM	Helium valve closed
7/26/2011	4:54:42 PM	H2 valve closed
7/26/2011	4:54:42 PM	BCl3 valve closed
7/26/2011	4:54:42 PM	PH3 valve closed
7/26/2011	4:54:42 PM	SiCl4 pre valve closed
7/26/2011	4:54:42 PM	SiCl4 post valve closed
7/26/2011	4:54:42 PM	Bypass valve closed
7/26/2011	4:54:42 PM	Bubbler valve closed
7/26/2011	4:54:42 PM	Main Vac valve opened
7/26/2011	4:54:42 PM	Helium MFC set to  0.000000
7/26/2011	4:54:42 PM	H2 MFC set to  0.000000
7/26/2011	4:54:42 PM	BCl3 MFC set to  0.000000
7/26/2011	4:54:42 PM	PHl3 MFC set to  0.000000
7/26/2011	4:54:42 PM	SiCl4 MFC set to  0.000000
7/26/2011	4:54:42 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	4:54:42 PM	Tube furnace set to 0
7/26/2011	4:55:12 PM	H2 valve closed
7/26/2011	4:55:12 PM	BCl3 valve closed
7/26/2011	4:55:12 PM	PH3 valve closed
7/26/2011	4:55:12 PM	SiCl4 pre valve closed
7/26/2011	4:55:12 PM	SiCl4 post valve closed
7/26/2011	4:55:12 PM	Bypass valve closed
7/26/2011	4:55:12 PM	Bubbler valve closed
7/26/2011	4:55:12 PM	Helium valve opened
7/26/2011	4:55:12 PM	Main Vac valve opened
7/26/2011	4:55:12 PM	Helium MFC set to  20.000000
7/26/2011	4:55:12 PM	H2 MFC set to  0.000000
7/26/2011	4:55:12 PM	BCl3 MFC set to  0.000000
7/26/2011	4:55:12 PM	PHl3 MFC set to  0.000000
7/26/2011	4:55:12 PM	SiCl4 MFC set to  0.000000
7/26/2011	4:55:12 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	4:55:12 PM	Tube furnace set to 0
7/26/2011	4:55:42 PM	Helium valve closed
7/26/2011	4:55:42 PM	H2 valve closed
7/26/2011	4:55:42 PM	BCl3 valve closed
7/26/2011	4:55:42 PM	PH3 valve closed
7/26/2011	4:55:42 PM	SiCl4 pre valve closed
7/26/2011	4:55:42 PM	SiCl4 post valve closed
7/26/2011	4:55:42 PM	Bypass valve closed
7/26/2011	4:55:42 PM	Bubbler valve closed
7/26/2011	4:55:42 PM	Main Vac valve opened
7/26/2011	4:55:42 PM	Helium MFC set to  0.000000
7/26/2011	4:55:42 PM	H2 MFC set to  0.000000
7/26/2011	4:55:42 PM	BCl3 MFC set to  0.000000
7/26/2011	4:55:42 PM	PHl3 MFC set to  0.000000
7/26/2011	4:55:42 PM	SiCl4 MFC set to  0.000000
7/26/2011	4:55:42 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	4:55:43 PM	Tube furnace set to 0
7/26/2011	4:56:13 PM	H2 valve closed
7/26/2011	4:56:13 PM	BCl3 valve closed
7/26/2011	4:56:13 PM	PH3 valve closed
7/26/2011	4:56:13 PM	SiCl4 pre valve closed
7/26/2011	4:56:13 PM	SiCl4 post valve closed
7/26/2011	4:56:13 PM	Bypass valve closed
7/26/2011	4:56:13 PM	Bubbler valve closed
7/26/2011	4:56:13 PM	Helium valve opened
7/26/2011	4:56:13 PM	Main Vac valve opened
7/26/2011	4:56:13 PM	Helium MFC set to  20.000000
7/26/2011	4:56:13 PM	H2 MFC set to  0.000000
7/26/2011	4:56:13 PM	BCl3 MFC set to  0.000000
7/26/2011	4:56:13 PM	PHl3 MFC set to  0.000000
7/26/2011	4:56:13 PM	SiCl4 MFC set to  0.000000
7/26/2011	4:56:13 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	4:56:13 PM	Tube furnace set to 0
7/26/2011	4:56:43 PM	Helium valve closed
7/26/2011	4:56:43 PM	H2 valve closed
7/26/2011	4:56:43 PM	BCl3 valve closed
7/26/2011	4:56:43 PM	PH3 valve closed
7/26/2011	4:56:43 PM	SiCl4 pre valve closed
7/26/2011	4:56:43 PM	SiCl4 post valve closed
7/26/2011	4:56:43 PM	Bypass valve closed
7/26/2011	4:56:43 PM	Bubbler valve closed
7/26/2011	4:56:43 PM	Main Vac valve opened
7/26/2011	4:56:43 PM	Helium MFC set to  0.000000
7/26/2011	4:56:43 PM	H2 MFC set to  0.000000
7/26/2011	4:56:43 PM	BCl3 MFC set to  0.000000
7/26/2011	4:56:43 PM	PHl3 MFC set to  0.000000
7/26/2011	4:56:43 PM	SiCl4 MFC set to  0.000000
7/26/2011	4:56:43 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	4:56:43 PM	Tube furnace set to 0
7/26/2011	4:57:13 PM	H2 valve closed
7/26/2011	4:57:13 PM	BCl3 valve closed
7/26/2011	4:57:13 PM	PH3 valve closed
7/26/2011	4:57:13 PM	SiCl4 pre valve closed
7/26/2011	4:57:13 PM	SiCl4 post valve closed
7/26/2011	4:57:13 PM	Bypass valve closed
7/26/2011	4:57:13 PM	Bubbler valve closed
7/26/2011	4:57:13 PM	Helium valve opened
7/26/2011	4:57:13 PM	Main Vac valve opened
7/26/2011	4:57:13 PM	Helium MFC set to  20.000000
7/26/2011	4:57:13 PM	H2 MFC set to  0.000000
7/26/2011	4:57:13 PM	BCl3 MFC set to  0.000000
7/26/2011	4:57:13 PM	PHl3 MFC set to  0.000000
7/26/2011	4:57:13 PM	SiCl4 MFC set to  0.000000
7/26/2011	4:57:13 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	4:57:13 PM	Tube furnace set to 0
7/26/2011	4:57:43 PM	Helium valve closed
7/26/2011	4:57:43 PM	H2 valve closed
7/26/2011	4:57:43 PM	BCl3 valve closed
7/26/2011	4:57:43 PM	PH3 valve closed
7/26/2011	4:57:43 PM	SiCl4 pre valve closed
7/26/2011	4:57:43 PM	SiCl4 post valve closed
7/26/2011	4:57:43 PM	Bypass valve closed
7/26/2011	4:57:43 PM	Bubbler valve closed
7/26/2011	4:57:43 PM	Main Vac valve opened
7/26/2011	4:57:43 PM	Helium MFC set to  0.000000
7/26/2011	4:57:43 PM	H2 MFC set to  0.000000
7/26/2011	4:57:43 PM	BCl3 MFC set to  0.000000
7/26/2011	4:57:43 PM	PHl3 MFC set to  0.000000
7/26/2011	4:57:43 PM	SiCl4 MFC set to  0.000000
7/26/2011	4:57:43 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	4:57:43 PM	Tube furnace set to 0
7/26/2011	4:58:13 PM	H2 valve closed
7/26/2011	4:58:13 PM	BCl3 valve closed
7/26/2011	4:58:13 PM	PH3 valve closed
7/26/2011	4:58:13 PM	SiCl4 pre valve closed
7/26/2011	4:58:13 PM	SiCl4 post valve closed
7/26/2011	4:58:13 PM	Bypass valve closed
7/26/2011	4:58:13 PM	Bubbler valve closed
7/26/2011	4:58:13 PM	Helium valve opened
7/26/2011	4:58:13 PM	Main Vac valve opened
7/26/2011	4:58:13 PM	Helium MFC set to  20.000000
7/26/2011	4:58:13 PM	H2 MFC set to  0.000000
7/26/2011	4:58:13 PM	BCl3 MFC set to  0.000000
7/26/2011	4:58:13 PM	PHl3 MFC set to  0.000000
7/26/2011	4:58:13 PM	SiCl4 MFC set to  0.000000
7/26/2011	4:58:13 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	4:58:14 PM	Tube furnace set to 0
7/26/2011	4:58:44 PM	Helium valve closed
7/26/2011	4:58:44 PM	H2 valve closed
7/26/2011	4:58:44 PM	BCl3 valve closed
7/26/2011	4:58:44 PM	PH3 valve closed
7/26/2011	4:58:44 PM	SiCl4 pre valve closed
7/26/2011	4:58:44 PM	SiCl4 post valve closed
7/26/2011	4:58:44 PM	Bypass valve closed
7/26/2011	4:58:44 PM	Bubbler valve closed
7/26/2011	4:58:44 PM	Main Vac valve opened
7/26/2011	4:58:44 PM	Helium MFC set to  0.000000
7/26/2011	4:58:44 PM	H2 MFC set to  0.000000
7/26/2011	4:58:44 PM	BCl3 MFC set to  0.000000
7/26/2011	4:58:44 PM	PHl3 MFC set to  0.000000
7/26/2011	4:58:44 PM	SiCl4 MFC set to  0.000000
7/26/2011	4:58:44 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	4:58:44 PM	Tube furnace set to 200
7/26/2011	4:59:14 PM	H2 valve closed
7/26/2011	4:59:14 PM	BCl3 valve closed
7/26/2011	4:59:14 PM	PH3 valve closed
7/26/2011	4:59:14 PM	SiCl4 pre valve closed
7/26/2011	4:59:14 PM	SiCl4 post valve closed
7/26/2011	4:59:14 PM	Bypass valve closed
7/26/2011	4:59:14 PM	Bubbler valve closed
7/26/2011	4:59:14 PM	Helium valve opened
7/26/2011	4:59:14 PM	Main Vac valve opened
7/26/2011	4:59:14 PM	Helium MFC set to  20.000000
7/26/2011	4:59:14 PM	H2 MFC set to  0.000000
7/26/2011	4:59:14 PM	BCl3 MFC set to  0.000000
7/26/2011	4:59:14 PM	PHl3 MFC set to  0.000000
7/26/2011	4:59:14 PM	SiCl4 MFC set to  0.000000
7/26/2011	4:59:14 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	4:59:14 PM	Tube furnace set to 200
7/26/2011	4:59:44 PM	Helium valve closed
7/26/2011	4:59:44 PM	H2 valve closed
7/26/2011	4:59:44 PM	BCl3 valve closed
7/26/2011	4:59:44 PM	PH3 valve closed
7/26/2011	4:59:44 PM	SiCl4 pre valve closed
7/26/2011	4:59:44 PM	SiCl4 post valve closed
7/26/2011	4:59:44 PM	Bypass valve closed
7/26/2011	4:59:44 PM	Bubbler valve closed
7/26/2011	4:59:44 PM	Main Vac valve opened
7/26/2011	4:59:44 PM	Helium MFC set to  0.000000
7/26/2011	4:59:44 PM	H2 MFC set to  0.000000
7/26/2011	4:59:44 PM	BCl3 MFC set to  0.000000
7/26/2011	4:59:44 PM	PHl3 MFC set to  0.000000
7/26/2011	4:59:44 PM	SiCl4 MFC set to  0.000000
7/26/2011	4:59:44 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	4:59:44 PM	Tube furnace set to 200
7/26/2011	5:00:14 PM	H2 valve closed
7/26/2011	5:00:14 PM	BCl3 valve closed
7/26/2011	5:00:14 PM	PH3 valve closed
7/26/2011	5:00:14 PM	SiCl4 pre valve closed
7/26/2011	5:00:14 PM	SiCl4 post valve closed
7/26/2011	5:00:14 PM	Bypass valve closed
7/26/2011	5:00:14 PM	Bubbler valve closed
7/26/2011	5:00:14 PM	Helium valve opened
7/26/2011	5:00:14 PM	Main Vac valve opened
7/26/2011	5:00:14 PM	Helium MFC set to  20.000000
7/26/2011	5:00:14 PM	H2 MFC set to  0.000000
7/26/2011	5:00:14 PM	BCl3 MFC set to  0.000000
7/26/2011	5:00:14 PM	PHl3 MFC set to  0.000000
7/26/2011	5:00:14 PM	SiCl4 MFC set to  0.000000
7/26/2011	5:00:14 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	5:00:14 PM	Tube furnace set to 200
7/26/2011	5:00:44 PM	Helium valve closed
7/26/2011	5:00:44 PM	H2 valve closed
7/26/2011	5:00:44 PM	BCl3 valve closed
7/26/2011	5:00:44 PM	PH3 valve closed
7/26/2011	5:00:44 PM	SiCl4 pre valve closed
7/26/2011	5:00:44 PM	SiCl4 post valve closed
7/26/2011	5:00:44 PM	Bypass valve closed
7/26/2011	5:00:44 PM	Bubbler valve closed
7/26/2011	5:00:44 PM	Main Vac valve opened
7/26/2011	5:00:44 PM	Helium MFC set to  0.000000
7/26/2011	5:00:44 PM	H2 MFC set to  0.000000
7/26/2011	5:00:45 PM	BCl3 MFC set to  0.000000
7/26/2011	5:00:45 PM	PHl3 MFC set to  0.000000
7/26/2011	5:00:45 PM	SiCl4 MFC set to  0.000000
7/26/2011	5:00:45 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	5:00:45 PM	Tube furnace set to 200
7/26/2011	5:01:15 PM	H2 valve closed
7/26/2011	5:01:15 PM	BCl3 valve closed
7/26/2011	5:01:15 PM	PH3 valve closed
7/26/2011	5:01:15 PM	SiCl4 pre valve closed
7/26/2011	5:01:15 PM	SiCl4 post valve closed
7/26/2011	5:01:15 PM	Bypass valve closed
7/26/2011	5:01:15 PM	Bubbler valve closed
7/26/2011	5:01:15 PM	Helium valve opened
7/26/2011	5:01:15 PM	Main Vac valve opened
7/26/2011	5:01:15 PM	Helium MFC set to  20.000000
7/26/2011	5:01:15 PM	H2 MFC set to  0.000000
7/26/2011	5:01:15 PM	BCl3 MFC set to  0.000000
7/26/2011	5:01:15 PM	PHl3 MFC set to  0.000000
7/26/2011	5:01:15 PM	SiCl4 MFC set to  0.000000
7/26/2011	5:01:15 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	5:01:15 PM	Tube furnace set to 200
7/26/2011	5:01:45 PM	Helium valve closed
7/26/2011	5:01:45 PM	H2 valve closed
7/26/2011	5:01:45 PM	BCl3 valve closed
7/26/2011	5:01:45 PM	PH3 valve closed
7/26/2011	5:01:45 PM	SiCl4 pre valve closed
7/26/2011	5:01:45 PM	SiCl4 post valve closed
7/26/2011	5:01:45 PM	Bypass valve closed
7/26/2011	5:01:45 PM	Bubbler valve closed
7/26/2011	5:01:45 PM	Main Vac valve opened
7/26/2011	5:01:45 PM	Helium MFC set to  0.000000
7/26/2011	5:01:45 PM	H2 MFC set to  0.000000
7/26/2011	5:01:45 PM	BCl3 MFC set to  0.000000
7/26/2011	5:01:45 PM	PHl3 MFC set to  0.000000
7/26/2011	5:01:45 PM	SiCl4 MFC set to  0.000000
7/26/2011	5:01:45 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	5:01:45 PM	Tube furnace set to 200
7/26/2011	5:02:15 PM	H2 valve closed
7/26/2011	5:02:15 PM	BCl3 valve closed
7/26/2011	5:02:15 PM	PH3 valve closed
7/26/2011	5:02:15 PM	SiCl4 pre valve closed
7/26/2011	5:02:15 PM	SiCl4 post valve closed
7/26/2011	5:02:15 PM	Bypass valve closed
7/26/2011	5:02:15 PM	Bubbler valve closed
7/26/2011	5:02:15 PM	Helium valve opened
7/26/2011	5:02:15 PM	Main Vac valve opened
7/26/2011	5:02:15 PM	Helium MFC set to  20.000000
7/26/2011	5:02:15 PM	H2 MFC set to  0.000000
7/26/2011	5:02:15 PM	BCl3 MFC set to  0.000000
7/26/2011	5:02:15 PM	PHl3 MFC set to  0.000000
7/26/2011	5:02:15 PM	SiCl4 MFC set to  0.000000
7/26/2011	5:02:15 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	5:02:15 PM	Tube furnace set to 200
7/26/2011	5:02:45 PM	Helium valve closed
7/26/2011	5:02:45 PM	H2 valve closed
7/26/2011	5:02:45 PM	BCl3 valve closed
7/26/2011	5:02:45 PM	PH3 valve closed
7/26/2011	5:02:45 PM	SiCl4 pre valve closed
7/26/2011	5:02:45 PM	SiCl4 post valve closed
7/26/2011	5:02:45 PM	Bypass valve closed
7/26/2011	5:02:45 PM	Bubbler valve closed
7/26/2011	5:02:45 PM	Main Vac valve opened
7/26/2011	5:02:45 PM	Helium MFC set to  0.000000
7/26/2011	5:02:45 PM	H2 MFC set to  0.000000
7/26/2011	5:02:45 PM	BCl3 MFC set to  0.000000
7/26/2011	5:02:45 PM	PHl3 MFC set to  0.000000
7/26/2011	5:02:45 PM	SiCl4 MFC set to  0.000000
7/26/2011	5:02:45 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	5:02:45 PM	Tube furnace set to 200
7/26/2011	5:03:15 PM	H2 valve closed
7/26/2011	5:03:15 PM	BCl3 valve closed
7/26/2011	5:03:15 PM	PH3 valve closed
7/26/2011	5:03:15 PM	SiCl4 pre valve closed
7/26/2011	5:03:15 PM	SiCl4 post valve closed
7/26/2011	5:03:15 PM	Bypass valve closed
7/26/2011	5:03:15 PM	Bubbler valve closed
7/26/2011	5:03:15 PM	Helium valve opened
7/26/2011	5:03:15 PM	Main Vac valve opened
7/26/2011	5:03:15 PM	Helium MFC set to  20.000000
7/26/2011	5:03:15 PM	H2 MFC set to  0.000000
7/26/2011	5:03:16 PM	BCl3 MFC set to  0.000000
7/26/2011	5:03:16 PM	PHl3 MFC set to  0.000000
7/26/2011	5:03:16 PM	SiCl4 MFC set to  0.000000
7/26/2011	5:03:16 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	5:03:16 PM	Tube furnace set to 200
7/26/2011	5:03:46 PM	Helium valve closed
7/26/2011	5:03:46 PM	H2 valve closed
7/26/2011	5:03:46 PM	BCl3 valve closed
7/26/2011	5:03:46 PM	PH3 valve closed
7/26/2011	5:03:46 PM	SiCl4 pre valve closed
7/26/2011	5:03:46 PM	SiCl4 post valve closed
7/26/2011	5:03:46 PM	Bypass valve closed
7/26/2011	5:03:46 PM	Bubbler valve closed
7/26/2011	5:03:46 PM	Main Vac valve opened
7/26/2011	5:03:46 PM	Helium MFC set to  0.000000
7/26/2011	5:03:46 PM	H2 MFC set to  0.000000
7/26/2011	5:03:46 PM	BCl3 MFC set to  0.000000
7/26/2011	5:03:46 PM	PHl3 MFC set to  0.000000
7/26/2011	5:03:46 PM	SiCl4 MFC set to  0.000000
7/26/2011	5:03:46 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	5:03:46 PM	Tube furnace set to 200
7/26/2011	5:04:16 PM	H2 valve closed
7/26/2011	5:04:16 PM	BCl3 valve closed
7/26/2011	5:04:16 PM	PH3 valve closed
7/26/2011	5:04:16 PM	SiCl4 pre valve closed
7/26/2011	5:04:16 PM	SiCl4 post valve closed
7/26/2011	5:04:16 PM	Bypass valve closed
7/26/2011	5:04:16 PM	Bubbler valve closed
7/26/2011	5:04:16 PM	Helium valve opened
7/26/2011	5:04:16 PM	Main Vac valve opened
7/26/2011	5:04:16 PM	Helium MFC set to  20.000000
7/26/2011	5:04:16 PM	H2 MFC set to  0.000000
7/26/2011	5:04:16 PM	BCl3 MFC set to  0.000000
7/26/2011	5:04:16 PM	PHl3 MFC set to  0.000000
7/26/2011	5:04:16 PM	SiCl4 MFC set to  0.000000
7/26/2011	5:04:16 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	5:04:16 PM	Tube furnace set to 200
7/26/2011	5:04:46 PM	Helium valve closed
7/26/2011	5:04:46 PM	H2 valve closed
7/26/2011	5:04:46 PM	BCl3 valve closed
7/26/2011	5:04:46 PM	PH3 valve closed
7/26/2011	5:04:46 PM	SiCl4 pre valve closed
7/26/2011	5:04:46 PM	SiCl4 post valve closed
7/26/2011	5:04:46 PM	Bypass valve closed
7/26/2011	5:04:46 PM	Bubbler valve closed
7/26/2011	5:04:46 PM	Main Vac valve opened
7/26/2011	5:04:46 PM	Helium MFC set to  0.000000
7/26/2011	5:04:46 PM	H2 MFC set to  0.000000
7/26/2011	5:04:46 PM	BCl3 MFC set to  0.000000
7/26/2011	5:04:46 PM	PHl3 MFC set to  0.000000
7/26/2011	5:04:46 PM	SiCl4 MFC set to  0.000000
7/26/2011	5:04:46 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	5:04:46 PM	Tube furnace set to 0
7/26/2011	5:04:47 PM	Run finished at 5:04 PM
7/26/2011	5:08:17 PM	Main Vac valve closed
7/26/2011	5:08:24 PM	Main Vac valve opened
7/26/2011	5:14:43 PM	Main Vac valve closed
7/26/2011	5:14:50 PM	Main Vac valve opened
7/26/2011	5:15:12 PM	Main Vac valve closed
7/26/2011	5:15:25 PM	Main Vac valve opened
7/26/2011	5:16:18 PM	Recipe started at 5:16 PM
7/26/2011	5:16:18 PM	Helium valve closed
7/26/2011	5:16:18 PM	H2 valve closed
7/26/2011	5:16:18 PM	BCl3 valve closed
7/26/2011	5:16:18 PM	PH3 valve closed
7/26/2011	5:16:18 PM	SiCl4 pre valve closed
7/26/2011	5:16:18 PM	SiCl4 post valve closed
7/26/2011	5:16:18 PM	Main Vac valve closed
7/26/2011	5:16:18 PM	Bypass valve closed
7/26/2011	5:16:18 PM	Bubbler valve closed
7/26/2011	5:16:18 PM	Helium MFC set to  0.000000
7/26/2011	5:16:18 PM	H2 MFC set to  0.000000
7/26/2011	5:16:18 PM	BCl3 MFC set to  0.000000
7/26/2011	5:16:18 PM	PHl3 MFC set to  0.000000
7/26/2011	5:16:18 PM	SiCl4 MFC set to  0.000000
7/26/2011	5:16:18 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	5:16:18 PM	Tube furnace set to 0
7/26/2011	5:16:21 PM	Helium valve closed
7/26/2011	5:16:22 PM	BCl3 valve closed
7/26/2011	5:16:22 PM	PH3 valve closed
7/26/2011	5:16:22 PM	SiCl4 pre valve closed
7/26/2011	5:16:22 PM	SiCl4 post valve closed
7/26/2011	5:16:22 PM	Main Vac valve closed
7/26/2011	5:16:22 PM	Bypass valve closed
7/26/2011	5:16:22 PM	Bubbler valve closed
7/26/2011	5:16:22 PM	H2 valve opened
7/26/2011	5:16:22 PM	Helium MFC set to  0.000000
7/26/2011	5:16:22 PM	H2 MFC set to  500.000000
7/26/2011	5:16:22 PM	BCl3 MFC set to  0.000000
7/26/2011	5:16:22 PM	PHl3 MFC set to  0.000000
7/26/2011	5:16:22 PM	SiCl4 MFC set to  0.000000
7/26/2011	5:16:22 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	5:16:22 PM	Tube furnace set to 0
7/26/2011	5:17:25 PM	Helium valve closed
7/26/2011	5:17:25 PM	BCl3 valve closed
7/26/2011	5:17:25 PM	PH3 valve closed
7/26/2011	5:17:25 PM	SiCl4 pre valve closed
7/26/2011	5:17:25 PM	SiCl4 post valve closed
7/26/2011	5:17:25 PM	Main Vac valve closed
7/26/2011	5:17:25 PM	Bypass valve closed
7/26/2011	5:17:25 PM	H2 valve opened
7/26/2011	5:17:25 PM	Bubbler valve opened
7/26/2011	5:17:25 PM	Helium MFC set to  0.000000
7/26/2011	5:17:25 PM	H2 MFC set to  500.000000
7/26/2011	5:17:25 PM	BCl3 MFC set to  0.000000
7/26/2011	5:17:25 PM	PHl3 MFC set to  0.000000
7/26/2011	5:17:25 PM	SiCl4 MFC set to  0.000000
7/26/2011	5:17:25 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	5:17:25 PM	Tube furnace set to 0
7/26/2011	5:17:26 PM	Helium valve closed
7/26/2011	5:17:26 PM	BCl3 valve closed
7/26/2011	5:17:26 PM	PH3 valve closed
7/26/2011	5:17:26 PM	SiCl4 pre valve closed
7/26/2011	5:17:26 PM	SiCl4 post valve closed
7/26/2011	5:17:26 PM	Main Vac valve closed
7/26/2011	5:17:26 PM	Bypass valve closed
7/26/2011	5:17:26 PM	H2 valve opened
7/26/2011	5:17:26 PM	Bubbler valve opened
7/26/2011	5:17:26 PM	Helium MFC set to  0.000000
7/26/2011	5:17:26 PM	H2 MFC set to  500.000000
7/26/2011	5:17:26 PM	BCl3 MFC set to  0.000000
7/26/2011	5:17:26 PM	PHl3 MFC set to  0.000000
7/26/2011	5:17:26 PM	SiCl4 MFC set to  0.000000
7/26/2011	5:17:26 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	5:17:26 PM	Tube furnace set to 1000
7/26/2011	5:37:26 PM	Helium valve closed
7/26/2011	5:37:26 PM	BCl3 valve closed
7/26/2011	5:37:26 PM	Main Vac valve closed
7/26/2011	5:37:26 PM	Bypass valve closed
7/26/2011	5:37:26 PM	H2 valve opened
7/26/2011	5:37:26 PM	PH3 valve opened
7/26/2011	5:37:26 PM	SiCl4 pre valve opened
7/26/2011	5:37:26 PM	SiCl4 post valve opened
7/26/2011	5:37:26 PM	Bubbler valve opened
7/26/2011	5:37:26 PM	Helium MFC set to  0.000000
7/26/2011	5:37:26 PM	H2 MFC set to  500.000000
7/26/2011	5:37:26 PM	BCl3 MFC set to  0.000000
7/26/2011	5:37:26 PM	PHl3 MFC set to  1.600000
7/26/2011	5:37:26 PM	SiCl4 MFC set to  50.000000
7/26/2011	5:37:26 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	5:37:26 PM	Tube furnace set to 1000
7/26/2011	5:53:26 PM	Helium valve closed
7/26/2011	5:53:26 PM	BCl3 valve closed
7/26/2011	5:53:26 PM	PH3 valve closed
7/26/2011	5:53:26 PM	SiCl4 pre valve closed
7/26/2011	5:53:26 PM	SiCl4 post valve closed
7/26/2011	5:53:26 PM	Main Vac valve closed
7/26/2011	5:53:26 PM	Bypass valve closed
7/26/2011	5:53:26 PM	H2 valve opened
7/26/2011	5:53:26 PM	Bubbler valve opened
7/26/2011	5:53:26 PM	Helium MFC set to  0.000000
7/26/2011	5:53:26 PM	H2 MFC set to  500.000000
7/26/2011	5:53:26 PM	BCl3 MFC set to  0.000000
7/26/2011	5:53:26 PM	PHl3 MFC set to  0.000000
7/26/2011	5:53:26 PM	SiCl4 MFC set to  0.000000
7/26/2011	5:53:26 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	5:53:26 PM	Tube furnace set to 950
7/26/2011	5:55:27 PM	Helium valve closed
7/26/2011	5:55:27 PM	BCl3 valve closed
7/26/2011	5:55:27 PM	PH3 valve closed
7/26/2011	5:55:27 PM	SiCl4 pre valve closed
7/26/2011	5:55:27 PM	SiCl4 post valve closed
7/26/2011	5:55:27 PM	Main Vac valve closed
7/26/2011	5:55:27 PM	Bypass valve closed
7/26/2011	5:55:27 PM	H2 valve opened
7/26/2011	5:55:27 PM	Bubbler valve opened
7/26/2011	5:55:27 PM	Helium MFC set to  0.000000
7/26/2011	5:55:27 PM	H2 MFC set to  500.000000
7/26/2011	5:55:27 PM	BCl3 MFC set to  0.000000
7/26/2011	5:55:27 PM	PHl3 MFC set to  0.000000
7/26/2011	5:55:27 PM	SiCl4 MFC set to  0.000000
7/26/2011	5:55:27 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	5:55:27 PM	Tube furnace set to 900
7/26/2011	5:57:27 PM	Helium valve closed
7/26/2011	5:57:27 PM	BCl3 valve closed
7/26/2011	5:57:27 PM	PH3 valve closed
7/26/2011	5:57:27 PM	SiCl4 pre valve closed
7/26/2011	5:57:27 PM	SiCl4 post valve closed
7/26/2011	5:57:27 PM	Main Vac valve closed
7/26/2011	5:57:27 PM	Bypass valve closed
7/26/2011	5:57:27 PM	H2 valve opened
7/26/2011	5:57:27 PM	Bubbler valve opened
7/26/2011	5:57:27 PM	Helium MFC set to  0.000000
7/26/2011	5:57:27 PM	H2 MFC set to  500.000000
7/26/2011	5:57:27 PM	BCl3 MFC set to  0.000000
7/26/2011	5:57:27 PM	PHl3 MFC set to  0.000000
7/26/2011	5:57:27 PM	SiCl4 MFC set to  0.000000
7/26/2011	5:57:27 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	5:57:27 PM	Tube furnace set to 850
7/26/2011	5:59:27 PM	H2 valve closed
7/26/2011	5:59:27 PM	BCl3 valve closed
7/26/2011	5:59:27 PM	PH3 valve closed
7/26/2011	5:59:27 PM	SiCl4 pre valve closed
7/26/2011	5:59:27 PM	SiCl4 post valve closed
7/26/2011	5:59:27 PM	Main Vac valve closed
7/26/2011	5:59:27 PM	Bypass valve closed
7/26/2011	5:59:27 PM	Helium valve opened
7/26/2011	5:59:27 PM	Bubbler valve opened
7/26/2011	5:59:27 PM	Helium MFC set to  500.000000
7/26/2011	5:59:27 PM	H2 MFC set to  0.000000
7/26/2011	5:59:27 PM	BCl3 MFC set to  0.000000
7/26/2011	5:59:27 PM	PHl3 MFC set to  0.000000
7/26/2011	5:59:27 PM	SiCl4 MFC set to  0.000000
7/26/2011	5:59:27 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	5:59:27 PM	Tube furnace set to 800
7/26/2011	6:01:27 PM	H2 valve closed
7/26/2011	6:01:27 PM	BCl3 valve closed
7/26/2011	6:01:27 PM	PH3 valve closed
7/26/2011	6:01:27 PM	SiCl4 pre valve closed
7/26/2011	6:01:27 PM	SiCl4 post valve closed
7/26/2011	6:01:27 PM	Main Vac valve closed
7/26/2011	6:01:27 PM	Bypass valve closed
7/26/2011	6:01:27 PM	Helium valve opened
7/26/2011	6:01:27 PM	Bubbler valve opened
7/26/2011	6:01:27 PM	Helium MFC set to  500.000000
7/26/2011	6:01:27 PM	H2 MFC set to  0.000000
7/26/2011	6:01:27 PM	BCl3 MFC set to  0.000000
7/26/2011	6:01:27 PM	PHl3 MFC set to  0.000000
7/26/2011	6:01:27 PM	SiCl4 MFC set to  0.000000
7/26/2011	6:01:27 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	6:01:27 PM	Tube furnace set to 750
7/26/2011	6:03:27 PM	H2 valve closed
7/26/2011	6:03:27 PM	BCl3 valve closed
7/26/2011	6:03:27 PM	PH3 valve closed
7/26/2011	6:03:27 PM	SiCl4 pre valve closed
7/26/2011	6:03:27 PM	SiCl4 post valve closed
7/26/2011	6:03:27 PM	Main Vac valve closed
7/26/2011	6:03:27 PM	Bypass valve closed
7/26/2011	6:03:27 PM	Helium valve opened
7/26/2011	6:03:27 PM	Bubbler valve opened
7/26/2011	6:03:27 PM	Helium MFC set to  500.000000
7/26/2011	6:03:27 PM	H2 MFC set to  0.000000
7/26/2011	6:03:27 PM	BCl3 MFC set to  0.000000
7/26/2011	6:03:27 PM	PHl3 MFC set to  0.000000
7/26/2011	6:03:27 PM	SiCl4 MFC set to  0.000000
7/26/2011	6:03:27 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	6:03:27 PM	Tube furnace set to 0
7/26/2011	6:23:27 PM	Helium valve closed
7/26/2011	6:23:27 PM	H2 valve closed
7/26/2011	6:23:27 PM	BCl3 valve closed
7/26/2011	6:23:27 PM	PH3 valve closed
7/26/2011	6:23:27 PM	SiCl4 pre valve closed
7/26/2011	6:23:27 PM	SiCl4 post valve closed
7/26/2011	6:23:27 PM	Main Vac valve closed
7/26/2011	6:23:27 PM	Bypass valve closed
7/26/2011	6:23:27 PM	Bubbler valve closed
7/26/2011	6:23:27 PM	Helium MFC set to  0.000000
7/26/2011	6:23:27 PM	H2 MFC set to  0.000000
7/26/2011	6:23:27 PM	BCl3 MFC set to  0.000000
7/26/2011	6:23:27 PM	PHl3 MFC set to  0.000000
7/26/2011	6:23:27 PM	SiCl4 MFC set to  0.000000
7/26/2011	6:23:27 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	6:23:28 PM	Tube furnace set to 0
7/26/2011	6:23:29 PM	Run finished at 6:23 PM
7/26/2011	6:27:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/26/2011	6:27:59 PM	Recipe started at 6:27 PM
7/26/2011	6:27:59 PM	Helium valve closed
7/26/2011	6:27:59 PM	H2 valve closed
7/26/2011	6:27:59 PM	BCl3 valve closed
7/26/2011	6:27:59 PM	PH3 valve closed
7/26/2011	6:27:59 PM	SiCl4 pre valve closed
7/26/2011	6:27:59 PM	SiCl4 post valve closed
7/26/2011	6:27:59 PM	Main Vac valve closed
7/26/2011	6:27:59 PM	Bypass valve closed
7/26/2011	6:27:59 PM	Bubbler valve closed
7/26/2011	6:27:59 PM	Helium MFC set to  0.000000
7/26/2011	6:27:59 PM	H2 MFC set to  0.000000
7/26/2011	6:27:59 PM	BCl3 MFC set to  0.000000
7/26/2011	6:27:59 PM	PHl3 MFC set to  0.000000
7/26/2011	6:27:59 PM	SiCl4 MFC set to  0.000000
7/26/2011	6:27:59 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	6:27:59 PM	Tube furnace set to 0
7/26/2011	6:28:02 PM	H2 valve closed
7/26/2011	6:28:02 PM	BCl3 valve closed
7/26/2011	6:28:02 PM	PH3 valve closed
7/26/2011	6:28:02 PM	SiCl4 pre valve closed
7/26/2011	6:28:02 PM	SiCl4 post valve closed
7/26/2011	6:28:02 PM	Main Vac valve closed
7/26/2011	6:28:02 PM	Bypass valve closed
7/26/2011	6:28:02 PM	Bubbler valve closed
7/26/2011	6:28:02 PM	Helium valve opened
7/26/2011	6:28:02 PM	Helium MFC set to  500.000000
7/26/2011	6:28:02 PM	H2 MFC set to  0.000000
7/26/2011	6:28:02 PM	BCl3 MFC set to  0.000000
7/26/2011	6:28:02 PM	PHl3 MFC set to  0.000000
7/26/2011	6:28:02 PM	SiCl4 MFC set to  0.000000
7/26/2011	6:28:02 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	6:28:02 PM	Tube furnace set to 0
7/26/2011	6:28:03 PM	Helium valve closed
7/26/2011	6:28:03 PM	H2 valve closed
7/26/2011	6:28:03 PM	BCl3 valve closed
7/26/2011	6:28:03 PM	PH3 valve closed
7/26/2011	6:28:03 PM	SiCl4 pre valve closed
7/26/2011	6:28:03 PM	SiCl4 post valve closed
7/26/2011	6:28:03 PM	Main Vac valve closed
7/26/2011	6:28:03 PM	Bypass valve closed
7/26/2011	6:28:03 PM	Bubbler valve closed
7/26/2011	6:28:03 PM	Helium MFC set to  0.000000
7/26/2011	6:28:03 PM	H2 MFC set to  0.000000
7/26/2011	6:28:03 PM	BCl3 MFC set to  0.000000
7/26/2011	6:28:03 PM	PHl3 MFC set to  0.000000
7/26/2011	6:28:03 PM	SiCl4 MFC set to  0.000000
7/26/2011	6:28:03 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	6:28:03 PM	Tube furnace set to 0
7/26/2011	6:28:04 PM	Run finished at 6:28 PM
7/26/2011	6:28:04 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/26/2011	6:31:23 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/26/2011	6:31:24 PM	Recipe started at 6:31 PM
7/26/2011	6:31:24 PM	Helium valve closed
7/26/2011	6:31:24 PM	H2 valve closed
7/26/2011	6:31:24 PM	BCl3 valve closed
7/26/2011	6:31:24 PM	PH3 valve closed
7/26/2011	6:31:24 PM	SiCl4 pre valve closed
7/26/2011	6:31:24 PM	SiCl4 post valve closed
7/26/2011	6:31:24 PM	Main Vac valve closed
7/26/2011	6:31:24 PM	Bubbler valve closed
7/26/2011	6:31:24 PM	Bypass valve opened
7/26/2011	6:31:24 PM	Helium MFC set to  0.000000
7/26/2011	6:31:24 PM	H2 MFC set to  0.000000
7/26/2011	6:31:24 PM	BCl3 MFC set to  0.000000
7/26/2011	6:31:24 PM	PHl3 MFC set to  0.000000
7/26/2011	6:31:24 PM	SiCl4 MFC set to  0.000000
7/26/2011	6:31:24 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	6:31:25 PM	Tube furnace set to 0
7/26/2011	6:32:27 PM	Helium valve closed
7/26/2011	6:32:27 PM	H2 valve closed
7/26/2011	6:32:27 PM	BCl3 valve closed
7/26/2011	6:32:27 PM	PH3 valve closed
7/26/2011	6:32:27 PM	SiCl4 pre valve closed
7/26/2011	6:32:27 PM	SiCl4 post valve closed
7/26/2011	6:32:27 PM	Main Vac valve closed
7/26/2011	6:32:27 PM	Bubbler valve closed
7/26/2011	6:32:27 PM	Bypass valve opened
7/26/2011	6:32:27 PM	Helium MFC set to  0.000000
7/26/2011	6:32:27 PM	H2 MFC set to  0.000000
7/26/2011	6:32:27 PM	BCl3 MFC set to  0.000000
7/26/2011	6:32:27 PM	PHl3 MFC set to  0.000000
7/26/2011	6:32:27 PM	SiCl4 MFC set to  0.000000
7/26/2011	6:32:27 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	6:32:27 PM	Tube furnace set to 0
7/26/2011	6:33:27 PM	Helium valve closed
7/26/2011	6:33:27 PM	H2 valve closed
7/26/2011	6:33:27 PM	BCl3 valve closed
7/26/2011	6:33:27 PM	PH3 valve closed
7/26/2011	6:33:27 PM	SiCl4 pre valve closed
7/26/2011	6:33:27 PM	SiCl4 post valve closed
7/26/2011	6:33:27 PM	Bypass valve closed
7/26/2011	6:33:27 PM	Bubbler valve closed
7/26/2011	6:33:27 PM	Main Vac valve opened
7/26/2011	6:33:27 PM	Helium MFC set to  0.000000
7/26/2011	6:33:27 PM	H2 MFC set to  0.000000
7/26/2011	6:33:27 PM	BCl3 MFC set to  0.000000
7/26/2011	6:33:27 PM	PHl3 MFC set to  0.000000
7/26/2011	6:33:27 PM	SiCl4 MFC set to  0.000000
7/26/2011	6:33:27 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	6:33:27 PM	Tube furnace set to 0
7/26/2011	6:33:28 PM	Run finished at 6:33 PM
7/26/2011	6:33:28 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/26/2011	6:47:17 PM	Recipe started at 6:47 PM
7/26/2011	6:47:17 PM	Helium valve closed
7/26/2011	6:47:17 PM	H2 valve closed
7/26/2011	6:47:17 PM	BCl3 valve closed
7/26/2011	6:47:17 PM	PH3 valve closed
7/26/2011	6:47:17 PM	SiCl4 pre valve closed
7/26/2011	6:47:17 PM	SiCl4 post valve closed
7/26/2011	6:47:17 PM	Bypass valve closed
7/26/2011	6:47:17 PM	Bubbler valve closed
7/26/2011	6:47:17 PM	Main Vac valve opened
7/26/2011	6:47:17 PM	Helium MFC set to  0.000000
7/26/2011	6:47:17 PM	H2 MFC set to  0.000000
7/26/2011	6:47:17 PM	BCl3 MFC set to  0.000000
7/26/2011	6:47:17 PM	PHl3 MFC set to  0.000000
7/26/2011	6:47:17 PM	SiCl4 MFC set to  0.000000
7/26/2011	6:47:17 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	6:47:17 PM	Tube furnace set to 0
7/26/2011	6:47:47 PM	H2 valve closed
7/26/2011	6:47:47 PM	BCl3 valve closed
7/26/2011	6:47:47 PM	PH3 valve closed
7/26/2011	6:47:47 PM	SiCl4 pre valve closed
7/26/2011	6:47:47 PM	SiCl4 post valve closed
7/26/2011	6:47:47 PM	Bypass valve closed
7/26/2011	6:47:47 PM	Bubbler valve closed
7/26/2011	6:47:47 PM	Helium valve opened
7/26/2011	6:47:47 PM	Main Vac valve opened
7/26/2011	6:47:47 PM	Helium MFC set to  20.000000
7/26/2011	6:47:47 PM	H2 MFC set to  0.000000
7/26/2011	6:47:47 PM	BCl3 MFC set to  0.000000
7/26/2011	6:47:47 PM	PHl3 MFC set to  0.000000
7/26/2011	6:47:47 PM	SiCl4 MFC set to  0.000000
7/26/2011	6:47:47 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	6:47:47 PM	Tube furnace set to 0
7/26/2011	6:48:17 PM	Helium valve closed
7/26/2011	6:48:17 PM	H2 valve closed
7/26/2011	6:48:17 PM	BCl3 valve closed
7/26/2011	6:48:17 PM	PH3 valve closed
7/26/2011	6:48:17 PM	SiCl4 pre valve closed
7/26/2011	6:48:17 PM	SiCl4 post valve closed
7/26/2011	6:48:17 PM	Bypass valve closed
7/26/2011	6:48:17 PM	Bubbler valve closed
7/26/2011	6:48:17 PM	Main Vac valve opened
7/26/2011	6:48:17 PM	Helium MFC set to  0.000000
7/26/2011	6:48:17 PM	H2 MFC set to  0.000000
7/26/2011	6:48:17 PM	BCl3 MFC set to  0.000000
7/26/2011	6:48:17 PM	PHl3 MFC set to  0.000000
7/26/2011	6:48:17 PM	SiCl4 MFC set to  0.000000
7/26/2011	6:48:17 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	6:48:18 PM	Tube furnace set to 0
7/26/2011	6:48:48 PM	H2 valve closed
7/26/2011	6:48:48 PM	BCl3 valve closed
7/26/2011	6:48:48 PM	PH3 valve closed
7/26/2011	6:48:48 PM	SiCl4 pre valve closed
7/26/2011	6:48:48 PM	SiCl4 post valve closed
7/26/2011	6:48:48 PM	Bypass valve closed
7/26/2011	6:48:48 PM	Bubbler valve closed
7/26/2011	6:48:48 PM	Helium valve opened
7/26/2011	6:48:48 PM	Main Vac valve opened
7/26/2011	6:48:48 PM	Helium MFC set to  20.000000
7/26/2011	6:48:48 PM	H2 MFC set to  0.000000
7/26/2011	6:48:48 PM	BCl3 MFC set to  0.000000
7/26/2011	6:48:48 PM	PHl3 MFC set to  0.000000
7/26/2011	6:48:48 PM	SiCl4 MFC set to  0.000000
7/26/2011	6:48:48 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	6:48:48 PM	Tube furnace set to 0
7/26/2011	6:49:18 PM	Helium valve closed
7/26/2011	6:49:18 PM	H2 valve closed
7/26/2011	6:49:18 PM	BCl3 valve closed
7/26/2011	6:49:18 PM	PH3 valve closed
7/26/2011	6:49:18 PM	SiCl4 pre valve closed
7/26/2011	6:49:18 PM	SiCl4 post valve closed
7/26/2011	6:49:18 PM	Bypass valve closed
7/26/2011	6:49:18 PM	Bubbler valve closed
7/26/2011	6:49:18 PM	Main Vac valve opened
7/26/2011	6:49:18 PM	Helium MFC set to  0.000000
7/26/2011	6:49:18 PM	H2 MFC set to  0.000000
7/26/2011	6:49:18 PM	BCl3 MFC set to  0.000000
7/26/2011	6:49:18 PM	PHl3 MFC set to  0.000000
7/26/2011	6:49:18 PM	SiCl4 MFC set to  0.000000
7/26/2011	6:49:18 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	6:49:18 PM	Tube furnace set to 0
7/26/2011	6:49:48 PM	H2 valve closed
7/26/2011	6:49:48 PM	BCl3 valve closed
7/26/2011	6:49:48 PM	PH3 valve closed
7/26/2011	6:49:48 PM	SiCl4 pre valve closed
7/26/2011	6:49:48 PM	SiCl4 post valve closed
7/26/2011	6:49:48 PM	Bypass valve closed
7/26/2011	6:49:48 PM	Bubbler valve closed
7/26/2011	6:49:48 PM	Helium valve opened
7/26/2011	6:49:48 PM	Main Vac valve opened
7/26/2011	6:49:48 PM	Helium MFC set to  20.000000
7/26/2011	6:49:48 PM	H2 MFC set to  0.000000
7/26/2011	6:49:48 PM	BCl3 MFC set to  0.000000
7/26/2011	6:49:48 PM	PHl3 MFC set to  0.000000
7/26/2011	6:49:48 PM	SiCl4 MFC set to  0.000000
7/26/2011	6:49:48 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	6:49:48 PM	Tube furnace set to 0
7/26/2011	6:50:18 PM	Helium valve closed
7/26/2011	6:50:18 PM	H2 valve closed
7/26/2011	6:50:18 PM	BCl3 valve closed
7/26/2011	6:50:18 PM	PH3 valve closed
7/26/2011	6:50:18 PM	SiCl4 pre valve closed
7/26/2011	6:50:18 PM	SiCl4 post valve closed
7/26/2011	6:50:18 PM	Bypass valve closed
7/26/2011	6:50:18 PM	Bubbler valve closed
7/26/2011	6:50:18 PM	Main Vac valve opened
7/26/2011	6:50:18 PM	Helium MFC set to  0.000000
7/26/2011	6:50:18 PM	H2 MFC set to  0.000000
7/26/2011	6:50:18 PM	BCl3 MFC set to  0.000000
7/26/2011	6:50:18 PM	PHl3 MFC set to  0.000000
7/26/2011	6:50:18 PM	SiCl4 MFC set to  0.000000
7/26/2011	6:50:18 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	6:50:18 PM	Tube furnace set to 0
7/26/2011	6:50:48 PM	H2 valve closed
7/26/2011	6:50:48 PM	BCl3 valve closed
7/26/2011	6:50:48 PM	PH3 valve closed
7/26/2011	6:50:48 PM	SiCl4 pre valve closed
7/26/2011	6:50:48 PM	SiCl4 post valve closed
7/26/2011	6:50:48 PM	Bypass valve closed
7/26/2011	6:50:48 PM	Bubbler valve closed
7/26/2011	6:50:48 PM	Helium valve opened
7/26/2011	6:50:48 PM	Main Vac valve opened
7/26/2011	6:50:48 PM	Helium MFC set to  20.000000
7/26/2011	6:50:48 PM	H2 MFC set to  0.000000
7/26/2011	6:50:48 PM	BCl3 MFC set to  0.000000
7/26/2011	6:50:48 PM	PHl3 MFC set to  0.000000
7/26/2011	6:50:48 PM	SiCl4 MFC set to  0.000000
7/26/2011	6:50:48 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	6:50:49 PM	Tube furnace set to 0
7/26/2011	6:51:19 PM	Helium valve closed
7/26/2011	6:51:19 PM	H2 valve closed
7/26/2011	6:51:19 PM	BCl3 valve closed
7/26/2011	6:51:19 PM	PH3 valve closed
7/26/2011	6:51:19 PM	SiCl4 pre valve closed
7/26/2011	6:51:19 PM	SiCl4 post valve closed
7/26/2011	6:51:19 PM	Bypass valve closed
7/26/2011	6:51:19 PM	Bubbler valve closed
7/26/2011	6:51:19 PM	Main Vac valve opened
7/26/2011	6:51:19 PM	Helium MFC set to  0.000000
7/26/2011	6:51:19 PM	H2 MFC set to  0.000000
7/26/2011	6:51:19 PM	BCl3 MFC set to  0.000000
7/26/2011	6:51:19 PM	PHl3 MFC set to  0.000000
7/26/2011	6:51:19 PM	SiCl4 MFC set to  0.000000
7/26/2011	6:51:19 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	6:51:19 PM	Tube furnace set to 0
7/26/2011	6:51:49 PM	H2 valve closed
7/26/2011	6:51:49 PM	BCl3 valve closed
7/26/2011	6:51:49 PM	PH3 valve closed
7/26/2011	6:51:49 PM	SiCl4 pre valve closed
7/26/2011	6:51:49 PM	SiCl4 post valve closed
7/26/2011	6:51:49 PM	Bypass valve closed
7/26/2011	6:51:49 PM	Bubbler valve closed
7/26/2011	6:51:49 PM	Helium valve opened
7/26/2011	6:51:49 PM	Main Vac valve opened
7/26/2011	6:51:49 PM	Helium MFC set to  20.000000
7/26/2011	6:51:49 PM	H2 MFC set to  0.000000
7/26/2011	6:51:49 PM	BCl3 MFC set to  0.000000
7/26/2011	6:51:49 PM	PHl3 MFC set to  0.000000
7/26/2011	6:51:49 PM	SiCl4 MFC set to  0.000000
7/26/2011	6:51:49 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	6:51:49 PM	Tube furnace set to 0
7/26/2011	6:52:19 PM	Helium valve closed
7/26/2011	6:52:19 PM	H2 valve closed
7/26/2011	6:52:19 PM	BCl3 valve closed
7/26/2011	6:52:19 PM	PH3 valve closed
7/26/2011	6:52:19 PM	SiCl4 pre valve closed
7/26/2011	6:52:19 PM	SiCl4 post valve closed
7/26/2011	6:52:19 PM	Bypass valve closed
7/26/2011	6:52:19 PM	Bubbler valve closed
7/26/2011	6:52:19 PM	Main Vac valve opened
7/26/2011	6:52:19 PM	Helium MFC set to  0.000000
7/26/2011	6:52:19 PM	H2 MFC set to  0.000000
7/26/2011	6:52:19 PM	BCl3 MFC set to  0.000000
7/26/2011	6:52:19 PM	PHl3 MFC set to  0.000000
7/26/2011	6:52:19 PM	SiCl4 MFC set to  0.000000
7/26/2011	6:52:19 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	6:52:19 PM	Tube furnace set to 0
7/26/2011	6:52:49 PM	H2 valve closed
7/26/2011	6:52:49 PM	BCl3 valve closed
7/26/2011	6:52:49 PM	PH3 valve closed
7/26/2011	6:52:49 PM	SiCl4 pre valve closed
7/26/2011	6:52:49 PM	SiCl4 post valve closed
7/26/2011	6:52:49 PM	Bypass valve closed
7/26/2011	6:52:49 PM	Bubbler valve closed
7/26/2011	6:52:49 PM	Helium valve opened
7/26/2011	6:52:49 PM	Main Vac valve opened
7/26/2011	6:52:49 PM	Helium MFC set to  20.000000
7/26/2011	6:52:49 PM	H2 MFC set to  0.000000
7/26/2011	6:52:49 PM	BCl3 MFC set to  0.000000
7/26/2011	6:52:49 PM	PHl3 MFC set to  0.000000
7/26/2011	6:52:49 PM	SiCl4 MFC set to  0.000000
7/26/2011	6:52:49 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	6:52:49 PM	Tube furnace set to 0
7/26/2011	6:53:19 PM	Helium valve closed
7/26/2011	6:53:19 PM	H2 valve closed
7/26/2011	6:53:19 PM	BCl3 valve closed
7/26/2011	6:53:19 PM	PH3 valve closed
7/26/2011	6:53:19 PM	SiCl4 pre valve closed
7/26/2011	6:53:19 PM	SiCl4 post valve closed
7/26/2011	6:53:19 PM	Bypass valve closed
7/26/2011	6:53:19 PM	Bubbler valve closed
7/26/2011	6:53:19 PM	Main Vac valve opened
7/26/2011	6:53:19 PM	Helium MFC set to  0.000000
7/26/2011	6:53:19 PM	H2 MFC set to  0.000000
7/26/2011	6:53:19 PM	BCl3 MFC set to  0.000000
7/26/2011	6:53:19 PM	PHl3 MFC set to  0.000000
7/26/2011	6:53:19 PM	SiCl4 MFC set to  0.000000
7/26/2011	6:53:19 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	6:53:20 PM	Tube furnace set to 0
7/26/2011	6:53:50 PM	H2 valve closed
7/26/2011	6:53:50 PM	BCl3 valve closed
7/26/2011	6:53:50 PM	PH3 valve closed
7/26/2011	6:53:50 PM	SiCl4 pre valve closed
7/26/2011	6:53:50 PM	SiCl4 post valve closed
7/26/2011	6:53:50 PM	Bypass valve closed
7/26/2011	6:53:50 PM	Bubbler valve closed
7/26/2011	6:53:50 PM	Helium valve opened
7/26/2011	6:53:50 PM	Main Vac valve opened
7/26/2011	6:53:50 PM	Helium MFC set to  20.000000
7/26/2011	6:53:50 PM	H2 MFC set to  0.000000
7/26/2011	6:53:50 PM	BCl3 MFC set to  0.000000
7/26/2011	6:53:50 PM	PHl3 MFC set to  0.000000
7/26/2011	6:53:50 PM	SiCl4 MFC set to  0.000000
7/26/2011	6:53:50 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	6:53:50 PM	Tube furnace set to 0
7/26/2011	6:54:20 PM	Helium valve closed
7/26/2011	6:54:20 PM	H2 valve closed
7/26/2011	6:54:20 PM	BCl3 valve closed
7/26/2011	6:54:20 PM	PH3 valve closed
7/26/2011	6:54:20 PM	SiCl4 pre valve closed
7/26/2011	6:54:20 PM	SiCl4 post valve closed
7/26/2011	6:54:20 PM	Bypass valve closed
7/26/2011	6:54:20 PM	Bubbler valve closed
7/26/2011	6:54:20 PM	Main Vac valve opened
7/26/2011	6:54:20 PM	Helium MFC set to  0.000000
7/26/2011	6:54:20 PM	H2 MFC set to  0.000000
7/26/2011	6:54:20 PM	BCl3 MFC set to  0.000000
7/26/2011	6:54:20 PM	PHl3 MFC set to  0.000000
7/26/2011	6:54:20 PM	SiCl4 MFC set to  0.000000
7/26/2011	6:54:20 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	6:54:20 PM	Tube furnace set to 0
7/26/2011	6:54:50 PM	H2 valve closed
7/26/2011	6:54:50 PM	BCl3 valve closed
7/26/2011	6:54:50 PM	PH3 valve closed
7/26/2011	6:54:50 PM	SiCl4 pre valve closed
7/26/2011	6:54:50 PM	SiCl4 post valve closed
7/26/2011	6:54:50 PM	Bypass valve closed
7/26/2011	6:54:50 PM	Bubbler valve closed
7/26/2011	6:54:50 PM	Helium valve opened
7/26/2011	6:54:50 PM	Main Vac valve opened
7/26/2011	6:54:50 PM	Helium MFC set to  20.000000
7/26/2011	6:54:50 PM	H2 MFC set to  0.000000
7/26/2011	6:54:50 PM	BCl3 MFC set to  0.000000
7/26/2011	6:54:50 PM	PHl3 MFC set to  0.000000
7/26/2011	6:54:50 PM	SiCl4 MFC set to  0.000000
7/26/2011	6:54:50 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	6:54:50 PM	Tube furnace set to 0
7/26/2011	6:55:20 PM	Helium valve closed
7/26/2011	6:55:20 PM	H2 valve closed
7/26/2011	6:55:20 PM	BCl3 valve closed
7/26/2011	6:55:20 PM	PH3 valve closed
7/26/2011	6:55:20 PM	SiCl4 pre valve closed
7/26/2011	6:55:20 PM	SiCl4 post valve closed
7/26/2011	6:55:20 PM	Bypass valve closed
7/26/2011	6:55:20 PM	Bubbler valve closed
7/26/2011	6:55:20 PM	Main Vac valve opened
7/26/2011	6:55:20 PM	Helium MFC set to  0.000000
7/26/2011	6:55:20 PM	H2 MFC set to  0.000000
7/26/2011	6:55:20 PM	BCl3 MFC set to  0.000000
7/26/2011	6:55:20 PM	PHl3 MFC set to  0.000000
7/26/2011	6:55:20 PM	SiCl4 MFC set to  0.000000
7/26/2011	6:55:20 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	6:55:20 PM	Tube furnace set to 0
7/26/2011	6:55:50 PM	H2 valve closed
7/26/2011	6:55:50 PM	BCl3 valve closed
7/26/2011	6:55:50 PM	PH3 valve closed
7/26/2011	6:55:50 PM	SiCl4 pre valve closed
7/26/2011	6:55:50 PM	SiCl4 post valve closed
7/26/2011	6:55:50 PM	Bypass valve closed
7/26/2011	6:55:50 PM	Bubbler valve closed
7/26/2011	6:55:50 PM	Helium valve opened
7/26/2011	6:55:50 PM	Main Vac valve opened
7/26/2011	6:55:51 PM	Helium MFC set to  20.000000
7/26/2011	6:55:51 PM	H2 MFC set to  0.000000
7/26/2011	6:55:51 PM	BCl3 MFC set to  0.000000
7/26/2011	6:55:51 PM	PHl3 MFC set to  0.000000
7/26/2011	6:55:51 PM	SiCl4 MFC set to  0.000000
7/26/2011	6:55:51 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	6:55:51 PM	Tube furnace set to 0
7/26/2011	6:56:21 PM	Helium valve closed
7/26/2011	6:56:21 PM	H2 valve closed
7/26/2011	6:56:21 PM	BCl3 valve closed
7/26/2011	6:56:21 PM	PH3 valve closed
7/26/2011	6:56:21 PM	SiCl4 pre valve closed
7/26/2011	6:56:21 PM	SiCl4 post valve closed
7/26/2011	6:56:21 PM	Bypass valve closed
7/26/2011	6:56:21 PM	Bubbler valve closed
7/26/2011	6:56:21 PM	Main Vac valve opened
7/26/2011	6:56:21 PM	Helium MFC set to  0.000000
7/26/2011	6:56:21 PM	H2 MFC set to  0.000000
7/26/2011	6:56:21 PM	BCl3 MFC set to  0.000000
7/26/2011	6:56:21 PM	PHl3 MFC set to  0.000000
7/26/2011	6:56:21 PM	SiCl4 MFC set to  0.000000
7/26/2011	6:56:21 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	6:56:21 PM	Tube furnace set to 200
7/26/2011	6:56:51 PM	H2 valve closed
7/26/2011	6:56:51 PM	BCl3 valve closed
7/26/2011	6:56:51 PM	PH3 valve closed
7/26/2011	6:56:51 PM	SiCl4 pre valve closed
7/26/2011	6:56:51 PM	SiCl4 post valve closed
7/26/2011	6:56:51 PM	Bypass valve closed
7/26/2011	6:56:51 PM	Bubbler valve closed
7/26/2011	6:56:51 PM	Helium valve opened
7/26/2011	6:56:51 PM	Main Vac valve opened
7/26/2011	6:56:51 PM	Helium MFC set to  20.000000
7/26/2011	6:56:51 PM	H2 MFC set to  0.000000
7/26/2011	6:56:51 PM	BCl3 MFC set to  0.000000
7/26/2011	6:56:51 PM	PHl3 MFC set to  0.000000
7/26/2011	6:56:51 PM	SiCl4 MFC set to  0.000000
7/26/2011	6:56:51 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	6:56:51 PM	Tube furnace set to 200
7/26/2011	6:57:21 PM	Helium valve closed
7/26/2011	6:57:21 PM	H2 valve closed
7/26/2011	6:57:21 PM	BCl3 valve closed
7/26/2011	6:57:21 PM	PH3 valve closed
7/26/2011	6:57:21 PM	SiCl4 pre valve closed
7/26/2011	6:57:21 PM	SiCl4 post valve closed
7/26/2011	6:57:21 PM	Bypass valve closed
7/26/2011	6:57:21 PM	Bubbler valve closed
7/26/2011	6:57:21 PM	Main Vac valve opened
7/26/2011	6:57:21 PM	Helium MFC set to  0.000000
7/26/2011	6:57:21 PM	H2 MFC set to  0.000000
7/26/2011	6:57:21 PM	BCl3 MFC set to  0.000000
7/26/2011	6:57:21 PM	PHl3 MFC set to  0.000000
7/26/2011	6:57:21 PM	SiCl4 MFC set to  0.000000
7/26/2011	6:57:21 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	6:57:21 PM	Tube furnace set to 200
7/26/2011	6:57:51 PM	H2 valve closed
7/26/2011	6:57:51 PM	BCl3 valve closed
7/26/2011	6:57:51 PM	PH3 valve closed
7/26/2011	6:57:51 PM	SiCl4 pre valve closed
7/26/2011	6:57:51 PM	SiCl4 post valve closed
7/26/2011	6:57:51 PM	Bypass valve closed
7/26/2011	6:57:51 PM	Bubbler valve closed
7/26/2011	6:57:51 PM	Helium valve opened
7/26/2011	6:57:51 PM	Main Vac valve opened
7/26/2011	6:57:51 PM	Helium MFC set to  20.000000
7/26/2011	6:57:51 PM	H2 MFC set to  0.000000
7/26/2011	6:57:51 PM	BCl3 MFC set to  0.000000
7/26/2011	6:57:51 PM	PHl3 MFC set to  0.000000
7/26/2011	6:57:51 PM	SiCl4 MFC set to  0.000000
7/26/2011	6:57:51 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	6:57:52 PM	Tube furnace set to 200
7/26/2011	6:58:22 PM	Helium valve closed
7/26/2011	6:58:22 PM	H2 valve closed
7/26/2011	6:58:22 PM	BCl3 valve closed
7/26/2011	6:58:22 PM	PH3 valve closed
7/26/2011	6:58:22 PM	SiCl4 pre valve closed
7/26/2011	6:58:22 PM	SiCl4 post valve closed
7/26/2011	6:58:22 PM	Bypass valve closed
7/26/2011	6:58:22 PM	Bubbler valve closed
7/26/2011	6:58:22 PM	Main Vac valve opened
7/26/2011	6:58:22 PM	Helium MFC set to  0.000000
7/26/2011	6:58:22 PM	H2 MFC set to  0.000000
7/26/2011	6:58:22 PM	BCl3 MFC set to  0.000000
7/26/2011	6:58:22 PM	PHl3 MFC set to  0.000000
7/26/2011	6:58:22 PM	SiCl4 MFC set to  0.000000
7/26/2011	6:58:22 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	6:58:22 PM	Tube furnace set to 200
7/26/2011	6:58:52 PM	H2 valve closed
7/26/2011	6:58:52 PM	BCl3 valve closed
7/26/2011	6:58:52 PM	PH3 valve closed
7/26/2011	6:58:52 PM	SiCl4 pre valve closed
7/26/2011	6:58:52 PM	SiCl4 post valve closed
7/26/2011	6:58:52 PM	Bypass valve closed
7/26/2011	6:58:52 PM	Bubbler valve closed
7/26/2011	6:58:52 PM	Helium valve opened
7/26/2011	6:58:52 PM	Main Vac valve opened
7/26/2011	6:58:52 PM	Helium MFC set to  20.000000
7/26/2011	6:58:52 PM	H2 MFC set to  0.000000
7/26/2011	6:58:52 PM	BCl3 MFC set to  0.000000
7/26/2011	6:58:52 PM	PHl3 MFC set to  0.000000
7/26/2011	6:58:52 PM	SiCl4 MFC set to  0.000000
7/26/2011	6:58:52 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	6:58:52 PM	Tube furnace set to 200
7/26/2011	6:59:22 PM	Helium valve closed
7/26/2011	6:59:22 PM	H2 valve closed
7/26/2011	6:59:22 PM	BCl3 valve closed
7/26/2011	6:59:22 PM	PH3 valve closed
7/26/2011	6:59:22 PM	SiCl4 pre valve closed
7/26/2011	6:59:22 PM	SiCl4 post valve closed
7/26/2011	6:59:22 PM	Bypass valve closed
7/26/2011	6:59:22 PM	Bubbler valve closed
7/26/2011	6:59:22 PM	Main Vac valve opened
7/26/2011	6:59:22 PM	Helium MFC set to  0.000000
7/26/2011	6:59:22 PM	H2 MFC set to  0.000000
7/26/2011	6:59:22 PM	BCl3 MFC set to  0.000000
7/26/2011	6:59:22 PM	PHl3 MFC set to  0.000000
7/26/2011	6:59:22 PM	SiCl4 MFC set to  0.000000
7/26/2011	6:59:22 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	6:59:22 PM	Tube furnace set to 200
7/26/2011	6:59:52 PM	H2 valve closed
7/26/2011	6:59:52 PM	BCl3 valve closed
7/26/2011	6:59:52 PM	PH3 valve closed
7/26/2011	6:59:52 PM	SiCl4 pre valve closed
7/26/2011	6:59:52 PM	SiCl4 post valve closed
7/26/2011	6:59:52 PM	Bypass valve closed
7/26/2011	6:59:52 PM	Bubbler valve closed
7/26/2011	6:59:52 PM	Helium valve opened
7/26/2011	6:59:52 PM	Main Vac valve opened
7/26/2011	6:59:52 PM	Helium MFC set to  20.000000
7/26/2011	6:59:52 PM	H2 MFC set to  0.000000
7/26/2011	6:59:52 PM	BCl3 MFC set to  0.000000
7/26/2011	6:59:52 PM	PHl3 MFC set to  0.000000
7/26/2011	6:59:52 PM	SiCl4 MFC set to  0.000000
7/26/2011	6:59:52 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	6:59:52 PM	Tube furnace set to 200
7/26/2011	7:00:22 PM	Helium valve closed
7/26/2011	7:00:22 PM	H2 valve closed
7/26/2011	7:00:22 PM	BCl3 valve closed
7/26/2011	7:00:22 PM	PH3 valve closed
7/26/2011	7:00:22 PM	SiCl4 pre valve closed
7/26/2011	7:00:22 PM	SiCl4 post valve closed
7/26/2011	7:00:22 PM	Bypass valve closed
7/26/2011	7:00:22 PM	Bubbler valve closed
7/26/2011	7:00:22 PM	Main Vac valve opened
7/26/2011	7:00:22 PM	Helium MFC set to  0.000000
7/26/2011	7:00:22 PM	H2 MFC set to  0.000000
7/26/2011	7:00:22 PM	BCl3 MFC set to  0.000000
7/26/2011	7:00:22 PM	PHl3 MFC set to  0.000000
7/26/2011	7:00:22 PM	SiCl4 MFC set to  0.000000
7/26/2011	7:00:22 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	7:00:23 PM	Tube furnace set to 200
7/26/2011	7:00:53 PM	H2 valve closed
7/26/2011	7:00:53 PM	BCl3 valve closed
7/26/2011	7:00:53 PM	PH3 valve closed
7/26/2011	7:00:53 PM	SiCl4 pre valve closed
7/26/2011	7:00:53 PM	SiCl4 post valve closed
7/26/2011	7:00:53 PM	Bypass valve closed
7/26/2011	7:00:53 PM	Bubbler valve closed
7/26/2011	7:00:53 PM	Helium valve opened
7/26/2011	7:00:53 PM	Main Vac valve opened
7/26/2011	7:00:53 PM	Helium MFC set to  20.000000
7/26/2011	7:00:53 PM	H2 MFC set to  0.000000
7/26/2011	7:00:53 PM	BCl3 MFC set to  0.000000
7/26/2011	7:00:53 PM	PHl3 MFC set to  0.000000
7/26/2011	7:00:53 PM	SiCl4 MFC set to  0.000000
7/26/2011	7:00:53 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	7:00:53 PM	Tube furnace set to 200
7/26/2011	7:01:23 PM	Helium valve closed
7/26/2011	7:01:23 PM	H2 valve closed
7/26/2011	7:01:23 PM	BCl3 valve closed
7/26/2011	7:01:23 PM	PH3 valve closed
7/26/2011	7:01:23 PM	SiCl4 pre valve closed
7/26/2011	7:01:23 PM	SiCl4 post valve closed
7/26/2011	7:01:23 PM	Bypass valve closed
7/26/2011	7:01:23 PM	Bubbler valve closed
7/26/2011	7:01:23 PM	Main Vac valve opened
7/26/2011	7:01:23 PM	Helium MFC set to  0.000000
7/26/2011	7:01:23 PM	H2 MFC set to  0.000000
7/26/2011	7:01:23 PM	BCl3 MFC set to  0.000000
7/26/2011	7:01:23 PM	PHl3 MFC set to  0.000000
7/26/2011	7:01:23 PM	SiCl4 MFC set to  0.000000
7/26/2011	7:01:23 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	7:01:23 PM	Tube furnace set to 200
7/26/2011	7:01:53 PM	H2 valve closed
7/26/2011	7:01:53 PM	BCl3 valve closed
7/26/2011	7:01:53 PM	PH3 valve closed
7/26/2011	7:01:53 PM	SiCl4 pre valve closed
7/26/2011	7:01:53 PM	SiCl4 post valve closed
7/26/2011	7:01:53 PM	Bypass valve closed
7/26/2011	7:01:53 PM	Bubbler valve closed
7/26/2011	7:01:53 PM	Helium valve opened
7/26/2011	7:01:53 PM	Main Vac valve opened
7/26/2011	7:01:53 PM	Helium MFC set to  20.000000
7/26/2011	7:01:53 PM	H2 MFC set to  0.000000
7/26/2011	7:01:53 PM	BCl3 MFC set to  0.000000
7/26/2011	7:01:53 PM	PHl3 MFC set to  0.000000
7/26/2011	7:01:53 PM	SiCl4 MFC set to  0.000000
7/26/2011	7:01:53 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	7:01:53 PM	Tube furnace set to 200
7/26/2011	7:02:23 PM	Helium valve closed
7/26/2011	7:02:23 PM	H2 valve closed
7/26/2011	7:02:23 PM	BCl3 valve closed
7/26/2011	7:02:23 PM	PH3 valve closed
7/26/2011	7:02:23 PM	SiCl4 pre valve closed
7/26/2011	7:02:23 PM	SiCl4 post valve closed
7/26/2011	7:02:23 PM	Bypass valve closed
7/26/2011	7:02:23 PM	Bubbler valve closed
7/26/2011	7:02:23 PM	Main Vac valve opened
7/26/2011	7:02:23 PM	Helium MFC set to  0.000000
7/26/2011	7:02:23 PM	H2 MFC set to  0.000000
7/26/2011	7:02:23 PM	BCl3 MFC set to  0.000000
7/26/2011	7:02:23 PM	PHl3 MFC set to  0.000000
7/26/2011	7:02:23 PM	SiCl4 MFC set to  0.000000
7/26/2011	7:02:23 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	7:02:23 PM	Tube furnace set to 0
7/26/2011	7:02:24 PM	Run finished at 7:02 PM
7/26/2011	7:05:20 PM	Main Vac valve closed
7/26/2011	7:05:35 PM	Main Vac valve opened
7/26/2011	7:12:34 PM	Main Vac valve closed
7/26/2011	7:12:46 PM	Main Vac valve opened
7/26/2011	7:13:58 PM	Recipe started at 7:13 PM
7/26/2011	7:13:58 PM	Helium valve closed
7/26/2011	7:13:58 PM	H2 valve closed
7/26/2011	7:13:58 PM	BCl3 valve closed
7/26/2011	7:13:58 PM	PH3 valve closed
7/26/2011	7:13:58 PM	SiCl4 pre valve closed
7/26/2011	7:13:58 PM	SiCl4 post valve closed
7/26/2011	7:13:58 PM	Main Vac valve closed
7/26/2011	7:13:58 PM	Bypass valve closed
7/26/2011	7:13:58 PM	Bubbler valve closed
7/26/2011	7:13:58 PM	Helium MFC set to  0.000000
7/26/2011	7:13:58 PM	H2 MFC set to  0.000000
7/26/2011	7:13:58 PM	BCl3 MFC set to  0.000000
7/26/2011	7:13:58 PM	PHl3 MFC set to  0.000000
7/26/2011	7:13:58 PM	SiCl4 MFC set to  0.000000
7/26/2011	7:13:58 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	7:13:58 PM	Tube furnace set to 0
7/26/2011	7:14:01 PM	Helium valve closed
7/26/2011	7:14:01 PM	BCl3 valve closed
7/26/2011	7:14:01 PM	PH3 valve closed
7/26/2011	7:14:01 PM	SiCl4 pre valve closed
7/26/2011	7:14:01 PM	SiCl4 post valve closed
7/26/2011	7:14:01 PM	Main Vac valve closed
7/26/2011	7:14:01 PM	Bypass valve closed
7/26/2011	7:14:01 PM	Bubbler valve closed
7/26/2011	7:14:01 PM	H2 valve opened
7/26/2011	7:14:01 PM	Helium MFC set to  0.000000
7/26/2011	7:14:01 PM	H2 MFC set to  500.000000
7/26/2011	7:14:01 PM	BCl3 MFC set to  0.000000
7/26/2011	7:14:01 PM	PHl3 MFC set to  0.000000
7/26/2011	7:14:01 PM	SiCl4 MFC set to  0.000000
7/26/2011	7:14:01 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	7:14:01 PM	Tube furnace set to 0
7/26/2011	7:15:04 PM	Helium valve closed
7/26/2011	7:15:04 PM	BCl3 valve closed
7/26/2011	7:15:04 PM	PH3 valve closed
7/26/2011	7:15:04 PM	SiCl4 pre valve closed
7/26/2011	7:15:04 PM	SiCl4 post valve closed
7/26/2011	7:15:04 PM	Main Vac valve closed
7/26/2011	7:15:04 PM	Bypass valve closed
7/26/2011	7:15:04 PM	H2 valve opened
7/26/2011	7:15:04 PM	Bubbler valve opened
7/26/2011	7:15:04 PM	Helium MFC set to  0.000000
7/26/2011	7:15:04 PM	H2 MFC set to  500.000000
7/26/2011	7:15:04 PM	BCl3 MFC set to  0.000000
7/26/2011	7:15:04 PM	PHl3 MFC set to  0.000000
7/26/2011	7:15:04 PM	SiCl4 MFC set to  0.000000
7/26/2011	7:15:04 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	7:15:04 PM	Tube furnace set to 0
7/26/2011	7:15:05 PM	Helium valve closed
7/26/2011	7:15:05 PM	BCl3 valve closed
7/26/2011	7:15:05 PM	PH3 valve closed
7/26/2011	7:15:05 PM	SiCl4 pre valve closed
7/26/2011	7:15:05 PM	SiCl4 post valve closed
7/26/2011	7:15:05 PM	Main Vac valve closed
7/26/2011	7:15:05 PM	Bypass valve closed
7/26/2011	7:15:05 PM	H2 valve opened
7/26/2011	7:15:05 PM	Bubbler valve opened
7/26/2011	7:15:05 PM	Helium MFC set to  0.000000
7/26/2011	7:15:05 PM	H2 MFC set to  500.000000
7/26/2011	7:15:05 PM	BCl3 MFC set to  0.000000
7/26/2011	7:15:05 PM	PHl3 MFC set to  0.000000
7/26/2011	7:15:05 PM	SiCl4 MFC set to  0.000000
7/26/2011	7:15:05 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	7:15:05 PM	Tube furnace set to 1000
7/26/2011	7:35:05 PM	Helium valve closed
7/26/2011	7:35:05 PM	BCl3 valve closed
7/26/2011	7:35:05 PM	PH3 valve closed
7/26/2011	7:35:05 PM	Main Vac valve closed
7/26/2011	7:35:05 PM	Bypass valve closed
7/26/2011	7:35:05 PM	H2 valve opened
7/26/2011	7:35:05 PM	SiCl4 pre valve opened
7/26/2011	7:35:05 PM	SiCl4 post valve opened
7/26/2011	7:35:05 PM	Bubbler valve opened
7/26/2011	7:35:05 PM	Helium MFC set to  0.000000
7/26/2011	7:35:05 PM	H2 MFC set to  500.000000
7/26/2011	7:35:05 PM	BCl3 MFC set to  0.000000
7/26/2011	7:35:05 PM	PHl3 MFC set to  0.000000
7/26/2011	7:35:05 PM	SiCl4 MFC set to  50.000000
7/26/2011	7:35:05 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	7:35:06 PM	Tube furnace set to 1000
7/26/2011	7:45:06 PM	Helium valve closed
7/26/2011	7:45:06 PM	BCl3 valve closed
7/26/2011	7:45:06 PM	PH3 valve closed
7/26/2011	7:45:06 PM	SiCl4 pre valve closed
7/26/2011	7:45:06 PM	SiCl4 post valve closed
7/26/2011	7:45:06 PM	Main Vac valve closed
7/26/2011	7:45:06 PM	Bypass valve closed
7/26/2011	7:45:06 PM	H2 valve opened
7/26/2011	7:45:06 PM	Bubbler valve opened
7/26/2011	7:45:06 PM	Helium MFC set to  0.000000
7/26/2011	7:45:06 PM	H2 MFC set to  500.000000
7/26/2011	7:45:06 PM	BCl3 MFC set to  0.000000
7/26/2011	7:45:06 PM	PHl3 MFC set to  0.000000
7/26/2011	7:45:06 PM	SiCl4 MFC set to  0.000000
7/26/2011	7:45:06 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	7:45:06 PM	Tube furnace set to 950
7/26/2011	7:47:06 PM	Helium valve closed
7/26/2011	7:47:06 PM	BCl3 valve closed
7/26/2011	7:47:06 PM	PH3 valve closed
7/26/2011	7:47:06 PM	SiCl4 pre valve closed
7/26/2011	7:47:06 PM	SiCl4 post valve closed
7/26/2011	7:47:06 PM	Main Vac valve closed
7/26/2011	7:47:06 PM	Bypass valve closed
7/26/2011	7:47:06 PM	H2 valve opened
7/26/2011	7:47:06 PM	Bubbler valve opened
7/26/2011	7:47:06 PM	Helium MFC set to  0.000000
7/26/2011	7:47:06 PM	H2 MFC set to  500.000000
7/26/2011	7:47:06 PM	BCl3 MFC set to  0.000000
7/26/2011	7:47:06 PM	PHl3 MFC set to  0.000000
7/26/2011	7:47:06 PM	SiCl4 MFC set to  0.000000
7/26/2011	7:47:06 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	7:47:06 PM	Tube furnace set to 900
7/26/2011	7:49:06 PM	Helium valve closed
7/26/2011	7:49:06 PM	BCl3 valve closed
7/26/2011	7:49:06 PM	PH3 valve closed
7/26/2011	7:49:06 PM	SiCl4 pre valve closed
7/26/2011	7:49:06 PM	SiCl4 post valve closed
7/26/2011	7:49:06 PM	Main Vac valve closed
7/26/2011	7:49:06 PM	Bypass valve closed
7/26/2011	7:49:06 PM	H2 valve opened
7/26/2011	7:49:06 PM	Bubbler valve opened
7/26/2011	7:49:06 PM	Helium MFC set to  0.000000
7/26/2011	7:49:06 PM	H2 MFC set to  500.000000
7/26/2011	7:49:06 PM	BCl3 MFC set to  0.000000
7/26/2011	7:49:06 PM	PHl3 MFC set to  0.000000
7/26/2011	7:49:06 PM	SiCl4 MFC set to  0.000000
7/26/2011	7:49:06 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	7:49:06 PM	Tube furnace set to 850
7/26/2011	7:51:06 PM	H2 valve closed
7/26/2011	7:51:06 PM	BCl3 valve closed
7/26/2011	7:51:06 PM	PH3 valve closed
7/26/2011	7:51:06 PM	SiCl4 pre valve closed
7/26/2011	7:51:06 PM	SiCl4 post valve closed
7/26/2011	7:51:06 PM	Main Vac valve closed
7/26/2011	7:51:06 PM	Bypass valve closed
7/26/2011	7:51:06 PM	Helium valve opened
7/26/2011	7:51:06 PM	Bubbler valve opened
7/26/2011	7:51:06 PM	Helium MFC set to  500.000000
7/26/2011	7:51:06 PM	H2 MFC set to  0.000000
7/26/2011	7:51:06 PM	BCl3 MFC set to  0.000000
7/26/2011	7:51:06 PM	PHl3 MFC set to  0.000000
7/26/2011	7:51:06 PM	SiCl4 MFC set to  0.000000
7/26/2011	7:51:06 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	7:51:06 PM	Tube furnace set to 800
7/26/2011	7:53:06 PM	H2 valve closed
7/26/2011	7:53:06 PM	BCl3 valve closed
7/26/2011	7:53:06 PM	PH3 valve closed
7/26/2011	7:53:06 PM	SiCl4 pre valve closed
7/26/2011	7:53:06 PM	SiCl4 post valve closed
7/26/2011	7:53:06 PM	Main Vac valve closed
7/26/2011	7:53:06 PM	Bypass valve closed
7/26/2011	7:53:06 PM	Helium valve opened
7/26/2011	7:53:06 PM	Bubbler valve opened
7/26/2011	7:53:06 PM	Helium MFC set to  500.000000
7/26/2011	7:53:06 PM	H2 MFC set to  0.000000
7/26/2011	7:53:06 PM	BCl3 MFC set to  0.000000
7/26/2011	7:53:06 PM	PHl3 MFC set to  0.000000
7/26/2011	7:53:06 PM	SiCl4 MFC set to  0.000000
7/26/2011	7:53:06 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	7:53:07 PM	Tube furnace set to 750
7/26/2011	7:55:07 PM	H2 valve closed
7/26/2011	7:55:07 PM	BCl3 valve closed
7/26/2011	7:55:07 PM	PH3 valve closed
7/26/2011	7:55:07 PM	SiCl4 pre valve closed
7/26/2011	7:55:07 PM	SiCl4 post valve closed
7/26/2011	7:55:07 PM	Main Vac valve closed
7/26/2011	7:55:07 PM	Bypass valve closed
7/26/2011	7:55:07 PM	Helium valve opened
7/26/2011	7:55:07 PM	Bubbler valve opened
7/26/2011	7:55:07 PM	Helium MFC set to  500.000000
7/26/2011	7:55:07 PM	H2 MFC set to  0.000000
7/26/2011	7:55:07 PM	BCl3 MFC set to  0.000000
7/26/2011	7:55:07 PM	PHl3 MFC set to  0.000000
7/26/2011	7:55:07 PM	SiCl4 MFC set to  0.000000
7/26/2011	7:55:07 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	7:55:07 PM	Tube furnace set to 0
7/26/2011	8:15:07 PM	Helium valve closed
7/26/2011	8:15:07 PM	H2 valve closed
7/26/2011	8:15:07 PM	BCl3 valve closed
7/26/2011	8:15:07 PM	PH3 valve closed
7/26/2011	8:15:07 PM	SiCl4 pre valve closed
7/26/2011	8:15:07 PM	SiCl4 post valve closed
7/26/2011	8:15:07 PM	Main Vac valve closed
7/26/2011	8:15:07 PM	Bypass valve closed
7/26/2011	8:15:07 PM	Bubbler valve closed
7/26/2011	8:15:07 PM	Helium MFC set to  0.000000
7/26/2011	8:15:07 PM	H2 MFC set to  0.000000
7/26/2011	8:15:07 PM	BCl3 MFC set to  0.000000
7/26/2011	8:15:07 PM	PHl3 MFC set to  0.000000
7/26/2011	8:15:07 PM	SiCl4 MFC set to  0.000000
7/26/2011	8:15:07 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	8:15:07 PM	Tube furnace set to 0
7/26/2011	8:15:08 PM	Run finished at 8:15 PM
7/26/2011	8:23:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/26/2011	8:23:40 PM	Recipe started at 8:23 PM
7/26/2011	8:23:40 PM	Helium valve closed
7/26/2011	8:23:40 PM	H2 valve closed
7/26/2011	8:23:40 PM	BCl3 valve closed
7/26/2011	8:23:40 PM	PH3 valve closed
7/26/2011	8:23:40 PM	SiCl4 pre valve closed
7/26/2011	8:23:40 PM	SiCl4 post valve closed
7/26/2011	8:23:40 PM	Main Vac valve closed
7/26/2011	8:23:40 PM	Bypass valve closed
7/26/2011	8:23:40 PM	Bubbler valve closed
7/26/2011	8:23:40 PM	Helium MFC set to  0.000000
7/26/2011	8:23:40 PM	H2 MFC set to  0.000000
7/26/2011	8:23:40 PM	BCl3 MFC set to  0.000000
7/26/2011	8:23:40 PM	PHl3 MFC set to  0.000000
7/26/2011	8:23:40 PM	SiCl4 MFC set to  0.000000
7/26/2011	8:23:40 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	8:23:41 PM	Tube furnace set to 0
7/26/2011	8:23:44 PM	H2 valve closed
7/26/2011	8:23:44 PM	BCl3 valve closed
7/26/2011	8:23:44 PM	PH3 valve closed
7/26/2011	8:23:44 PM	SiCl4 pre valve closed
7/26/2011	8:23:44 PM	SiCl4 post valve closed
7/26/2011	8:23:44 PM	Main Vac valve closed
7/26/2011	8:23:44 PM	Bypass valve closed
7/26/2011	8:23:44 PM	Bubbler valve closed
7/26/2011	8:23:44 PM	Helium valve opened
7/26/2011	8:23:44 PM	Helium MFC set to  500.000000
7/26/2011	8:23:44 PM	H2 MFC set to  0.000000
7/26/2011	8:23:44 PM	BCl3 MFC set to  0.000000
7/26/2011	8:23:44 PM	PHl3 MFC set to  0.000000
7/26/2011	8:23:44 PM	SiCl4 MFC set to  0.000000
7/26/2011	8:23:44 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	8:23:44 PM	Tube furnace set to 0
7/26/2011	8:23:49 PM	Helium valve closed
7/26/2011	8:23:49 PM	H2 valve closed
7/26/2011	8:23:49 PM	BCl3 valve closed
7/26/2011	8:23:49 PM	PH3 valve closed
7/26/2011	8:23:49 PM	SiCl4 pre valve closed
7/26/2011	8:23:49 PM	SiCl4 post valve closed
7/26/2011	8:23:49 PM	Main Vac valve closed
7/26/2011	8:23:49 PM	Bypass valve closed
7/26/2011	8:23:49 PM	Bubbler valve closed
7/26/2011	8:23:49 PM	Helium MFC set to  0.000000
7/26/2011	8:23:49 PM	H2 MFC set to  0.000000
7/26/2011	8:23:49 PM	BCl3 MFC set to  0.000000
7/26/2011	8:23:49 PM	PHl3 MFC set to  0.000000
7/26/2011	8:23:49 PM	SiCl4 MFC set to  0.000000
7/26/2011	8:23:49 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	8:23:49 PM	Tube furnace set to 0
7/26/2011	8:23:50 PM	Run finished at 8:23 PM
7/26/2011	8:23:50 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/26/2011	8:27:16 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/26/2011	8:27:17 PM	Recipe started at 8:27 PM
7/26/2011	8:27:17 PM	Helium valve closed
7/26/2011	8:27:17 PM	H2 valve closed
7/26/2011	8:27:17 PM	BCl3 valve closed
7/26/2011	8:27:17 PM	PH3 valve closed
7/26/2011	8:27:17 PM	SiCl4 pre valve closed
7/26/2011	8:27:17 PM	SiCl4 post valve closed
7/26/2011	8:27:17 PM	Main Vac valve closed
7/26/2011	8:27:17 PM	Bubbler valve closed
7/26/2011	8:27:17 PM	Bypass valve opened
7/26/2011	8:27:17 PM	Helium MFC set to  0.000000
7/26/2011	8:27:17 PM	H2 MFC set to  0.000000
7/26/2011	8:27:17 PM	BCl3 MFC set to  0.000000
7/26/2011	8:27:17 PM	PHl3 MFC set to  0.000000
7/26/2011	8:27:17 PM	SiCl4 MFC set to  0.000000
7/26/2011	8:27:17 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	8:27:18 PM	Tube furnace set to 0
7/26/2011	8:28:20 PM	Helium valve closed
7/26/2011	8:28:20 PM	H2 valve closed
7/26/2011	8:28:20 PM	BCl3 valve closed
7/26/2011	8:28:20 PM	PH3 valve closed
7/26/2011	8:28:20 PM	SiCl4 pre valve closed
7/26/2011	8:28:20 PM	SiCl4 post valve closed
7/26/2011	8:28:20 PM	Main Vac valve closed
7/26/2011	8:28:20 PM	Bubbler valve closed
7/26/2011	8:28:20 PM	Bypass valve opened
7/26/2011	8:28:20 PM	Helium MFC set to  0.000000
7/26/2011	8:28:20 PM	H2 MFC set to  0.000000
7/26/2011	8:28:20 PM	BCl3 MFC set to  0.000000
7/26/2011	8:28:20 PM	PHl3 MFC set to  0.000000
7/26/2011	8:28:20 PM	SiCl4 MFC set to  0.000000
7/26/2011	8:28:20 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	8:28:20 PM	Tube furnace set to 0
7/26/2011	8:29:20 PM	Helium valve closed
7/26/2011	8:29:20 PM	H2 valve closed
7/26/2011	8:29:20 PM	BCl3 valve closed
7/26/2011	8:29:20 PM	PH3 valve closed
7/26/2011	8:29:20 PM	SiCl4 pre valve closed
7/26/2011	8:29:20 PM	SiCl4 post valve closed
7/26/2011	8:29:20 PM	Bypass valve closed
7/26/2011	8:29:20 PM	Bubbler valve closed
7/26/2011	8:29:20 PM	Main Vac valve opened
7/26/2011	8:29:20 PM	Helium MFC set to  0.000000
7/26/2011	8:29:20 PM	H2 MFC set to  0.000000
7/26/2011	8:29:20 PM	BCl3 MFC set to  0.000000
7/26/2011	8:29:20 PM	PHl3 MFC set to  0.000000
7/26/2011	8:29:20 PM	SiCl4 MFC set to  0.000000
7/26/2011	8:29:20 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	8:29:20 PM	Tube furnace set to 0
7/26/2011	8:29:21 PM	Run finished at 8:29 PM
7/26/2011	8:29:21 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/26/2011	8:49:40 PM	Main Vac valve closed
7/26/2011	8:49:47 PM	Main Vac valve opened
7/26/2011	8:50:00 PM	Recipe started at 8:49 PM
7/26/2011	8:50:00 PM	Helium valve closed
7/26/2011	8:50:00 PM	H2 valve closed
7/26/2011	8:50:00 PM	BCl3 valve closed
7/26/2011	8:50:00 PM	PH3 valve closed
7/26/2011	8:50:00 PM	SiCl4 pre valve closed
7/26/2011	8:50:00 PM	SiCl4 post valve closed
7/26/2011	8:50:00 PM	Bypass valve closed
7/26/2011	8:50:00 PM	Bubbler valve closed
7/26/2011	8:50:00 PM	Main Vac valve opened
7/26/2011	8:50:00 PM	Helium MFC set to  0.000000
7/26/2011	8:50:00 PM	H2 MFC set to  0.000000
7/26/2011	8:50:00 PM	BCl3 MFC set to  0.000000
7/26/2011	8:50:00 PM	PHl3 MFC set to  0.000000
7/26/2011	8:50:00 PM	SiCl4 MFC set to  0.000000
7/26/2011	8:50:00 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	8:50:00 PM	Tube furnace set to 0
7/26/2011	8:50:30 PM	H2 valve closed
7/26/2011	8:50:30 PM	BCl3 valve closed
7/26/2011	8:50:30 PM	PH3 valve closed
7/26/2011	8:50:30 PM	SiCl4 pre valve closed
7/26/2011	8:50:30 PM	SiCl4 post valve closed
7/26/2011	8:50:30 PM	Bypass valve closed
7/26/2011	8:50:30 PM	Bubbler valve closed
7/26/2011	8:50:30 PM	Helium valve opened
7/26/2011	8:50:30 PM	Main Vac valve opened
7/26/2011	8:50:30 PM	Helium MFC set to  20.000000
7/26/2011	8:50:30 PM	H2 MFC set to  0.000000
7/26/2011	8:50:30 PM	BCl3 MFC set to  0.000000
7/26/2011	8:50:30 PM	PHl3 MFC set to  0.000000
7/26/2011	8:50:30 PM	SiCl4 MFC set to  0.000000
7/26/2011	8:50:30 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	8:50:30 PM	Tube furnace set to 0
7/26/2011	8:51:00 PM	Helium valve closed
7/26/2011	8:51:00 PM	H2 valve closed
7/26/2011	8:51:00 PM	BCl3 valve closed
7/26/2011	8:51:00 PM	PH3 valve closed
7/26/2011	8:51:00 PM	SiCl4 pre valve closed
7/26/2011	8:51:00 PM	SiCl4 post valve closed
7/26/2011	8:51:00 PM	Bypass valve closed
7/26/2011	8:51:00 PM	Bubbler valve closed
7/26/2011	8:51:00 PM	Main Vac valve opened
7/26/2011	8:51:00 PM	Helium MFC set to  0.000000
7/26/2011	8:51:00 PM	H2 MFC set to  0.000000
7/26/2011	8:51:00 PM	BCl3 MFC set to  0.000000
7/26/2011	8:51:00 PM	PHl3 MFC set to  0.000000
7/26/2011	8:51:00 PM	SiCl4 MFC set to  0.000000
7/26/2011	8:51:00 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	8:51:00 PM	Tube furnace set to 0
7/26/2011	8:51:30 PM	H2 valve closed
7/26/2011	8:51:30 PM	BCl3 valve closed
7/26/2011	8:51:30 PM	PH3 valve closed
7/26/2011	8:51:30 PM	SiCl4 pre valve closed
7/26/2011	8:51:30 PM	SiCl4 post valve closed
7/26/2011	8:51:30 PM	Bypass valve closed
7/26/2011	8:51:30 PM	Bubbler valve closed
7/26/2011	8:51:30 PM	Helium valve opened
7/26/2011	8:51:30 PM	Main Vac valve opened
7/26/2011	8:51:30 PM	Helium MFC set to  20.000000
7/26/2011	8:51:30 PM	H2 MFC set to  0.000000
7/26/2011	8:51:30 PM	BCl3 MFC set to  0.000000
7/26/2011	8:51:30 PM	PHl3 MFC set to  0.000000
7/26/2011	8:51:30 PM	SiCl4 MFC set to  0.000000
7/26/2011	8:51:30 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	8:51:30 PM	Tube furnace set to 0
7/26/2011	8:52:01 PM	Helium valve closed
7/26/2011	8:52:01 PM	H2 valve closed
7/26/2011	8:52:01 PM	BCl3 valve closed
7/26/2011	8:52:01 PM	PH3 valve closed
7/26/2011	8:52:01 PM	SiCl4 pre valve closed
7/26/2011	8:52:01 PM	SiCl4 post valve closed
7/26/2011	8:52:01 PM	Bypass valve closed
7/26/2011	8:52:01 PM	Bubbler valve closed
7/26/2011	8:52:01 PM	Main Vac valve opened
7/26/2011	8:52:01 PM	Helium MFC set to  0.000000
7/26/2011	8:52:01 PM	H2 MFC set to  0.000000
7/26/2011	8:52:01 PM	BCl3 MFC set to  0.000000
7/26/2011	8:52:01 PM	PHl3 MFC set to  0.000000
7/26/2011	8:52:01 PM	SiCl4 MFC set to  0.000000
7/26/2011	8:52:01 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	8:52:01 PM	Tube furnace set to 0
7/26/2011	8:52:31 PM	H2 valve closed
7/26/2011	8:52:31 PM	BCl3 valve closed
7/26/2011	8:52:31 PM	PH3 valve closed
7/26/2011	8:52:31 PM	SiCl4 pre valve closed
7/26/2011	8:52:31 PM	SiCl4 post valve closed
7/26/2011	8:52:31 PM	Bypass valve closed
7/26/2011	8:52:31 PM	Bubbler valve closed
7/26/2011	8:52:31 PM	Helium valve opened
7/26/2011	8:52:31 PM	Main Vac valve opened
7/26/2011	8:52:31 PM	Helium MFC set to  20.000000
7/26/2011	8:52:31 PM	H2 MFC set to  0.000000
7/26/2011	8:52:31 PM	BCl3 MFC set to  0.000000
7/26/2011	8:52:31 PM	PHl3 MFC set to  0.000000
7/26/2011	8:52:31 PM	SiCl4 MFC set to  0.000000
7/26/2011	8:52:31 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	8:52:31 PM	Tube furnace set to 0
7/26/2011	8:53:01 PM	Helium valve closed
7/26/2011	8:53:01 PM	H2 valve closed
7/26/2011	8:53:01 PM	BCl3 valve closed
7/26/2011	8:53:01 PM	PH3 valve closed
7/26/2011	8:53:01 PM	SiCl4 pre valve closed
7/26/2011	8:53:01 PM	SiCl4 post valve closed
7/26/2011	8:53:01 PM	Bypass valve closed
7/26/2011	8:53:01 PM	Bubbler valve closed
7/26/2011	8:53:01 PM	Main Vac valve opened
7/26/2011	8:53:01 PM	Helium MFC set to  0.000000
7/26/2011	8:53:01 PM	H2 MFC set to  0.000000
7/26/2011	8:53:01 PM	BCl3 MFC set to  0.000000
7/26/2011	8:53:01 PM	PHl3 MFC set to  0.000000
7/26/2011	8:53:01 PM	SiCl4 MFC set to  0.000000
7/26/2011	8:53:01 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	8:53:01 PM	Tube furnace set to 0
7/26/2011	8:53:31 PM	H2 valve closed
7/26/2011	8:53:31 PM	BCl3 valve closed
7/26/2011	8:53:31 PM	PH3 valve closed
7/26/2011	8:53:31 PM	SiCl4 pre valve closed
7/26/2011	8:53:31 PM	SiCl4 post valve closed
7/26/2011	8:53:31 PM	Bypass valve closed
7/26/2011	8:53:31 PM	Bubbler valve closed
7/26/2011	8:53:31 PM	Helium valve opened
7/26/2011	8:53:31 PM	Main Vac valve opened
7/26/2011	8:53:31 PM	Helium MFC set to  20.000000
7/26/2011	8:53:31 PM	H2 MFC set to  0.000000
7/26/2011	8:53:31 PM	BCl3 MFC set to  0.000000
7/26/2011	8:53:31 PM	PHl3 MFC set to  0.000000
7/26/2011	8:53:31 PM	SiCl4 MFC set to  0.000000
7/26/2011	8:53:31 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	8:53:31 PM	Tube furnace set to 0
7/26/2011	8:54:01 PM	Helium valve closed
7/26/2011	8:54:01 PM	H2 valve closed
7/26/2011	8:54:01 PM	BCl3 valve closed
7/26/2011	8:54:01 PM	PH3 valve closed
7/26/2011	8:54:01 PM	SiCl4 pre valve closed
7/26/2011	8:54:01 PM	SiCl4 post valve closed
7/26/2011	8:54:01 PM	Bypass valve closed
7/26/2011	8:54:01 PM	Bubbler valve closed
7/26/2011	8:54:01 PM	Main Vac valve opened
7/26/2011	8:54:01 PM	Helium MFC set to  0.000000
7/26/2011	8:54:01 PM	H2 MFC set to  0.000000
7/26/2011	8:54:01 PM	BCl3 MFC set to  0.000000
7/26/2011	8:54:01 PM	PHl3 MFC set to  0.000000
7/26/2011	8:54:01 PM	SiCl4 MFC set to  0.000000
7/26/2011	8:54:01 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	8:54:02 PM	Tube furnace set to 0
7/26/2011	8:54:32 PM	H2 valve closed
7/26/2011	8:54:32 PM	BCl3 valve closed
7/26/2011	8:54:32 PM	PH3 valve closed
7/26/2011	8:54:32 PM	SiCl4 pre valve closed
7/26/2011	8:54:32 PM	SiCl4 post valve closed
7/26/2011	8:54:32 PM	Bypass valve closed
7/26/2011	8:54:32 PM	Bubbler valve closed
7/26/2011	8:54:32 PM	Helium valve opened
7/26/2011	8:54:32 PM	Main Vac valve opened
7/26/2011	8:54:32 PM	Helium MFC set to  20.000000
7/26/2011	8:54:32 PM	H2 MFC set to  0.000000
7/26/2011	8:54:32 PM	BCl3 MFC set to  0.000000
7/26/2011	8:54:32 PM	PHl3 MFC set to  0.000000
7/26/2011	8:54:32 PM	SiCl4 MFC set to  0.000000
7/26/2011	8:54:32 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	8:54:32 PM	Tube furnace set to 0
7/26/2011	8:55:02 PM	Helium valve closed
7/26/2011	8:55:02 PM	H2 valve closed
7/26/2011	8:55:02 PM	BCl3 valve closed
7/26/2011	8:55:02 PM	PH3 valve closed
7/26/2011	8:55:02 PM	SiCl4 pre valve closed
7/26/2011	8:55:02 PM	SiCl4 post valve closed
7/26/2011	8:55:02 PM	Bypass valve closed
7/26/2011	8:55:02 PM	Bubbler valve closed
7/26/2011	8:55:02 PM	Main Vac valve opened
7/26/2011	8:55:02 PM	Helium MFC set to  0.000000
7/26/2011	8:55:02 PM	H2 MFC set to  0.000000
7/26/2011	8:55:02 PM	BCl3 MFC set to  0.000000
7/26/2011	8:55:02 PM	PHl3 MFC set to  0.000000
7/26/2011	8:55:02 PM	SiCl4 MFC set to  0.000000
7/26/2011	8:55:02 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	8:55:02 PM	Tube furnace set to 0
7/26/2011	8:55:32 PM	H2 valve closed
7/26/2011	8:55:32 PM	BCl3 valve closed
7/26/2011	8:55:32 PM	PH3 valve closed
7/26/2011	8:55:32 PM	SiCl4 pre valve closed
7/26/2011	8:55:32 PM	SiCl4 post valve closed
7/26/2011	8:55:32 PM	Bypass valve closed
7/26/2011	8:55:32 PM	Bubbler valve closed
7/26/2011	8:55:32 PM	Helium valve opened
7/26/2011	8:55:32 PM	Main Vac valve opened
7/26/2011	8:55:32 PM	Helium MFC set to  20.000000
7/26/2011	8:55:32 PM	H2 MFC set to  0.000000
7/26/2011	8:55:32 PM	BCl3 MFC set to  0.000000
7/26/2011	8:55:32 PM	PHl3 MFC set to  0.000000
7/26/2011	8:55:32 PM	SiCl4 MFC set to  0.000000
7/26/2011	8:55:32 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	8:55:32 PM	Tube furnace set to 0
7/26/2011	8:56:02 PM	Helium valve closed
7/26/2011	8:56:02 PM	H2 valve closed
7/26/2011	8:56:02 PM	BCl3 valve closed
7/26/2011	8:56:02 PM	PH3 valve closed
7/26/2011	8:56:02 PM	SiCl4 pre valve closed
7/26/2011	8:56:02 PM	SiCl4 post valve closed
7/26/2011	8:56:02 PM	Bypass valve closed
7/26/2011	8:56:02 PM	Bubbler valve closed
7/26/2011	8:56:02 PM	Main Vac valve opened
7/26/2011	8:56:02 PM	Helium MFC set to  0.000000
7/26/2011	8:56:02 PM	H2 MFC set to  0.000000
7/26/2011	8:56:02 PM	BCl3 MFC set to  0.000000
7/26/2011	8:56:02 PM	PHl3 MFC set to  0.000000
7/26/2011	8:56:02 PM	SiCl4 MFC set to  0.000000
7/26/2011	8:56:02 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	8:56:02 PM	Tube furnace set to 0
7/26/2011	8:56:32 PM	H2 valve closed
7/26/2011	8:56:32 PM	BCl3 valve closed
7/26/2011	8:56:32 PM	PH3 valve closed
7/26/2011	8:56:32 PM	SiCl4 pre valve closed
7/26/2011	8:56:32 PM	SiCl4 post valve closed
7/26/2011	8:56:32 PM	Bypass valve closed
7/26/2011	8:56:32 PM	Bubbler valve closed
7/26/2011	8:56:32 PM	Helium valve opened
7/26/2011	8:56:32 PM	Main Vac valve opened
7/26/2011	8:56:32 PM	Helium MFC set to  20.000000
7/26/2011	8:56:32 PM	H2 MFC set to  0.000000
7/26/2011	8:56:32 PM	BCl3 MFC set to  0.000000
7/26/2011	8:56:32 PM	PHl3 MFC set to  0.000000
7/26/2011	8:56:32 PM	SiCl4 MFC set to  0.000000
7/26/2011	8:56:32 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	8:56:33 PM	Tube furnace set to 0
7/26/2011	8:57:03 PM	Helium valve closed
7/26/2011	8:57:03 PM	H2 valve closed
7/26/2011	8:57:03 PM	BCl3 valve closed
7/26/2011	8:57:03 PM	PH3 valve closed
7/26/2011	8:57:03 PM	SiCl4 pre valve closed
7/26/2011	8:57:03 PM	SiCl4 post valve closed
7/26/2011	8:57:03 PM	Bypass valve closed
7/26/2011	8:57:03 PM	Bubbler valve closed
7/26/2011	8:57:03 PM	Main Vac valve opened
7/26/2011	8:57:03 PM	Helium MFC set to  0.000000
7/26/2011	8:57:03 PM	H2 MFC set to  0.000000
7/26/2011	8:57:03 PM	BCl3 MFC set to  0.000000
7/26/2011	8:57:03 PM	PHl3 MFC set to  0.000000
7/26/2011	8:57:03 PM	SiCl4 MFC set to  0.000000
7/26/2011	8:57:03 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	8:57:03 PM	Tube furnace set to 0
7/26/2011	8:57:33 PM	H2 valve closed
7/26/2011	8:57:33 PM	BCl3 valve closed
7/26/2011	8:57:33 PM	PH3 valve closed
7/26/2011	8:57:33 PM	SiCl4 pre valve closed
7/26/2011	8:57:33 PM	SiCl4 post valve closed
7/26/2011	8:57:33 PM	Bypass valve closed
7/26/2011	8:57:33 PM	Bubbler valve closed
7/26/2011	8:57:33 PM	Helium valve opened
7/26/2011	8:57:33 PM	Main Vac valve opened
7/26/2011	8:57:33 PM	Helium MFC set to  20.000000
7/26/2011	8:57:33 PM	H2 MFC set to  0.000000
7/26/2011	8:57:33 PM	BCl3 MFC set to  0.000000
7/26/2011	8:57:33 PM	PHl3 MFC set to  0.000000
7/26/2011	8:57:33 PM	SiCl4 MFC set to  0.000000
7/26/2011	8:57:33 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	8:57:33 PM	Tube furnace set to 0
7/26/2011	8:58:03 PM	Helium valve closed
7/26/2011	8:58:03 PM	H2 valve closed
7/26/2011	8:58:03 PM	BCl3 valve closed
7/26/2011	8:58:03 PM	PH3 valve closed
7/26/2011	8:58:03 PM	SiCl4 pre valve closed
7/26/2011	8:58:03 PM	SiCl4 post valve closed
7/26/2011	8:58:03 PM	Bypass valve closed
7/26/2011	8:58:03 PM	Bubbler valve closed
7/26/2011	8:58:03 PM	Main Vac valve opened
7/26/2011	8:58:03 PM	Helium MFC set to  0.000000
7/26/2011	8:58:03 PM	H2 MFC set to  0.000000
7/26/2011	8:58:03 PM	BCl3 MFC set to  0.000000
7/26/2011	8:58:03 PM	PHl3 MFC set to  0.000000
7/26/2011	8:58:03 PM	SiCl4 MFC set to  0.000000
7/26/2011	8:58:03 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	8:58:03 PM	Tube furnace set to 0
7/26/2011	8:58:33 PM	H2 valve closed
7/26/2011	8:58:33 PM	BCl3 valve closed
7/26/2011	8:58:33 PM	PH3 valve closed
7/26/2011	8:58:33 PM	SiCl4 pre valve closed
7/26/2011	8:58:33 PM	SiCl4 post valve closed
7/26/2011	8:58:33 PM	Bypass valve closed
7/26/2011	8:58:33 PM	Bubbler valve closed
7/26/2011	8:58:33 PM	Helium valve opened
7/26/2011	8:58:33 PM	Main Vac valve opened
7/26/2011	8:58:33 PM	Helium MFC set to  20.000000
7/26/2011	8:58:33 PM	H2 MFC set to  0.000000
7/26/2011	8:58:33 PM	BCl3 MFC set to  0.000000
7/26/2011	8:58:33 PM	PHl3 MFC set to  0.000000
7/26/2011	8:58:33 PM	SiCl4 MFC set to  0.000000
7/26/2011	8:58:33 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	8:58:33 PM	Tube furnace set to 0
7/26/2011	8:59:04 PM	Helium valve closed
7/26/2011	8:59:04 PM	H2 valve closed
7/26/2011	8:59:04 PM	BCl3 valve closed
7/26/2011	8:59:04 PM	PH3 valve closed
7/26/2011	8:59:04 PM	SiCl4 pre valve closed
7/26/2011	8:59:04 PM	SiCl4 post valve closed
7/26/2011	8:59:04 PM	Bypass valve closed
7/26/2011	8:59:04 PM	Bubbler valve closed
7/26/2011	8:59:04 PM	Main Vac valve opened
7/26/2011	8:59:04 PM	Helium MFC set to  0.000000
7/26/2011	8:59:04 PM	H2 MFC set to  0.000000
7/26/2011	8:59:04 PM	BCl3 MFC set to  0.000000
7/26/2011	8:59:04 PM	PHl3 MFC set to  0.000000
7/26/2011	8:59:04 PM	SiCl4 MFC set to  0.000000
7/26/2011	8:59:04 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	8:59:04 PM	Tube furnace set to 200
7/26/2011	8:59:34 PM	H2 valve closed
7/26/2011	8:59:34 PM	BCl3 valve closed
7/26/2011	8:59:34 PM	PH3 valve closed
7/26/2011	8:59:34 PM	SiCl4 pre valve closed
7/26/2011	8:59:34 PM	SiCl4 post valve closed
7/26/2011	8:59:34 PM	Bypass valve closed
7/26/2011	8:59:34 PM	Bubbler valve closed
7/26/2011	8:59:34 PM	Helium valve opened
7/26/2011	8:59:34 PM	Main Vac valve opened
7/26/2011	8:59:34 PM	Helium MFC set to  20.000000
7/26/2011	8:59:34 PM	H2 MFC set to  0.000000
7/26/2011	8:59:34 PM	BCl3 MFC set to  0.000000
7/26/2011	8:59:34 PM	PHl3 MFC set to  0.000000
7/26/2011	8:59:34 PM	SiCl4 MFC set to  0.000000
7/26/2011	8:59:34 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	8:59:34 PM	Tube furnace set to 200
7/26/2011	9:00:04 PM	Helium valve closed
7/26/2011	9:00:04 PM	H2 valve closed
7/26/2011	9:00:04 PM	BCl3 valve closed
7/26/2011	9:00:04 PM	PH3 valve closed
7/26/2011	9:00:04 PM	SiCl4 pre valve closed
7/26/2011	9:00:04 PM	SiCl4 post valve closed
7/26/2011	9:00:04 PM	Bypass valve closed
7/26/2011	9:00:04 PM	Bubbler valve closed
7/26/2011	9:00:04 PM	Main Vac valve opened
7/26/2011	9:00:04 PM	Helium MFC set to  0.000000
7/26/2011	9:00:04 PM	H2 MFC set to  0.000000
7/26/2011	9:00:04 PM	BCl3 MFC set to  0.000000
7/26/2011	9:00:04 PM	PHl3 MFC set to  0.000000
7/26/2011	9:00:04 PM	SiCl4 MFC set to  0.000000
7/26/2011	9:00:04 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	9:00:04 PM	Tube furnace set to 200
7/26/2011	9:00:34 PM	H2 valve closed
7/26/2011	9:00:34 PM	BCl3 valve closed
7/26/2011	9:00:34 PM	PH3 valve closed
7/26/2011	9:00:34 PM	SiCl4 pre valve closed
7/26/2011	9:00:34 PM	SiCl4 post valve closed
7/26/2011	9:00:34 PM	Bypass valve closed
7/26/2011	9:00:34 PM	Bubbler valve closed
7/26/2011	9:00:34 PM	Helium valve opened
7/26/2011	9:00:34 PM	Main Vac valve opened
7/26/2011	9:00:34 PM	Helium MFC set to  20.000000
7/26/2011	9:00:34 PM	H2 MFC set to  0.000000
7/26/2011	9:00:34 PM	BCl3 MFC set to  0.000000
7/26/2011	9:00:34 PM	PHl3 MFC set to  0.000000
7/26/2011	9:00:34 PM	SiCl4 MFC set to  0.000000
7/26/2011	9:00:34 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	9:00:34 PM	Tube furnace set to 200
7/26/2011	9:01:04 PM	Helium valve closed
7/26/2011	9:01:04 PM	H2 valve closed
7/26/2011	9:01:04 PM	BCl3 valve closed
7/26/2011	9:01:04 PM	PH3 valve closed
7/26/2011	9:01:04 PM	SiCl4 pre valve closed
7/26/2011	9:01:04 PM	SiCl4 post valve closed
7/26/2011	9:01:04 PM	Bypass valve closed
7/26/2011	9:01:04 PM	Bubbler valve closed
7/26/2011	9:01:04 PM	Main Vac valve opened
7/26/2011	9:01:04 PM	Helium MFC set to  0.000000
7/26/2011	9:01:04 PM	H2 MFC set to  0.000000
7/26/2011	9:01:04 PM	BCl3 MFC set to  0.000000
7/26/2011	9:01:04 PM	PHl3 MFC set to  0.000000
7/26/2011	9:01:04 PM	SiCl4 MFC set to  0.000000
7/26/2011	9:01:04 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	9:01:05 PM	Tube furnace set to 200
7/26/2011	9:01:35 PM	H2 valve closed
7/26/2011	9:01:35 PM	BCl3 valve closed
7/26/2011	9:01:35 PM	PH3 valve closed
7/26/2011	9:01:35 PM	SiCl4 pre valve closed
7/26/2011	9:01:35 PM	SiCl4 post valve closed
7/26/2011	9:01:35 PM	Bypass valve closed
7/26/2011	9:01:35 PM	Bubbler valve closed
7/26/2011	9:01:35 PM	Helium valve opened
7/26/2011	9:01:35 PM	Main Vac valve opened
7/26/2011	9:01:35 PM	Helium MFC set to  20.000000
7/26/2011	9:01:35 PM	H2 MFC set to  0.000000
7/26/2011	9:01:35 PM	BCl3 MFC set to  0.000000
7/26/2011	9:01:35 PM	PHl3 MFC set to  0.000000
7/26/2011	9:01:35 PM	SiCl4 MFC set to  0.000000
7/26/2011	9:01:35 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	9:01:35 PM	Tube furnace set to 200
7/26/2011	9:02:05 PM	Helium valve closed
7/26/2011	9:02:05 PM	H2 valve closed
7/26/2011	9:02:05 PM	BCl3 valve closed
7/26/2011	9:02:05 PM	PH3 valve closed
7/26/2011	9:02:05 PM	SiCl4 pre valve closed
7/26/2011	9:02:05 PM	SiCl4 post valve closed
7/26/2011	9:02:05 PM	Bypass valve closed
7/26/2011	9:02:05 PM	Bubbler valve closed
7/26/2011	9:02:05 PM	Main Vac valve opened
7/26/2011	9:02:05 PM	Helium MFC set to  0.000000
7/26/2011	9:02:05 PM	H2 MFC set to  0.000000
7/26/2011	9:02:05 PM	BCl3 MFC set to  0.000000
7/26/2011	9:02:05 PM	PHl3 MFC set to  0.000000
7/26/2011	9:02:05 PM	SiCl4 MFC set to  0.000000
7/26/2011	9:02:05 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	9:02:05 PM	Tube furnace set to 200
7/26/2011	9:02:35 PM	H2 valve closed
7/26/2011	9:02:35 PM	BCl3 valve closed
7/26/2011	9:02:35 PM	PH3 valve closed
7/26/2011	9:02:35 PM	SiCl4 pre valve closed
7/26/2011	9:02:35 PM	SiCl4 post valve closed
7/26/2011	9:02:35 PM	Bypass valve closed
7/26/2011	9:02:35 PM	Bubbler valve closed
7/26/2011	9:02:35 PM	Helium valve opened
7/26/2011	9:02:35 PM	Main Vac valve opened
7/26/2011	9:02:35 PM	Helium MFC set to  20.000000
7/26/2011	9:02:35 PM	H2 MFC set to  0.000000
7/26/2011	9:02:35 PM	BCl3 MFC set to  0.000000
7/26/2011	9:02:35 PM	PHl3 MFC set to  0.000000
7/26/2011	9:02:35 PM	SiCl4 MFC set to  0.000000
7/26/2011	9:02:35 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	9:02:35 PM	Tube furnace set to 200
7/26/2011	9:03:05 PM	Helium valve closed
7/26/2011	9:03:05 PM	H2 valve closed
7/26/2011	9:03:05 PM	BCl3 valve closed
7/26/2011	9:03:05 PM	PH3 valve closed
7/26/2011	9:03:05 PM	SiCl4 pre valve closed
7/26/2011	9:03:05 PM	SiCl4 post valve closed
7/26/2011	9:03:05 PM	Bypass valve closed
7/26/2011	9:03:05 PM	Bubbler valve closed
7/26/2011	9:03:05 PM	Main Vac valve opened
7/26/2011	9:03:05 PM	Helium MFC set to  0.000000
7/26/2011	9:03:05 PM	H2 MFC set to  0.000000
7/26/2011	9:03:05 PM	BCl3 MFC set to  0.000000
7/26/2011	9:03:05 PM	PHl3 MFC set to  0.000000
7/26/2011	9:03:05 PM	SiCl4 MFC set to  0.000000
7/26/2011	9:03:05 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	9:03:05 PM	Tube furnace set to 200
7/26/2011	9:03:35 PM	H2 valve closed
7/26/2011	9:03:35 PM	BCl3 valve closed
7/26/2011	9:03:35 PM	PH3 valve closed
7/26/2011	9:03:35 PM	SiCl4 pre valve closed
7/26/2011	9:03:35 PM	SiCl4 post valve closed
7/26/2011	9:03:35 PM	Bypass valve closed
7/26/2011	9:03:35 PM	Bubbler valve closed
7/26/2011	9:03:35 PM	Helium valve opened
7/26/2011	9:03:35 PM	Main Vac valve opened
7/26/2011	9:03:35 PM	Helium MFC set to  20.000000
7/26/2011	9:03:35 PM	H2 MFC set to  0.000000
7/26/2011	9:03:35 PM	BCl3 MFC set to  0.000000
7/26/2011	9:03:35 PM	PHl3 MFC set to  0.000000
7/26/2011	9:03:35 PM	SiCl4 MFC set to  0.000000
7/26/2011	9:03:35 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	9:03:36 PM	Tube furnace set to 200
7/26/2011	9:04:06 PM	Helium valve closed
7/26/2011	9:04:06 PM	H2 valve closed
7/26/2011	9:04:06 PM	BCl3 valve closed
7/26/2011	9:04:06 PM	PH3 valve closed
7/26/2011	9:04:06 PM	SiCl4 pre valve closed
7/26/2011	9:04:06 PM	SiCl4 post valve closed
7/26/2011	9:04:06 PM	Bypass valve closed
7/26/2011	9:04:06 PM	Bubbler valve closed
7/26/2011	9:04:06 PM	Main Vac valve opened
7/26/2011	9:04:06 PM	Helium MFC set to  0.000000
7/26/2011	9:04:06 PM	H2 MFC set to  0.000000
7/26/2011	9:04:06 PM	BCl3 MFC set to  0.000000
7/26/2011	9:04:06 PM	PHl3 MFC set to  0.000000
7/26/2011	9:04:06 PM	SiCl4 MFC set to  0.000000
7/26/2011	9:04:06 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	9:04:06 PM	Tube furnace set to 200
7/26/2011	9:04:36 PM	H2 valve closed
7/26/2011	9:04:36 PM	BCl3 valve closed
7/26/2011	9:04:36 PM	PH3 valve closed
7/26/2011	9:04:36 PM	SiCl4 pre valve closed
7/26/2011	9:04:36 PM	SiCl4 post valve closed
7/26/2011	9:04:36 PM	Bypass valve closed
7/26/2011	9:04:36 PM	Bubbler valve closed
7/26/2011	9:04:36 PM	Helium valve opened
7/26/2011	9:04:36 PM	Main Vac valve opened
7/26/2011	9:04:36 PM	Helium MFC set to  20.000000
7/26/2011	9:04:36 PM	H2 MFC set to  0.000000
7/26/2011	9:04:36 PM	BCl3 MFC set to  0.000000
7/26/2011	9:04:36 PM	PHl3 MFC set to  0.000000
7/26/2011	9:04:36 PM	SiCl4 MFC set to  0.000000
7/26/2011	9:04:36 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	9:04:36 PM	Tube furnace set to 200
7/26/2011	9:05:06 PM	Helium valve closed
7/26/2011	9:05:06 PM	H2 valve closed
7/26/2011	9:05:06 PM	BCl3 valve closed
7/26/2011	9:05:06 PM	PH3 valve closed
7/26/2011	9:05:06 PM	SiCl4 pre valve closed
7/26/2011	9:05:06 PM	SiCl4 post valve closed
7/26/2011	9:05:06 PM	Bypass valve closed
7/26/2011	9:05:06 PM	Bubbler valve closed
7/26/2011	9:05:06 PM	Main Vac valve opened
7/26/2011	9:05:06 PM	Helium MFC set to  0.000000
7/26/2011	9:05:06 PM	H2 MFC set to  0.000000
7/26/2011	9:05:06 PM	BCl3 MFC set to  0.000000
7/26/2011	9:05:06 PM	PHl3 MFC set to  0.000000
7/26/2011	9:05:06 PM	SiCl4 MFC set to  0.000000
7/26/2011	9:05:06 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	9:05:06 PM	Tube furnace set to 0
7/26/2011	9:05:07 PM	Run finished at 9:05 PM
7/26/2011	9:22:21 PM	Main Vac valve closed
7/26/2011	9:22:33 PM	Main Vac valve opened
7/26/2011	9:23:01 PM	Recipe started at 9:22 PM
7/26/2011	9:23:01 PM	Helium valve closed
7/26/2011	9:23:01 PM	H2 valve closed
7/26/2011	9:23:01 PM	BCl3 valve closed
7/26/2011	9:23:01 PM	PH3 valve closed
7/26/2011	9:23:01 PM	SiCl4 pre valve closed
7/26/2011	9:23:01 PM	SiCl4 post valve closed
7/26/2011	9:23:01 PM	Main Vac valve closed
7/26/2011	9:23:01 PM	Bypass valve closed
7/26/2011	9:23:01 PM	Bubbler valve closed
7/26/2011	9:23:01 PM	Helium MFC set to  0.000000
7/26/2011	9:23:01 PM	H2 MFC set to  0.000000
7/26/2011	9:23:01 PM	BCl3 MFC set to  0.000000
7/26/2011	9:23:01 PM	PHl3 MFC set to  0.000000
7/26/2011	9:23:01 PM	SiCl4 MFC set to  0.000000
7/26/2011	9:23:01 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	9:23:01 PM	Tube furnace set to 0
7/26/2011	9:23:04 PM	Helium valve closed
7/26/2011	9:23:04 PM	BCl3 valve closed
7/26/2011	9:23:04 PM	PH3 valve closed
7/26/2011	9:23:04 PM	SiCl4 pre valve closed
7/26/2011	9:23:04 PM	SiCl4 post valve closed
7/26/2011	9:23:04 PM	Main Vac valve closed
7/26/2011	9:23:04 PM	Bypass valve closed
7/26/2011	9:23:04 PM	Bubbler valve closed
7/26/2011	9:23:04 PM	H2 valve opened
7/26/2011	9:23:04 PM	Helium MFC set to  0.000000
7/26/2011	9:23:04 PM	H2 MFC set to  500.000000
7/26/2011	9:23:04 PM	BCl3 MFC set to  0.000000
7/26/2011	9:23:04 PM	PHl3 MFC set to  0.000000
7/26/2011	9:23:04 PM	SiCl4 MFC set to  0.000000
7/26/2011	9:23:04 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	9:23:04 PM	Tube furnace set to 0
7/26/2011	9:24:08 PM	Helium valve closed
7/26/2011	9:24:08 PM	BCl3 valve closed
7/26/2011	9:24:08 PM	PH3 valve closed
7/26/2011	9:24:08 PM	SiCl4 pre valve closed
7/26/2011	9:24:08 PM	SiCl4 post valve closed
7/26/2011	9:24:08 PM	Main Vac valve closed
7/26/2011	9:24:08 PM	Bypass valve closed
7/26/2011	9:24:08 PM	H2 valve opened
7/26/2011	9:24:08 PM	Bubbler valve opened
7/26/2011	9:24:08 PM	Helium MFC set to  0.000000
7/26/2011	9:24:08 PM	H2 MFC set to  500.000000
7/26/2011	9:24:08 PM	BCl3 MFC set to  0.000000
7/26/2011	9:24:08 PM	PHl3 MFC set to  0.000000
7/26/2011	9:24:08 PM	SiCl4 MFC set to  0.000000
7/26/2011	9:24:08 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	9:24:08 PM	Tube furnace set to 0
7/26/2011	9:24:09 PM	Helium valve closed
7/26/2011	9:24:09 PM	BCl3 valve closed
7/26/2011	9:24:09 PM	PH3 valve closed
7/26/2011	9:24:09 PM	SiCl4 pre valve closed
7/26/2011	9:24:09 PM	SiCl4 post valve closed
7/26/2011	9:24:09 PM	Main Vac valve closed
7/26/2011	9:24:09 PM	Bypass valve closed
7/26/2011	9:24:09 PM	H2 valve opened
7/26/2011	9:24:09 PM	Bubbler valve opened
7/26/2011	9:24:09 PM	Helium MFC set to  0.000000
7/26/2011	9:24:09 PM	H2 MFC set to  500.000000
7/26/2011	9:24:09 PM	BCl3 MFC set to  0.000000
7/26/2011	9:24:09 PM	PHl3 MFC set to  0.000000
7/26/2011	9:24:09 PM	SiCl4 MFC set to  0.000000
7/26/2011	9:24:09 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	9:24:09 PM	Tube furnace set to 1000
7/26/2011	9:44:09 PM	Helium valve closed
7/26/2011	9:44:09 PM	BCl3 valve closed
7/26/2011	9:44:09 PM	PH3 valve closed
7/26/2011	9:44:09 PM	Main Vac valve closed
7/26/2011	9:44:09 PM	Bypass valve closed
7/26/2011	9:44:09 PM	H2 valve opened
7/26/2011	9:44:09 PM	SiCl4 pre valve opened
7/26/2011	9:44:09 PM	SiCl4 post valve opened
7/26/2011	9:44:09 PM	Bubbler valve opened
7/26/2011	9:44:09 PM	Helium MFC set to  0.000000
7/26/2011	9:44:09 PM	H2 MFC set to  500.000000
7/26/2011	9:44:09 PM	BCl3 MFC set to  0.000000
7/26/2011	9:44:09 PM	PHl3 MFC set to  0.000000
7/26/2011	9:44:09 PM	SiCl4 MFC set to  50.000000
7/26/2011	9:44:09 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	9:44:09 PM	Tube furnace set to 1000
7/26/2011	9:49:09 PM	Helium valve closed
7/26/2011	9:49:09 PM	BCl3 valve closed
7/26/2011	9:49:09 PM	Main Vac valve closed
7/26/2011	9:49:09 PM	Bypass valve closed
7/26/2011	9:49:09 PM	H2 valve opened
7/26/2011	9:49:09 PM	PH3 valve opened
7/26/2011	9:49:09 PM	SiCl4 pre valve opened
7/26/2011	9:49:09 PM	SiCl4 post valve opened
7/26/2011	9:49:09 PM	Bubbler valve opened
7/26/2011	9:49:09 PM	Helium MFC set to  0.000000
7/26/2011	9:49:09 PM	H2 MFC set to  500.000000
7/26/2011	9:49:09 PM	BCl3 MFC set to  0.000000
7/26/2011	9:49:09 PM	PHl3 MFC set to  1.000000
7/26/2011	9:49:09 PM	SiCl4 MFC set to  50.000000
7/26/2011	9:49:09 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	9:49:09 PM	Tube furnace set to 1000
7/26/2011	10:01:09 PM	Helium valve closed
7/26/2011	10:01:09 PM	BCl3 valve closed
7/26/2011	10:01:09 PM	PH3 valve closed
7/26/2011	10:01:09 PM	SiCl4 pre valve closed
7/26/2011	10:01:09 PM	SiCl4 post valve closed
7/26/2011	10:01:09 PM	Main Vac valve closed
7/26/2011	10:01:09 PM	Bypass valve closed
7/26/2011	10:01:09 PM	H2 valve opened
7/26/2011	10:01:09 PM	Bubbler valve opened
7/26/2011	10:01:09 PM	Helium MFC set to  0.000000
7/26/2011	10:01:09 PM	H2 MFC set to  500.000000
7/26/2011	10:01:09 PM	BCl3 MFC set to  0.000000
7/26/2011	10:01:09 PM	PHl3 MFC set to  0.000000
7/26/2011	10:01:09 PM	SiCl4 MFC set to  0.000000
7/26/2011	10:01:09 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	10:01:10 PM	Tube furnace set to 950
7/26/2011	10:03:10 PM	Helium valve closed
7/26/2011	10:03:10 PM	BCl3 valve closed
7/26/2011	10:03:10 PM	PH3 valve closed
7/26/2011	10:03:10 PM	SiCl4 pre valve closed
7/26/2011	10:03:10 PM	SiCl4 post valve closed
7/26/2011	10:03:10 PM	Main Vac valve closed
7/26/2011	10:03:10 PM	Bypass valve closed
7/26/2011	10:03:10 PM	H2 valve opened
7/26/2011	10:03:10 PM	Bubbler valve opened
7/26/2011	10:03:10 PM	Helium MFC set to  0.000000
7/26/2011	10:03:10 PM	H2 MFC set to  500.000000
7/26/2011	10:03:10 PM	BCl3 MFC set to  0.000000
7/26/2011	10:03:10 PM	PHl3 MFC set to  0.000000
7/26/2011	10:03:10 PM	SiCl4 MFC set to  0.000000
7/26/2011	10:03:10 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	10:03:10 PM	Tube furnace set to 900
7/26/2011	10:05:10 PM	Helium valve closed
7/26/2011	10:05:10 PM	BCl3 valve closed
7/26/2011	10:05:10 PM	PH3 valve closed
7/26/2011	10:05:10 PM	SiCl4 pre valve closed
7/26/2011	10:05:10 PM	SiCl4 post valve closed
7/26/2011	10:05:10 PM	Main Vac valve closed
7/26/2011	10:05:10 PM	Bypass valve closed
7/26/2011	10:05:10 PM	H2 valve opened
7/26/2011	10:05:10 PM	Bubbler valve opened
7/26/2011	10:05:10 PM	Helium MFC set to  0.000000
7/26/2011	10:05:10 PM	H2 MFC set to  500.000000
7/26/2011	10:05:10 PM	BCl3 MFC set to  0.000000
7/26/2011	10:05:10 PM	PHl3 MFC set to  0.000000
7/26/2011	10:05:10 PM	SiCl4 MFC set to  0.000000
7/26/2011	10:05:10 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	10:05:10 PM	Tube furnace set to 850
7/26/2011	10:07:10 PM	H2 valve closed
7/26/2011	10:07:10 PM	BCl3 valve closed
7/26/2011	10:07:10 PM	PH3 valve closed
7/26/2011	10:07:10 PM	SiCl4 pre valve closed
7/26/2011	10:07:10 PM	SiCl4 post valve closed
7/26/2011	10:07:10 PM	Main Vac valve closed
7/26/2011	10:07:10 PM	Bypass valve closed
7/26/2011	10:07:10 PM	Helium valve opened
7/26/2011	10:07:10 PM	Bubbler valve opened
7/26/2011	10:07:10 PM	Helium MFC set to  500.000000
7/26/2011	10:07:10 PM	H2 MFC set to  0.000000
7/26/2011	10:07:10 PM	BCl3 MFC set to  0.000000
7/26/2011	10:07:10 PM	PHl3 MFC set to  0.000000
7/26/2011	10:07:10 PM	SiCl4 MFC set to  0.000000
7/26/2011	10:07:10 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	10:07:10 PM	Tube furnace set to 800
7/26/2011	10:09:10 PM	H2 valve closed
7/26/2011	10:09:10 PM	BCl3 valve closed
7/26/2011	10:09:10 PM	PH3 valve closed
7/26/2011	10:09:10 PM	SiCl4 pre valve closed
7/26/2011	10:09:10 PM	SiCl4 post valve closed
7/26/2011	10:09:10 PM	Main Vac valve closed
7/26/2011	10:09:10 PM	Bypass valve closed
7/26/2011	10:09:10 PM	Helium valve opened
7/26/2011	10:09:10 PM	Bubbler valve opened
7/26/2011	10:09:10 PM	Helium MFC set to  500.000000
7/26/2011	10:09:10 PM	H2 MFC set to  0.000000
7/26/2011	10:09:10 PM	BCl3 MFC set to  0.000000
7/26/2011	10:09:10 PM	PHl3 MFC set to  0.000000
7/26/2011	10:09:10 PM	SiCl4 MFC set to  0.000000
7/26/2011	10:09:10 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	10:09:10 PM	Tube furnace set to 750
7/26/2011	10:11:10 PM	H2 valve closed
7/26/2011	10:11:10 PM	BCl3 valve closed
7/26/2011	10:11:10 PM	PH3 valve closed
7/26/2011	10:11:10 PM	SiCl4 pre valve closed
7/26/2011	10:11:10 PM	SiCl4 post valve closed
7/26/2011	10:11:10 PM	Main Vac valve closed
7/26/2011	10:11:10 PM	Bypass valve closed
7/26/2011	10:11:10 PM	Helium valve opened
7/26/2011	10:11:10 PM	Bubbler valve opened
7/26/2011	10:11:10 PM	Helium MFC set to  500.000000
7/26/2011	10:11:10 PM	H2 MFC set to  0.000000
7/26/2011	10:11:10 PM	BCl3 MFC set to  0.000000
7/26/2011	10:11:10 PM	PHl3 MFC set to  0.000000
7/26/2011	10:11:10 PM	SiCl4 MFC set to  0.000000
7/26/2011	10:11:10 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	10:11:11 PM	Tube furnace set to 0
7/26/2011	10:31:11 PM	Helium valve closed
7/26/2011	10:31:11 PM	H2 valve closed
7/26/2011	10:31:11 PM	BCl3 valve closed
7/26/2011	10:31:11 PM	PH3 valve closed
7/26/2011	10:31:11 PM	SiCl4 pre valve closed
7/26/2011	10:31:11 PM	SiCl4 post valve closed
7/26/2011	10:31:11 PM	Main Vac valve closed
7/26/2011	10:31:11 PM	Bypass valve closed
7/26/2011	10:31:11 PM	Bubbler valve closed
7/26/2011	10:31:11 PM	Helium MFC set to  0.000000
7/26/2011	10:31:11 PM	H2 MFC set to  0.000000
7/26/2011	10:31:11 PM	BCl3 MFC set to  0.000000
7/26/2011	10:31:11 PM	PHl3 MFC set to  0.000000
7/26/2011	10:31:11 PM	SiCl4 MFC set to  0.000000
7/26/2011	10:31:11 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	10:31:11 PM	Tube furnace set to 0
7/26/2011	10:31:12 PM	Run finished at 10:31 PM
7/26/2011	10:37:04 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/26/2011	10:37:05 PM	Recipe started at 10:37 PM
7/26/2011	10:37:05 PM	Helium valve closed
7/26/2011	10:37:05 PM	H2 valve closed
7/26/2011	10:37:05 PM	BCl3 valve closed
7/26/2011	10:37:05 PM	PH3 valve closed
7/26/2011	10:37:05 PM	SiCl4 pre valve closed
7/26/2011	10:37:05 PM	SiCl4 post valve closed
7/26/2011	10:37:05 PM	Main Vac valve closed
7/26/2011	10:37:05 PM	Bypass valve closed
7/26/2011	10:37:05 PM	Bubbler valve closed
7/26/2011	10:37:05 PM	Helium MFC set to  0.000000
7/26/2011	10:37:05 PM	H2 MFC set to  0.000000
7/26/2011	10:37:05 PM	BCl3 MFC set to  0.000000
7/26/2011	10:37:05 PM	PHl3 MFC set to  0.000000
7/26/2011	10:37:05 PM	SiCl4 MFC set to  0.000000
7/26/2011	10:37:05 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	10:37:05 PM	Tube furnace set to 0
7/26/2011	10:37:08 PM	H2 valve closed
7/26/2011	10:37:08 PM	BCl3 valve closed
7/26/2011	10:37:08 PM	PH3 valve closed
7/26/2011	10:37:08 PM	SiCl4 pre valve closed
7/26/2011	10:37:08 PM	SiCl4 post valve closed
7/26/2011	10:37:08 PM	Main Vac valve closed
7/26/2011	10:37:08 PM	Bypass valve closed
7/26/2011	10:37:08 PM	Bubbler valve closed
7/26/2011	10:37:08 PM	Helium valve opened
7/26/2011	10:37:08 PM	Helium MFC set to  500.000000
7/26/2011	10:37:08 PM	H2 MFC set to  0.000000
7/26/2011	10:37:08 PM	BCl3 MFC set to  0.000000
7/26/2011	10:37:08 PM	PHl3 MFC set to  0.000000
7/26/2011	10:37:08 PM	SiCl4 MFC set to  0.000000
7/26/2011	10:37:08 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	10:37:08 PM	Tube furnace set to 0
7/26/2011	10:37:09 PM	Helium valve closed
7/26/2011	10:37:09 PM	H2 valve closed
7/26/2011	10:37:09 PM	BCl3 valve closed
7/26/2011	10:37:09 PM	PH3 valve closed
7/26/2011	10:37:09 PM	SiCl4 pre valve closed
7/26/2011	10:37:09 PM	SiCl4 post valve closed
7/26/2011	10:37:09 PM	Main Vac valve closed
7/26/2011	10:37:09 PM	Bypass valve closed
7/26/2011	10:37:09 PM	Bubbler valve closed
7/26/2011	10:37:09 PM	Helium MFC set to  0.000000
7/26/2011	10:37:09 PM	H2 MFC set to  0.000000
7/26/2011	10:37:09 PM	BCl3 MFC set to  0.000000
7/26/2011	10:37:09 PM	PHl3 MFC set to  0.000000
7/26/2011	10:37:09 PM	SiCl4 MFC set to  0.000000
7/26/2011	10:37:09 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	10:37:09 PM	Tube furnace set to 0
7/26/2011	10:37:10 PM	Run finished at 10:37 PM
7/26/2011	10:37:10 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/26/2011	10:40:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/26/2011	10:40:16 PM	Recipe started at 10:40 PM
7/26/2011	10:40:16 PM	Helium valve closed
7/26/2011	10:40:16 PM	H2 valve closed
7/26/2011	10:40:16 PM	BCl3 valve closed
7/26/2011	10:40:16 PM	PH3 valve closed
7/26/2011	10:40:16 PM	SiCl4 pre valve closed
7/26/2011	10:40:16 PM	SiCl4 post valve closed
7/26/2011	10:40:16 PM	Main Vac valve closed
7/26/2011	10:40:16 PM	Bubbler valve closed
7/26/2011	10:40:16 PM	Bypass valve opened
7/26/2011	10:40:16 PM	Helium MFC set to  0.000000
7/26/2011	10:40:16 PM	H2 MFC set to  0.000000
7/26/2011	10:40:16 PM	BCl3 MFC set to  0.000000
7/26/2011	10:40:16 PM	PHl3 MFC set to  0.000000
7/26/2011	10:40:16 PM	SiCl4 MFC set to  0.000000
7/26/2011	10:40:16 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	10:40:17 PM	Tube furnace set to 0
7/26/2011	10:41:19 PM	Helium valve closed
7/26/2011	10:41:19 PM	H2 valve closed
7/26/2011	10:41:19 PM	BCl3 valve closed
7/26/2011	10:41:19 PM	PH3 valve closed
7/26/2011	10:41:19 PM	SiCl4 pre valve closed
7/26/2011	10:41:19 PM	SiCl4 post valve closed
7/26/2011	10:41:19 PM	Main Vac valve closed
7/26/2011	10:41:19 PM	Bubbler valve closed
7/26/2011	10:41:19 PM	Bypass valve opened
7/26/2011	10:41:19 PM	Helium MFC set to  0.000000
7/26/2011	10:41:19 PM	H2 MFC set to  0.000000
7/26/2011	10:41:19 PM	BCl3 MFC set to  0.000000
7/26/2011	10:41:19 PM	PHl3 MFC set to  0.000000
7/26/2011	10:41:19 PM	SiCl4 MFC set to  0.000000
7/26/2011	10:41:19 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	10:41:19 PM	Tube furnace set to 0
7/26/2011	10:42:19 PM	Helium valve closed
7/26/2011	10:42:19 PM	H2 valve closed
7/26/2011	10:42:19 PM	BCl3 valve closed
7/26/2011	10:42:19 PM	PH3 valve closed
7/26/2011	10:42:19 PM	SiCl4 pre valve closed
7/26/2011	10:42:19 PM	SiCl4 post valve closed
7/26/2011	10:42:19 PM	Bypass valve closed
7/26/2011	10:42:19 PM	Bubbler valve closed
7/26/2011	10:42:19 PM	Main Vac valve opened
7/26/2011	10:42:19 PM	Helium MFC set to  0.000000
7/26/2011	10:42:19 PM	H2 MFC set to  0.000000
7/26/2011	10:42:19 PM	BCl3 MFC set to  0.000000
7/26/2011	10:42:19 PM	PHl3 MFC set to  0.000000
7/26/2011	10:42:19 PM	SiCl4 MFC set to  0.000000
7/26/2011	10:42:19 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	10:42:19 PM	Tube furnace set to 0
7/26/2011	10:42:20 PM	Run finished at 10:42 PM
7/26/2011	10:42:20 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/26/2011	10:57:33 PM	Main Vac valve closed
7/26/2011	10:57:39 PM	Main Vac valve opened
7/26/2011	10:57:54 PM	Recipe started at 10:57 PM
7/26/2011	10:57:54 PM	Helium valve closed
7/26/2011	10:57:54 PM	H2 valve closed
7/26/2011	10:57:54 PM	BCl3 valve closed
7/26/2011	10:57:54 PM	PH3 valve closed
7/26/2011	10:57:54 PM	SiCl4 pre valve closed
7/26/2011	10:57:54 PM	SiCl4 post valve closed
7/26/2011	10:57:54 PM	Bypass valve closed
7/26/2011	10:57:54 PM	Bubbler valve closed
7/26/2011	10:57:54 PM	Main Vac valve opened
7/26/2011	10:57:54 PM	Helium MFC set to  0.000000
7/26/2011	10:57:54 PM	H2 MFC set to  0.000000
7/26/2011	10:57:54 PM	BCl3 MFC set to  0.000000
7/26/2011	10:57:54 PM	PHl3 MFC set to  0.000000
7/26/2011	10:57:54 PM	SiCl4 MFC set to  0.000000
7/26/2011	10:57:54 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	10:57:54 PM	Tube furnace set to 0
7/26/2011	10:58:24 PM	H2 valve closed
7/26/2011	10:58:24 PM	BCl3 valve closed
7/26/2011	10:58:24 PM	PH3 valve closed
7/26/2011	10:58:24 PM	SiCl4 pre valve closed
7/26/2011	10:58:24 PM	SiCl4 post valve closed
7/26/2011	10:58:24 PM	Bypass valve closed
7/26/2011	10:58:24 PM	Bubbler valve closed
7/26/2011	10:58:24 PM	Helium valve opened
7/26/2011	10:58:24 PM	Main Vac valve opened
7/26/2011	10:58:24 PM	Helium MFC set to  20.000000
7/26/2011	10:58:24 PM	H2 MFC set to  0.000000
7/26/2011	10:58:24 PM	BCl3 MFC set to  0.000000
7/26/2011	10:58:24 PM	PHl3 MFC set to  0.000000
7/26/2011	10:58:24 PM	SiCl4 MFC set to  0.000000
7/26/2011	10:58:24 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	10:58:24 PM	Tube furnace set to 0
7/26/2011	10:58:54 PM	Helium valve closed
7/26/2011	10:58:54 PM	H2 valve closed
7/26/2011	10:58:54 PM	BCl3 valve closed
7/26/2011	10:58:54 PM	PH3 valve closed
7/26/2011	10:58:54 PM	SiCl4 pre valve closed
7/26/2011	10:58:54 PM	SiCl4 post valve closed
7/26/2011	10:58:54 PM	Bypass valve closed
7/26/2011	10:58:54 PM	Bubbler valve closed
7/26/2011	10:58:54 PM	Main Vac valve opened
7/26/2011	10:58:54 PM	Helium MFC set to  0.000000
7/26/2011	10:58:54 PM	H2 MFC set to  0.000000
7/26/2011	10:58:54 PM	BCl3 MFC set to  0.000000
7/26/2011	10:58:54 PM	PHl3 MFC set to  0.000000
7/26/2011	10:58:54 PM	SiCl4 MFC set to  0.000000
7/26/2011	10:58:54 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	10:58:54 PM	Tube furnace set to 0
7/26/2011	10:59:24 PM	H2 valve closed
7/26/2011	10:59:24 PM	BCl3 valve closed
7/26/2011	10:59:24 PM	PH3 valve closed
7/26/2011	10:59:24 PM	SiCl4 pre valve closed
7/26/2011	10:59:24 PM	SiCl4 post valve closed
7/26/2011	10:59:24 PM	Bypass valve closed
7/26/2011	10:59:24 PM	Bubbler valve closed
7/26/2011	10:59:24 PM	Helium valve opened
7/26/2011	10:59:24 PM	Main Vac valve opened
7/26/2011	10:59:24 PM	Helium MFC set to  20.000000
7/26/2011	10:59:24 PM	H2 MFC set to  0.000000
7/26/2011	10:59:24 PM	BCl3 MFC set to  0.000000
7/26/2011	10:59:24 PM	PHl3 MFC set to  0.000000
7/26/2011	10:59:24 PM	SiCl4 MFC set to  0.000000
7/26/2011	10:59:24 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	10:59:25 PM	Tube furnace set to 0
7/26/2011	10:59:55 PM	Helium valve closed
7/26/2011	10:59:55 PM	H2 valve closed
7/26/2011	10:59:55 PM	BCl3 valve closed
7/26/2011	10:59:55 PM	PH3 valve closed
7/26/2011	10:59:55 PM	SiCl4 pre valve closed
7/26/2011	10:59:55 PM	SiCl4 post valve closed
7/26/2011	10:59:55 PM	Bypass valve closed
7/26/2011	10:59:55 PM	Bubbler valve closed
7/26/2011	10:59:55 PM	Main Vac valve opened
7/26/2011	10:59:55 PM	Helium MFC set to  0.000000
7/26/2011	10:59:55 PM	H2 MFC set to  0.000000
7/26/2011	10:59:55 PM	BCl3 MFC set to  0.000000
7/26/2011	10:59:55 PM	PHl3 MFC set to  0.000000
7/26/2011	10:59:55 PM	SiCl4 MFC set to  0.000000
7/26/2011	10:59:55 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	10:59:55 PM	Tube furnace set to 0
7/26/2011	11:00:25 PM	H2 valve closed
7/26/2011	11:00:25 PM	BCl3 valve closed
7/26/2011	11:00:25 PM	PH3 valve closed
7/26/2011	11:00:25 PM	SiCl4 pre valve closed
7/26/2011	11:00:25 PM	SiCl4 post valve closed
7/26/2011	11:00:25 PM	Bypass valve closed
7/26/2011	11:00:25 PM	Bubbler valve closed
7/26/2011	11:00:25 PM	Helium valve opened
7/26/2011	11:00:25 PM	Main Vac valve opened
7/26/2011	11:00:25 PM	Helium MFC set to  20.000000
7/26/2011	11:00:25 PM	H2 MFC set to  0.000000
7/26/2011	11:00:25 PM	BCl3 MFC set to  0.000000
7/26/2011	11:00:25 PM	PHl3 MFC set to  0.000000
7/26/2011	11:00:25 PM	SiCl4 MFC set to  0.000000
7/26/2011	11:00:25 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	11:00:25 PM	Tube furnace set to 0
7/26/2011	11:00:55 PM	Helium valve closed
7/26/2011	11:00:55 PM	H2 valve closed
7/26/2011	11:00:55 PM	BCl3 valve closed
7/26/2011	11:00:55 PM	PH3 valve closed
7/26/2011	11:00:55 PM	SiCl4 pre valve closed
7/26/2011	11:00:55 PM	SiCl4 post valve closed
7/26/2011	11:00:55 PM	Bypass valve closed
7/26/2011	11:00:55 PM	Bubbler valve closed
7/26/2011	11:00:55 PM	Main Vac valve opened
7/26/2011	11:00:55 PM	Helium MFC set to  0.000000
7/26/2011	11:00:55 PM	H2 MFC set to  0.000000
7/26/2011	11:00:55 PM	BCl3 MFC set to  0.000000
7/26/2011	11:00:55 PM	PHl3 MFC set to  0.000000
7/26/2011	11:00:55 PM	SiCl4 MFC set to  0.000000
7/26/2011	11:00:55 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	11:00:55 PM	Tube furnace set to 0
7/26/2011	11:01:25 PM	H2 valve closed
7/26/2011	11:01:25 PM	BCl3 valve closed
7/26/2011	11:01:25 PM	PH3 valve closed
7/26/2011	11:01:25 PM	SiCl4 pre valve closed
7/26/2011	11:01:25 PM	SiCl4 post valve closed
7/26/2011	11:01:25 PM	Bypass valve closed
7/26/2011	11:01:25 PM	Bubbler valve closed
7/26/2011	11:01:25 PM	Helium valve opened
7/26/2011	11:01:25 PM	Main Vac valve opened
7/26/2011	11:01:25 PM	Helium MFC set to  20.000000
7/26/2011	11:01:25 PM	H2 MFC set to  0.000000
7/26/2011	11:01:25 PM	BCl3 MFC set to  0.000000
7/26/2011	11:01:25 PM	PHl3 MFC set to  0.000000
7/26/2011	11:01:25 PM	SiCl4 MFC set to  0.000000
7/26/2011	11:01:25 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	11:01:25 PM	Tube furnace set to 0
7/26/2011	11:01:55 PM	Helium valve closed
7/26/2011	11:01:55 PM	H2 valve closed
7/26/2011	11:01:55 PM	BCl3 valve closed
7/26/2011	11:01:55 PM	PH3 valve closed
7/26/2011	11:01:55 PM	SiCl4 pre valve closed
7/26/2011	11:01:55 PM	SiCl4 post valve closed
7/26/2011	11:01:55 PM	Bypass valve closed
7/26/2011	11:01:55 PM	Bubbler valve closed
7/26/2011	11:01:55 PM	Main Vac valve opened
7/26/2011	11:01:55 PM	Helium MFC set to  0.000000
7/26/2011	11:01:55 PM	H2 MFC set to  0.000000
7/26/2011	11:01:55 PM	BCl3 MFC set to  0.000000
7/26/2011	11:01:55 PM	PHl3 MFC set to  0.000000
7/26/2011	11:01:55 PM	SiCl4 MFC set to  0.000000
7/26/2011	11:01:55 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	11:01:56 PM	Tube furnace set to 0
7/26/2011	11:02:26 PM	H2 valve closed
7/26/2011	11:02:26 PM	BCl3 valve closed
7/26/2011	11:02:26 PM	PH3 valve closed
7/26/2011	11:02:26 PM	SiCl4 pre valve closed
7/26/2011	11:02:26 PM	SiCl4 post valve closed
7/26/2011	11:02:26 PM	Bypass valve closed
7/26/2011	11:02:26 PM	Bubbler valve closed
7/26/2011	11:02:26 PM	Helium valve opened
7/26/2011	11:02:26 PM	Main Vac valve opened
7/26/2011	11:02:26 PM	Helium MFC set to  20.000000
7/26/2011	11:02:26 PM	H2 MFC set to  0.000000
7/26/2011	11:02:26 PM	BCl3 MFC set to  0.000000
7/26/2011	11:02:26 PM	PHl3 MFC set to  0.000000
7/26/2011	11:02:26 PM	SiCl4 MFC set to  0.000000
7/26/2011	11:02:26 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	11:02:26 PM	Tube furnace set to 0
7/26/2011	11:02:56 PM	Helium valve closed
7/26/2011	11:02:56 PM	H2 valve closed
7/26/2011	11:02:56 PM	BCl3 valve closed
7/26/2011	11:02:56 PM	PH3 valve closed
7/26/2011	11:02:56 PM	SiCl4 pre valve closed
7/26/2011	11:02:56 PM	SiCl4 post valve closed
7/26/2011	11:02:56 PM	Bypass valve closed
7/26/2011	11:02:56 PM	Bubbler valve closed
7/26/2011	11:02:56 PM	Main Vac valve opened
7/26/2011	11:02:56 PM	Helium MFC set to  0.000000
7/26/2011	11:02:56 PM	H2 MFC set to  0.000000
7/26/2011	11:02:56 PM	BCl3 MFC set to  0.000000
7/26/2011	11:02:56 PM	PHl3 MFC set to  0.000000
7/26/2011	11:02:56 PM	SiCl4 MFC set to  0.000000
7/26/2011	11:02:56 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	11:02:56 PM	Tube furnace set to 0
7/26/2011	11:03:26 PM	H2 valve closed
7/26/2011	11:03:26 PM	BCl3 valve closed
7/26/2011	11:03:26 PM	PH3 valve closed
7/26/2011	11:03:26 PM	SiCl4 pre valve closed
7/26/2011	11:03:26 PM	SiCl4 post valve closed
7/26/2011	11:03:26 PM	Bypass valve closed
7/26/2011	11:03:26 PM	Bubbler valve closed
7/26/2011	11:03:26 PM	Helium valve opened
7/26/2011	11:03:26 PM	Main Vac valve opened
7/26/2011	11:03:26 PM	Helium MFC set to  20.000000
7/26/2011	11:03:26 PM	H2 MFC set to  0.000000
7/26/2011	11:03:26 PM	BCl3 MFC set to  0.000000
7/26/2011	11:03:26 PM	PHl3 MFC set to  0.000000
7/26/2011	11:03:26 PM	SiCl4 MFC set to  0.000000
7/26/2011	11:03:26 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	11:03:26 PM	Tube furnace set to 0
7/26/2011	11:03:56 PM	Helium valve closed
7/26/2011	11:03:56 PM	H2 valve closed
7/26/2011	11:03:56 PM	BCl3 valve closed
7/26/2011	11:03:56 PM	PH3 valve closed
7/26/2011	11:03:56 PM	SiCl4 pre valve closed
7/26/2011	11:03:56 PM	SiCl4 post valve closed
7/26/2011	11:03:56 PM	Bypass valve closed
7/26/2011	11:03:56 PM	Bubbler valve closed
7/26/2011	11:03:56 PM	Main Vac valve opened
7/26/2011	11:03:56 PM	Helium MFC set to  0.000000
7/26/2011	11:03:56 PM	H2 MFC set to  0.000000
7/26/2011	11:03:56 PM	BCl3 MFC set to  0.000000
7/26/2011	11:03:56 PM	PHl3 MFC set to  0.000000
7/26/2011	11:03:56 PM	SiCl4 MFC set to  0.000000
7/26/2011	11:03:56 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	11:03:56 PM	Tube furnace set to 0
7/26/2011	11:04:26 PM	H2 valve closed
7/26/2011	11:04:26 PM	BCl3 valve closed
7/26/2011	11:04:26 PM	PH3 valve closed
7/26/2011	11:04:26 PM	SiCl4 pre valve closed
7/26/2011	11:04:26 PM	SiCl4 post valve closed
7/26/2011	11:04:26 PM	Bypass valve closed
7/26/2011	11:04:26 PM	Bubbler valve closed
7/26/2011	11:04:26 PM	Helium valve opened
7/26/2011	11:04:26 PM	Main Vac valve opened
7/26/2011	11:04:26 PM	Helium MFC set to  20.000000
7/26/2011	11:04:26 PM	H2 MFC set to  0.000000
7/26/2011	11:04:26 PM	BCl3 MFC set to  0.000000
7/26/2011	11:04:26 PM	PHl3 MFC set to  0.000000
7/26/2011	11:04:26 PM	SiCl4 MFC set to  0.000000
7/26/2011	11:04:26 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	11:04:27 PM	Tube furnace set to 0
7/26/2011	11:04:57 PM	Helium valve closed
7/26/2011	11:04:57 PM	H2 valve closed
7/26/2011	11:04:57 PM	BCl3 valve closed
7/26/2011	11:04:57 PM	PH3 valve closed
7/26/2011	11:04:57 PM	SiCl4 pre valve closed
7/26/2011	11:04:57 PM	SiCl4 post valve closed
7/26/2011	11:04:57 PM	Bypass valve closed
7/26/2011	11:04:57 PM	Bubbler valve closed
7/26/2011	11:04:57 PM	Main Vac valve opened
7/26/2011	11:04:57 PM	Helium MFC set to  0.000000
7/26/2011	11:04:57 PM	H2 MFC set to  0.000000
7/26/2011	11:04:57 PM	BCl3 MFC set to  0.000000
7/26/2011	11:04:57 PM	PHl3 MFC set to  0.000000
7/26/2011	11:04:57 PM	SiCl4 MFC set to  0.000000
7/26/2011	11:04:57 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	11:04:57 PM	Tube furnace set to 0
7/26/2011	11:05:27 PM	H2 valve closed
7/26/2011	11:05:27 PM	BCl3 valve closed
7/26/2011	11:05:27 PM	PH3 valve closed
7/26/2011	11:05:27 PM	SiCl4 pre valve closed
7/26/2011	11:05:27 PM	SiCl4 post valve closed
7/26/2011	11:05:27 PM	Bypass valve closed
7/26/2011	11:05:27 PM	Bubbler valve closed
7/26/2011	11:05:27 PM	Helium valve opened
7/26/2011	11:05:27 PM	Main Vac valve opened
7/26/2011	11:05:27 PM	Helium MFC set to  20.000000
7/26/2011	11:05:27 PM	H2 MFC set to  0.000000
7/26/2011	11:05:27 PM	BCl3 MFC set to  0.000000
7/26/2011	11:05:27 PM	PHl3 MFC set to  0.000000
7/26/2011	11:05:27 PM	SiCl4 MFC set to  0.000000
7/26/2011	11:05:27 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	11:05:27 PM	Tube furnace set to 0
7/26/2011	11:05:57 PM	Helium valve closed
7/26/2011	11:05:57 PM	H2 valve closed
7/26/2011	11:05:57 PM	BCl3 valve closed
7/26/2011	11:05:57 PM	PH3 valve closed
7/26/2011	11:05:57 PM	SiCl4 pre valve closed
7/26/2011	11:05:57 PM	SiCl4 post valve closed
7/26/2011	11:05:57 PM	Bypass valve closed
7/26/2011	11:05:57 PM	Bubbler valve closed
7/26/2011	11:05:57 PM	Main Vac valve opened
7/26/2011	11:05:57 PM	Helium MFC set to  0.000000
7/26/2011	11:05:57 PM	H2 MFC set to  0.000000
7/26/2011	11:05:57 PM	BCl3 MFC set to  0.000000
7/26/2011	11:05:57 PM	PHl3 MFC set to  0.000000
7/26/2011	11:05:57 PM	SiCl4 MFC set to  0.000000
7/26/2011	11:05:57 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	11:05:57 PM	Tube furnace set to 0
7/26/2011	11:06:27 PM	H2 valve closed
7/26/2011	11:06:27 PM	BCl3 valve closed
7/26/2011	11:06:27 PM	PH3 valve closed
7/26/2011	11:06:27 PM	SiCl4 pre valve closed
7/26/2011	11:06:27 PM	SiCl4 post valve closed
7/26/2011	11:06:27 PM	Bypass valve closed
7/26/2011	11:06:27 PM	Bubbler valve closed
7/26/2011	11:06:27 PM	Helium valve opened
7/26/2011	11:06:27 PM	Main Vac valve opened
7/26/2011	11:06:27 PM	Helium MFC set to  20.000000
7/26/2011	11:06:27 PM	H2 MFC set to  0.000000
7/26/2011	11:06:27 PM	BCl3 MFC set to  0.000000
7/26/2011	11:06:27 PM	PHl3 MFC set to  0.000000
7/26/2011	11:06:27 PM	SiCl4 MFC set to  0.000000
7/26/2011	11:06:27 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	11:06:27 PM	Tube furnace set to 0
7/26/2011	11:06:57 PM	Helium valve closed
7/26/2011	11:06:57 PM	H2 valve closed
7/26/2011	11:06:57 PM	BCl3 valve closed
7/26/2011	11:06:57 PM	PH3 valve closed
7/26/2011	11:06:57 PM	SiCl4 pre valve closed
7/26/2011	11:06:57 PM	SiCl4 post valve closed
7/26/2011	11:06:57 PM	Bypass valve closed
7/26/2011	11:06:58 PM	Bubbler valve closed
7/26/2011	11:06:58 PM	Main Vac valve opened
7/26/2011	11:06:58 PM	Helium MFC set to  0.000000
7/26/2011	11:06:58 PM	H2 MFC set to  0.000000
7/26/2011	11:06:58 PM	BCl3 MFC set to  0.000000
7/26/2011	11:06:58 PM	PHl3 MFC set to  0.000000
7/26/2011	11:06:58 PM	SiCl4 MFC set to  0.000000
7/26/2011	11:06:58 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	11:06:58 PM	Tube furnace set to 200
7/26/2011	11:07:28 PM	H2 valve closed
7/26/2011	11:07:28 PM	BCl3 valve closed
7/26/2011	11:07:28 PM	PH3 valve closed
7/26/2011	11:07:28 PM	SiCl4 pre valve closed
7/26/2011	11:07:28 PM	SiCl4 post valve closed
7/26/2011	11:07:28 PM	Bypass valve closed
7/26/2011	11:07:28 PM	Bubbler valve closed
7/26/2011	11:07:28 PM	Helium valve opened
7/26/2011	11:07:28 PM	Main Vac valve opened
7/26/2011	11:07:28 PM	Helium MFC set to  20.000000
7/26/2011	11:07:28 PM	H2 MFC set to  0.000000
7/26/2011	11:07:28 PM	BCl3 MFC set to  0.000000
7/26/2011	11:07:28 PM	PHl3 MFC set to  0.000000
7/26/2011	11:07:28 PM	SiCl4 MFC set to  0.000000
7/26/2011	11:07:28 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	11:07:28 PM	Tube furnace set to 200
7/26/2011	11:07:58 PM	Helium valve closed
7/26/2011	11:07:58 PM	H2 valve closed
7/26/2011	11:07:58 PM	BCl3 valve closed
7/26/2011	11:07:58 PM	PH3 valve closed
7/26/2011	11:07:58 PM	SiCl4 pre valve closed
7/26/2011	11:07:58 PM	SiCl4 post valve closed
7/26/2011	11:07:58 PM	Bypass valve closed
7/26/2011	11:07:58 PM	Bubbler valve closed
7/26/2011	11:07:58 PM	Main Vac valve opened
7/26/2011	11:07:58 PM	Helium MFC set to  0.000000
7/26/2011	11:07:58 PM	H2 MFC set to  0.000000
7/26/2011	11:07:58 PM	BCl3 MFC set to  0.000000
7/26/2011	11:07:58 PM	PHl3 MFC set to  0.000000
7/26/2011	11:07:58 PM	SiCl4 MFC set to  0.000000
7/26/2011	11:07:58 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	11:07:58 PM	Tube furnace set to 200
7/26/2011	11:08:28 PM	H2 valve closed
7/26/2011	11:08:28 PM	BCl3 valve closed
7/26/2011	11:08:28 PM	PH3 valve closed
7/26/2011	11:08:28 PM	SiCl4 pre valve closed
7/26/2011	11:08:28 PM	SiCl4 post valve closed
7/26/2011	11:08:28 PM	Bypass valve closed
7/26/2011	11:08:28 PM	Bubbler valve closed
7/26/2011	11:08:28 PM	Helium valve opened
7/26/2011	11:08:28 PM	Main Vac valve opened
7/26/2011	11:08:28 PM	Helium MFC set to  20.000000
7/26/2011	11:08:28 PM	H2 MFC set to  0.000000
7/26/2011	11:08:28 PM	BCl3 MFC set to  0.000000
7/26/2011	11:08:28 PM	PHl3 MFC set to  0.000000
7/26/2011	11:08:28 PM	SiCl4 MFC set to  0.000000
7/26/2011	11:08:28 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	11:08:28 PM	Tube furnace set to 200
7/26/2011	11:08:58 PM	Helium valve closed
7/26/2011	11:08:58 PM	H2 valve closed
7/26/2011	11:08:58 PM	BCl3 valve closed
7/26/2011	11:08:58 PM	PH3 valve closed
7/26/2011	11:08:58 PM	SiCl4 pre valve closed
7/26/2011	11:08:58 PM	SiCl4 post valve closed
7/26/2011	11:08:58 PM	Bypass valve closed
7/26/2011	11:08:58 PM	Bubbler valve closed
7/26/2011	11:08:58 PM	Main Vac valve opened
7/26/2011	11:08:58 PM	Helium MFC set to  0.000000
7/26/2011	11:08:58 PM	H2 MFC set to  0.000000
7/26/2011	11:08:58 PM	BCl3 MFC set to  0.000000
7/26/2011	11:08:58 PM	PHl3 MFC set to  0.000000
7/26/2011	11:08:58 PM	SiCl4 MFC set to  0.000000
7/26/2011	11:08:58 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	11:08:58 PM	Tube furnace set to 200
7/26/2011	11:09:28 PM	H2 valve closed
7/26/2011	11:09:28 PM	BCl3 valve closed
7/26/2011	11:09:28 PM	PH3 valve closed
7/26/2011	11:09:28 PM	SiCl4 pre valve closed
7/26/2011	11:09:28 PM	SiCl4 post valve closed
7/26/2011	11:09:28 PM	Bypass valve closed
7/26/2011	11:09:28 PM	Bubbler valve closed
7/26/2011	11:09:28 PM	Helium valve opened
7/26/2011	11:09:29 PM	Main Vac valve opened
7/26/2011	11:09:29 PM	Helium MFC set to  20.000000
7/26/2011	11:09:29 PM	H2 MFC set to  0.000000
7/26/2011	11:09:29 PM	BCl3 MFC set to  0.000000
7/26/2011	11:09:29 PM	PHl3 MFC set to  0.000000
7/26/2011	11:09:29 PM	SiCl4 MFC set to  0.000000
7/26/2011	11:09:29 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	11:09:29 PM	Tube furnace set to 200
7/26/2011	11:09:59 PM	Helium valve closed
7/26/2011	11:09:59 PM	H2 valve closed
7/26/2011	11:09:59 PM	BCl3 valve closed
7/26/2011	11:09:59 PM	PH3 valve closed
7/26/2011	11:09:59 PM	SiCl4 pre valve closed
7/26/2011	11:09:59 PM	SiCl4 post valve closed
7/26/2011	11:09:59 PM	Bypass valve closed
7/26/2011	11:09:59 PM	Bubbler valve closed
7/26/2011	11:09:59 PM	Main Vac valve opened
7/26/2011	11:09:59 PM	Helium MFC set to  0.000000
7/26/2011	11:09:59 PM	H2 MFC set to  0.000000
7/26/2011	11:09:59 PM	BCl3 MFC set to  0.000000
7/26/2011	11:09:59 PM	PHl3 MFC set to  0.000000
7/26/2011	11:09:59 PM	SiCl4 MFC set to  0.000000
7/26/2011	11:09:59 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	11:09:59 PM	Tube furnace set to 200
7/26/2011	11:10:29 PM	H2 valve closed
7/26/2011	11:10:29 PM	BCl3 valve closed
7/26/2011	11:10:29 PM	PH3 valve closed
7/26/2011	11:10:29 PM	SiCl4 pre valve closed
7/26/2011	11:10:29 PM	SiCl4 post valve closed
7/26/2011	11:10:29 PM	Bypass valve closed
7/26/2011	11:10:29 PM	Bubbler valve closed
7/26/2011	11:10:29 PM	Helium valve opened
7/26/2011	11:10:29 PM	Main Vac valve opened
7/26/2011	11:10:29 PM	Helium MFC set to  20.000000
7/26/2011	11:10:29 PM	H2 MFC set to  0.000000
7/26/2011	11:10:29 PM	BCl3 MFC set to  0.000000
7/26/2011	11:10:29 PM	PHl3 MFC set to  0.000000
7/26/2011	11:10:29 PM	SiCl4 MFC set to  0.000000
7/26/2011	11:10:29 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	11:10:29 PM	Tube furnace set to 200
7/26/2011	11:10:59 PM	Helium valve closed
7/26/2011	11:10:59 PM	H2 valve closed
7/26/2011	11:10:59 PM	BCl3 valve closed
7/26/2011	11:10:59 PM	PH3 valve closed
7/26/2011	11:10:59 PM	SiCl4 pre valve closed
7/26/2011	11:10:59 PM	SiCl4 post valve closed
7/26/2011	11:10:59 PM	Bypass valve closed
7/26/2011	11:10:59 PM	Bubbler valve closed
7/26/2011	11:10:59 PM	Main Vac valve opened
7/26/2011	11:10:59 PM	Helium MFC set to  0.000000
7/26/2011	11:10:59 PM	H2 MFC set to  0.000000
7/26/2011	11:10:59 PM	BCl3 MFC set to  0.000000
7/26/2011	11:10:59 PM	PHl3 MFC set to  0.000000
7/26/2011	11:10:59 PM	SiCl4 MFC set to  0.000000
7/26/2011	11:10:59 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	11:10:59 PM	Tube furnace set to 200
7/26/2011	11:11:29 PM	H2 valve closed
7/26/2011	11:11:29 PM	BCl3 valve closed
7/26/2011	11:11:29 PM	PH3 valve closed
7/26/2011	11:11:29 PM	SiCl4 pre valve closed
7/26/2011	11:11:29 PM	SiCl4 post valve closed
7/26/2011	11:11:29 PM	Bypass valve closed
7/26/2011	11:11:29 PM	Bubbler valve closed
7/26/2011	11:11:29 PM	Helium valve opened
7/26/2011	11:11:29 PM	Main Vac valve opened
7/26/2011	11:11:29 PM	Helium MFC set to  20.000000
7/26/2011	11:11:29 PM	H2 MFC set to  0.000000
7/26/2011	11:11:29 PM	BCl3 MFC set to  0.000000
7/26/2011	11:11:29 PM	PHl3 MFC set to  0.000000
7/26/2011	11:11:29 PM	SiCl4 MFC set to  0.000000
7/26/2011	11:11:29 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	11:11:30 PM	Tube furnace set to 200
7/26/2011	11:12:00 PM	Helium valve closed
7/26/2011	11:12:00 PM	H2 valve closed
7/26/2011	11:12:00 PM	BCl3 valve closed
7/26/2011	11:12:00 PM	PH3 valve closed
7/26/2011	11:12:00 PM	SiCl4 pre valve closed
7/26/2011	11:12:00 PM	SiCl4 post valve closed
7/26/2011	11:12:00 PM	Bypass valve closed
7/26/2011	11:12:00 PM	Bubbler valve closed
7/26/2011	11:12:00 PM	Main Vac valve opened
7/26/2011	11:12:00 PM	Helium MFC set to  0.000000
7/26/2011	11:12:00 PM	H2 MFC set to  0.000000
7/26/2011	11:12:00 PM	BCl3 MFC set to  0.000000
7/26/2011	11:12:00 PM	PHl3 MFC set to  0.000000
7/26/2011	11:12:00 PM	SiCl4 MFC set to  0.000000
7/26/2011	11:12:00 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	11:12:00 PM	Tube furnace set to 200
7/26/2011	11:12:30 PM	H2 valve closed
7/26/2011	11:12:30 PM	BCl3 valve closed
7/26/2011	11:12:30 PM	PH3 valve closed
7/26/2011	11:12:30 PM	SiCl4 pre valve closed
7/26/2011	11:12:30 PM	SiCl4 post valve closed
7/26/2011	11:12:30 PM	Bypass valve closed
7/26/2011	11:12:30 PM	Bubbler valve closed
7/26/2011	11:12:30 PM	Helium valve opened
7/26/2011	11:12:30 PM	Main Vac valve opened
7/26/2011	11:12:30 PM	Helium MFC set to  20.000000
7/26/2011	11:12:30 PM	H2 MFC set to  0.000000
7/26/2011	11:12:30 PM	BCl3 MFC set to  0.000000
7/26/2011	11:12:30 PM	PHl3 MFC set to  0.000000
7/26/2011	11:12:30 PM	SiCl4 MFC set to  0.000000
7/26/2011	11:12:30 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	11:12:30 PM	Tube furnace set to 200
7/26/2011	11:13:00 PM	Helium valve closed
7/26/2011	11:13:00 PM	H2 valve closed
7/26/2011	11:13:00 PM	BCl3 valve closed
7/26/2011	11:13:00 PM	PH3 valve closed
7/26/2011	11:13:00 PM	SiCl4 pre valve closed
7/26/2011	11:13:00 PM	SiCl4 post valve closed
7/26/2011	11:13:00 PM	Bypass valve closed
7/26/2011	11:13:00 PM	Bubbler valve closed
7/26/2011	11:13:00 PM	Main Vac valve opened
7/26/2011	11:13:00 PM	Helium MFC set to  0.000000
7/26/2011	11:13:00 PM	H2 MFC set to  0.000000
7/26/2011	11:13:00 PM	BCl3 MFC set to  0.000000
7/26/2011	11:13:00 PM	PHl3 MFC set to  0.000000
7/26/2011	11:13:00 PM	SiCl4 MFC set to  0.000000
7/26/2011	11:13:00 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	11:13:00 PM	Tube furnace set to 0
7/26/2011	11:13:01 PM	Run finished at 11:13 PM
7/26/2011	11:19:37 PM	Main Vac valve closed
7/26/2011	11:19:47 PM	Main Vac valve opened
7/26/2011	11:20:27 PM	Recipe started at 11:20 PM
7/26/2011	11:20:27 PM	Helium valve closed
7/26/2011	11:20:27 PM	H2 valve closed
7/26/2011	11:20:27 PM	BCl3 valve closed
7/26/2011	11:20:27 PM	PH3 valve closed
7/26/2011	11:20:27 PM	SiCl4 pre valve closed
7/26/2011	11:20:27 PM	SiCl4 post valve closed
7/26/2011	11:20:27 PM	Main Vac valve closed
7/26/2011	11:20:27 PM	Bypass valve closed
7/26/2011	11:20:27 PM	Bubbler valve closed
7/26/2011	11:20:27 PM	Helium MFC set to  0.000000
7/26/2011	11:20:27 PM	H2 MFC set to  0.000000
7/26/2011	11:20:27 PM	BCl3 MFC set to  0.000000
7/26/2011	11:20:27 PM	PHl3 MFC set to  0.000000
7/26/2011	11:20:27 PM	SiCl4 MFC set to  0.000000
7/26/2011	11:20:27 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	11:20:28 PM	Tube furnace set to 0
7/26/2011	11:20:31 PM	Helium valve closed
7/26/2011	11:20:31 PM	BCl3 valve closed
7/26/2011	11:20:31 PM	PH3 valve closed
7/26/2011	11:20:31 PM	SiCl4 pre valve closed
7/26/2011	11:20:31 PM	SiCl4 post valve closed
7/26/2011	11:20:31 PM	Main Vac valve closed
7/26/2011	11:20:31 PM	Bypass valve closed
7/26/2011	11:20:31 PM	Bubbler valve closed
7/26/2011	11:20:31 PM	H2 valve opened
7/26/2011	11:20:31 PM	Helium MFC set to  0.000000
7/26/2011	11:20:31 PM	H2 MFC set to  500.000000
7/26/2011	11:20:31 PM	BCl3 MFC set to  0.000000
7/26/2011	11:20:31 PM	PHl3 MFC set to  0.000000
7/26/2011	11:20:31 PM	SiCl4 MFC set to  0.000000
7/26/2011	11:20:31 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	11:20:31 PM	Tube furnace set to 0
7/26/2011	11:21:34 PM	Helium valve closed
7/26/2011	11:21:34 PM	BCl3 valve closed
7/26/2011	11:21:34 PM	PH3 valve closed
7/26/2011	11:21:34 PM	SiCl4 pre valve closed
7/26/2011	11:21:34 PM	SiCl4 post valve closed
7/26/2011	11:21:34 PM	Main Vac valve closed
7/26/2011	11:21:34 PM	Bypass valve closed
7/26/2011	11:21:34 PM	H2 valve opened
7/26/2011	11:21:34 PM	Bubbler valve opened
7/26/2011	11:21:34 PM	Helium MFC set to  0.000000
7/26/2011	11:21:34 PM	H2 MFC set to  500.000000
7/26/2011	11:21:34 PM	BCl3 MFC set to  0.000000
7/26/2011	11:21:34 PM	PHl3 MFC set to  0.000000
7/26/2011	11:21:34 PM	SiCl4 MFC set to  0.000000
7/26/2011	11:21:34 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	11:21:34 PM	Tube furnace set to 0
7/26/2011	11:21:35 PM	Helium valve closed
7/26/2011	11:21:35 PM	BCl3 valve closed
7/26/2011	11:21:35 PM	PH3 valve closed
7/26/2011	11:21:35 PM	SiCl4 pre valve closed
7/26/2011	11:21:35 PM	SiCl4 post valve closed
7/26/2011	11:21:35 PM	Main Vac valve closed
7/26/2011	11:21:35 PM	Bypass valve closed
7/26/2011	11:21:35 PM	H2 valve opened
7/26/2011	11:21:35 PM	Bubbler valve opened
7/26/2011	11:21:35 PM	Helium MFC set to  0.000000
7/26/2011	11:21:35 PM	H2 MFC set to  500.000000
7/26/2011	11:21:35 PM	BCl3 MFC set to  0.000000
7/26/2011	11:21:35 PM	PHl3 MFC set to  0.000000
7/26/2011	11:21:35 PM	SiCl4 MFC set to  0.000000
7/26/2011	11:21:35 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	11:21:35 PM	Tube furnace set to 1000
7/26/2011	11:41:35 PM	Helium valve closed
7/26/2011	11:41:35 PM	BCl3 valve closed
7/26/2011	11:41:35 PM	PH3 valve closed
7/26/2011	11:41:35 PM	Main Vac valve closed
7/26/2011	11:41:35 PM	Bypass valve closed
7/26/2011	11:41:35 PM	H2 valve opened
7/26/2011	11:41:35 PM	SiCl4 pre valve opened
7/26/2011	11:41:35 PM	SiCl4 post valve opened
7/26/2011	11:41:35 PM	Bubbler valve opened
7/26/2011	11:41:35 PM	Helium MFC set to  0.000000
7/26/2011	11:41:35 PM	H2 MFC set to  500.000000
7/26/2011	11:41:35 PM	BCl3 MFC set to  0.000000
7/26/2011	11:41:35 PM	PHl3 MFC set to  0.000000
7/26/2011	11:41:35 PM	SiCl4 MFC set to  50.000000
7/26/2011	11:41:35 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	11:41:35 PM	Tube furnace set to 1000
7/26/2011	11:46:35 PM	Helium valve closed
7/26/2011	11:46:35 PM	BCl3 valve closed
7/26/2011	11:46:35 PM	PH3 valve closed
7/26/2011	11:46:35 PM	SiCl4 pre valve closed
7/26/2011	11:46:35 PM	SiCl4 post valve closed
7/26/2011	11:46:35 PM	Main Vac valve closed
7/26/2011	11:46:35 PM	Bypass valve closed
7/26/2011	11:46:35 PM	H2 valve opened
7/26/2011	11:46:35 PM	Bubbler valve opened
7/26/2011	11:46:35 PM	Helium MFC set to  0.000000
7/26/2011	11:46:35 PM	H2 MFC set to  500.000000
7/26/2011	11:46:35 PM	BCl3 MFC set to  0.000000
7/26/2011	11:46:35 PM	PHl3 MFC set to  0.000000
7/26/2011	11:46:35 PM	SiCl4 MFC set to  0.000000
7/26/2011	11:46:35 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	11:46:35 PM	Tube furnace set to 950
7/26/2011	11:48:36 PM	Helium valve closed
7/26/2011	11:48:36 PM	BCl3 valve closed
7/26/2011	11:48:36 PM	PH3 valve closed
7/26/2011	11:48:36 PM	SiCl4 pre valve closed
7/26/2011	11:48:36 PM	SiCl4 post valve closed
7/26/2011	11:48:36 PM	Main Vac valve closed
7/26/2011	11:48:36 PM	Bypass valve closed
7/26/2011	11:48:36 PM	H2 valve opened
7/26/2011	11:48:36 PM	Bubbler valve opened
7/26/2011	11:48:36 PM	Helium MFC set to  0.000000
7/26/2011	11:48:36 PM	H2 MFC set to  500.000000
7/26/2011	11:48:36 PM	BCl3 MFC set to  0.000000
7/26/2011	11:48:36 PM	PHl3 MFC set to  0.000000
7/26/2011	11:48:36 PM	SiCl4 MFC set to  0.000000
7/26/2011	11:48:36 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	11:48:36 PM	Tube furnace set to 900
7/26/2011	11:50:36 PM	Helium valve closed
7/26/2011	11:50:36 PM	BCl3 valve closed
7/26/2011	11:50:36 PM	PH3 valve closed
7/26/2011	11:50:36 PM	SiCl4 pre valve closed
7/26/2011	11:50:36 PM	SiCl4 post valve closed
7/26/2011	11:50:36 PM	Main Vac valve closed
7/26/2011	11:50:36 PM	Bypass valve closed
7/26/2011	11:50:36 PM	H2 valve opened
7/26/2011	11:50:36 PM	Bubbler valve opened
7/26/2011	11:50:36 PM	Helium MFC set to  0.000000
7/26/2011	11:50:36 PM	H2 MFC set to  500.000000
7/26/2011	11:50:36 PM	BCl3 MFC set to  0.000000
7/26/2011	11:50:36 PM	PHl3 MFC set to  0.000000
7/26/2011	11:50:36 PM	SiCl4 MFC set to  0.000000
7/26/2011	11:50:36 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	11:50:36 PM	Tube furnace set to 850
7/26/2011	11:52:36 PM	H2 valve closed
7/26/2011	11:52:36 PM	BCl3 valve closed
7/26/2011	11:52:36 PM	PH3 valve closed
7/26/2011	11:52:36 PM	SiCl4 pre valve closed
7/26/2011	11:52:36 PM	SiCl4 post valve closed
7/26/2011	11:52:36 PM	Main Vac valve closed
7/26/2011	11:52:36 PM	Bypass valve closed
7/26/2011	11:52:36 PM	Helium valve opened
7/26/2011	11:52:36 PM	Bubbler valve opened
7/26/2011	11:52:36 PM	Helium MFC set to  500.000000
7/26/2011	11:52:36 PM	H2 MFC set to  0.000000
7/26/2011	11:52:36 PM	BCl3 MFC set to  0.000000
7/26/2011	11:52:36 PM	PHl3 MFC set to  0.000000
7/26/2011	11:52:36 PM	SiCl4 MFC set to  0.000000
7/26/2011	11:52:36 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	11:52:36 PM	Tube furnace set to 800
7/26/2011	11:54:36 PM	H2 valve closed
7/26/2011	11:54:36 PM	BCl3 valve closed
7/26/2011	11:54:36 PM	PH3 valve closed
7/26/2011	11:54:36 PM	SiCl4 pre valve closed
7/26/2011	11:54:36 PM	SiCl4 post valve closed
7/26/2011	11:54:36 PM	Main Vac valve closed
7/26/2011	11:54:36 PM	Bypass valve closed
7/26/2011	11:54:36 PM	Helium valve opened
7/26/2011	11:54:36 PM	Bubbler valve opened
7/26/2011	11:54:36 PM	Helium MFC set to  500.000000
7/26/2011	11:54:36 PM	H2 MFC set to  0.000000
7/26/2011	11:54:36 PM	BCl3 MFC set to  0.000000
7/26/2011	11:54:36 PM	PHl3 MFC set to  0.000000
7/26/2011	11:54:36 PM	SiCl4 MFC set to  0.000000
7/26/2011	11:54:36 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	11:54:36 PM	Tube furnace set to 750
7/26/2011	11:56:36 PM	H2 valve closed
7/26/2011	11:56:36 PM	BCl3 valve closed
7/26/2011	11:56:36 PM	PH3 valve closed
7/26/2011	11:56:36 PM	SiCl4 pre valve closed
7/26/2011	11:56:36 PM	SiCl4 post valve closed
7/26/2011	11:56:36 PM	Main Vac valve closed
7/26/2011	11:56:36 PM	Bypass valve closed
7/26/2011	11:56:36 PM	Helium valve opened
7/26/2011	11:56:36 PM	Bubbler valve opened
7/26/2011	11:56:36 PM	Helium MFC set to  500.000000
7/26/2011	11:56:36 PM	H2 MFC set to  0.000000
7/26/2011	11:56:36 PM	BCl3 MFC set to  0.000000
7/26/2011	11:56:36 PM	PHl3 MFC set to  0.000000
7/26/2011	11:56:36 PM	SiCl4 MFC set to  0.000000
7/26/2011	11:56:36 PM	Bypass solenoid MFC set to  0.000000
7/26/2011	11:56:37 PM	Tube furnace set to 0
